Monga chimodzi mwa zigawo zikuluzikulu zaZida za MOCVD, graphite m'munsi ndi chonyamulira ndi Kutentha thupi la gawo lapansi, amene mwachindunji chimatsimikizira yunifolomu ndi chiyero filimu zakuthupi, kotero khalidwe lake mwachindunji zimakhudza yokonza pepala epitaxial, ndipo nthawi yomweyo, ndi kuwonjezeka kwa chiwerengero cha ntchito ndi kusintha kwa zinthu ntchito, n'zosavuta kuvala, za consumables.
Ngakhale graphite ali kwambiri matenthedwe madutsidwe ndi kukhazikika, ali ndi mwayi wabwino monga m'munsi chigawo chaZida za MOCVD, koma popanga, graphite idzawononga ufa chifukwa cha zotsalira za mpweya wowononga ndi zitsulo zachitsulo, ndipo moyo wautumiki wa maziko a graphite udzachepetsedwa kwambiri.Pa nthawi yomweyo, kugwa graphite ufa adzachititsa kuipitsa kwa Chip.
Kuwonekera kwa teknoloji yokutira kungapereke kukhazikika kwa ufa pamwamba, kupititsa patsogolo matenthedwe matenthedwe, ndi kufananitsa kugawa kwa kutentha, komwe kwakhala teknoloji yaikulu yothetsera vutoli.Graphite base muZida za MOCVDntchito chilengedwe, graphite m'munsi ❖ kuyanika pamwamba ayenera kukwaniritsa makhalidwe awa:
(1) Mtsinje wa graphite ukhoza kukulungidwa bwino, ndipo kachulukidwe kake ndi bwino, mwinamwake maziko a graphite ndi osavuta kuti awonongeke mu gasi wowononga.
(2) Kuphatikizika mphamvu ndi graphite m'munsi ndi mkulu kuonetsetsa kuti ❖ kuyanika si kophweka kugwa pambuyo kangapo kutentha ndi kutentha otsika mkombero.
(3) Imakhala ndi kukhazikika kwamankhwala kuti ipewe ❖ kuyanika pa kutentha kwambiri komanso mlengalenga wowononga.
SiC ili ndi ubwino wa kukana kwa dzimbiri, kutsekemera kwapamwamba kwa kutentha, kutentha kwa kutentha ndi kukhazikika kwa mankhwala, ndipo imatha kugwira ntchito bwino mu GaN epitaxial atmosphere.Kuphatikiza apo, kuchuluka kwa kutentha kwa SiC kumasiyana pang'ono ndi graphite, kotero SiC ndiye chinthu chomwe chimakondedwa kwambiri pakuphimba pamwamba pa graphite base.
Pakali pano, SiC wamba makamaka 3C, 4H ndi 6H mtundu, ndi SiC ntchito mitundu kristalo osiyana.Mwachitsanzo, 4H-SiC imatha kupanga zida zamphamvu kwambiri;6H-SiC ndiyokhazikika kwambiri ndipo imatha kupanga zida zamagetsi zamagetsi;Chifukwa cha mawonekedwe ake ofanana ndi GaN, 3C-SiC ingagwiritsidwe ntchito kupanga GaN epitaxial layer ndikupanga zipangizo za SiC-GaN RF.3C-SiC imadziwikanso kutiβ-SiC, komanso kugwiritsa ntchito kofunikiraβ-SiC ili ngati filimu ndi zinthu zokutira, koteroβ-SiC pakadali pano ndiye chinthu chachikulu chopangira zokutira.
Nthawi yotumiza: Nov-06-2023