GAWO/1CVD (Chemical Vapor Deposition) Njira: Pa 900-2300 ℃, pogwiritsa ntchito TaCl5 ndi CnHm ngati magwero a tantalum ndi kaboni, H₂ monga mpweya wochepetsera, Ar₂ monga mpweya wonyamulira, filimu yoyikira. Chophimba chokonzekera ndi chophatikizika, yunifolomu komanso chiyero chapamwamba. Komabe, pali zovuta zina ...
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