Mu unyolo wamakampani a semiconductor, makamaka mum'badwo wachitatu wa semiconductor (wide bandgap semiconductor) makampani, pali magawo ndi magawo.epitaxialzigawo. Kodi tanthauzo lake ndi chiyaniepitaxialwosanjikiza? Kodi pali kusiyana kotani pakati pa gawo lapansi ndi gawo lapansi?
Gawo lapansi ndi amtandazopangidwa ndi semiconductor single crystal materials. Gawo lapansi limatha kulowa mwachindunjimtandaulalo wopanga kupanga zida za semiconductor, kapena zitha kukonzedwa ndiepitaxialnjira yopangira zowotcha za epitaxial. The gawo lapansi ndi pansi pamtanda(dulani chowotchacho, mutha kufa pambuyo pa chimzake, kenako ndikuchiyika kuti chikhale chodziwika bwino) (kwenikweni, pansi pa chip nthawi zambiri amakutidwa ndi golide wakumbuyo, womwe umagwiritsidwa ntchito ngati "nthaka" yolumikizira, koma amapangidwa m'mbuyo), ndipo maziko omwe amanyamula ntchito yonse yothandizira (skyscraper mu chip imamangidwa pa gawo lapansi).
Epitaxy imatanthawuza njira yowonjezera kristalo yatsopano pa gawo limodzi la kristalo lomwe lakonzedwa mosamala ndi kudula, kugaya, kupukuta, ndi zina zotero. (homoepitaxial kapena heteroepitaxial).
Popeza mtundu watsopano wa kristalo womwe wangopangidwa kumene umakula m'mbali mwa gawo lapansi la kristalo, umatchedwa epitaxial layer (nthawi zambiri ma microns angapo wandiweyani. Tengani silicon monga chitsanzo: tanthauzo la silicon epitaxial kukula ndikukulitsa wosanjikiza wa kristalo wokhala ndi umphumphu wabwino wa lattice. pa silicon single crystal substrate yokhala ndi mawonekedwe ena a kristalo ndi resistivity yosiyana ndi makulidwe monga gawo lapansi), ndipo gawo lapansi lomwe lili ndi epitaxial layer limatchedwa epitaxial wafer (epitaxial wafer = epitaxial layer + substrate). Kupanga chipangizo kumachitika pa epitaxial wosanjikiza.
Epitaxiality imagawidwa kukhala homoepitaxiality ndi heteroepitaxiality. Homoepitaxiality ndikukulitsa epitaxial wosanjikiza wa zinthu zomwezo monga gawo lapansi pa gawo lapansi. Kodi tanthauzo la homoepitaxiality ndi chiyani? - Sinthani kukhazikika kwazinthu ndi kudalirika kwazinthu. Ngakhale kuti homoepitaxiality ndikukulitsa epitaxial wosanjikiza wa zinthu zomwezo monga gawo lapansi, ngakhale zinthuzo ndi zofanana, zimatha kupititsa patsogolo chiyero chakuthupi ndi kufananiza kwa pamwamba. Poyerekeza ndi zopatulira zopukutidwa ndi kupukuta kwamakina, gawo lapansi lomwe limakonzedwa ndi epitaxiality lili ndi kusalala kwapamwamba, ukhondo wapamwamba, zolakwika zazing'ono zochepa, komanso zonyansa zocheperako. Choncho, resistivity ndi yunifolomu, ndipo n'zosavuta kulamulira zofooka pamwamba monga pamwamba particles, stacking zolakwika, ndi dislocations. Epitaxy sikuti imangowonjezera magwiridwe antchito, komanso imatsimikizira kukhazikika kwazinthu komanso kudalirika.
Kodi maubwino opangira gawo lina la maatomu a silicon epitaxial pa gawo lapansi la silicon wafer ndi chiyani? Mu ndondomeko ya silicon ya CMOS, kukula kwa epitaxial (EPI, epitaxial) pa gawo lapansi lawafa ndi gawo lovuta kwambiri.
1. Sinthani khalidwe la kristalo
Zowonongeka zoyamba za gawo lapansi ndi zonyansa: Gawo lawafa likhoza kukhala ndi zolakwika zina ndi zonyansa panthawi yopanga. Kukula kwa epitaxial wosanjikiza kumatha kupanga mawonekedwe apamwamba kwambiri, otsika komanso odetsedwa-concentration single-crystalline silicon wosanjikiza pa gawo lapansi, lomwe ndi lofunika kwambiri pakupanga chipangizo chotsatira. Kapangidwe ka kristalo kofanana: Kukula kwa Epitaxial kumatha kuonetsetsa kuti mawonekedwe a kristalo a yunifolomu, amachepetsa mphamvu ya malire a tirigu ndi zolakwika pagawo laling'ono, motero kumapangitsa kuti kristaloyo ikhale yabwino.
2. Kupititsa patsogolo ntchito zamagetsi
Konzani mawonekedwe a chipangizo: Pokulitsa gawo la epitaxial pagawo lapansi, kuchuluka kwa doping ndi mtundu wa silicon zitha kuyendetsedwa bwino kuti ziwongolere magwiridwe antchito amagetsi a chipangizocho. Mwachitsanzo, doping wa epitaxial wosanjikiza angasinthe molondola voteji pakhomo ndi zina magetsi magawo a MOSFET. Chepetsani kutayikira kwaposachedwa: Magawo apamwamba a epitaxial ali ndi kachulukidwe kakang'ono kachilema, zomwe zimathandiza kuchepetsa kutayikira kwaposachedwa mu chipangizocho, potero kumapangitsa magwiridwe antchito ndi kudalirika kwa chipangizocho.
3. Support patsogolo ndondomeko mfundo
Kuchepetsa kukula kwa mawonekedwe: M'magawo ang'onoang'ono (monga 7nm, 5nm), kukula kwa chipangizocho kukucheperachepera, kumafuna zida zoyengedwa komanso zapamwamba kwambiri. Ukadaulo wa kukula kwa Epitaxial utha kukwaniritsa zofunikirazi ndikuthandizira magwiridwe antchito apamwamba komanso ophatikizika kwambiri. Limbikitsani mphamvu yowononga mphamvu: Epitaxial layer ikhoza kupangidwa kuti ikhale ndi magetsi othamanga kwambiri, omwe ndi ofunikira kwambiri popanga zida zamphamvu kwambiri komanso zamagetsi. Mwachitsanzo, pazida zamagetsi, epitaxial wosanjikiza imatha kukulitsa mphamvu yamagetsi ya chipangizocho ndikuwonjezera magwiridwe antchito otetezeka.
4. Kugwirizana kwa ndondomeko ndi mapangidwe amitundu yambiri
Mapangidwe amitundu yambiri: Tekinoloje ya kukula kwa Epitaxial imalola kuti zida zamitundu yambiri zikule pa gawo lapansi, ndipo magawo osiyanasiyana amatha kukhala ndi mitundu yosiyanasiyana ya doping ndi mitundu. Izi ndizothandiza kwambiri popanga zida zovuta za CMOS ndikukwaniritsa kuphatikiza kwamitundu itatu. Kugwirizana: Njira ya kukula kwa epitaxial imagwirizana kwambiri ndi njira zopangira CMOS zomwe zilipo kale ndipo zimatha kuphatikizidwa mosavuta ndi njira zomwe zilipo kale popanda kusintha kwambiri mizere ya ndondomekoyi.
Nthawi yotumiza: Jul-16-2024