Masiku ano paukadaulo wamagetsi, zida za semiconductor zimagwira ntchito yofunika kwambiri.Pakati pawo, pakachitsulo carbide (SiC) monga lonse gulu kusiyana semiconductor chuma, ndi ubwino wake ntchito kwambiri, monga mkulu kusweka magetsi munda, mkulu machulukitsidwe liwiro, mkulu matenthedwe madutsidwe, etc., pang'onopang'ono kukhala cholinga cha ofufuza ndi akatswiri.Silicon carbide epitaxial disk, monga gawo lofunikira la izo, yawonetsa kuthekera kwakukulu kogwiritsa ntchito.
一、epitaxial disk performance: zabwino zonse
1. Munda wamagetsi wowonongeka kwambiri: poyerekeza ndi zida zachikhalidwe za silicon, gawo lamagetsi lowonongeka la silicon carbide ndi nthawi zopitilira 10.Izi zikutanthauza kuti pansi pa ma voltage omwewo, zipangizo zamagetsi zogwiritsira ntchito silicon carbide epitaxial disks zimatha kupirira mafunde apamwamba, potero zimapanga zipangizo zamagetsi zothamanga kwambiri, zothamanga kwambiri, zamphamvu kwambiri.
2. Kuthamanga kwapamwamba kwambiri: kuthamanga kwa machulukidwe a silicon carbide ndi nthawi zoposa 2 kuposa silicon.Kugwira ntchito pa kutentha kwakukulu komanso kuthamanga kwambiri, silicon carbide epitaxial disk imachita bwino, zomwe zimathandizira kwambiri kukhazikika ndi kudalirika kwa zipangizo zamagetsi.
3. High dzuwa matenthedwe madutsidwe: matenthedwe madutsidwe wa silicon carbide ndi kuposa 3 nthawi silicon.Izi zimathandiza kuti zipangizo zamagetsi zizitha kutentha bwino panthawi yogwiritsira ntchito mphamvu zambiri, potero zimalepheretsa kutenthedwa ndi kupititsa patsogolo chitetezo cha chipangizo.
4. Kukhazikika kwamankhwala kwabwino kwambiri: m'malo ovuta kwambiri monga kutentha kwambiri, kuthamanga kwambiri komanso ma radiation amphamvu, ntchito ya silicon carbide ikadali yokhazikika monga kale.Izi zimapangitsa kuti silicon carbide epitaxial disk ikhalebe yogwira ntchito bwino pakukumana ndi zovuta.
二、kupanga njira: chosema mosamala
Njira zazikulu zopangira SIC epitaxial disk ndikuphatikizapo vapor deposition (PVD), chemical vapor deposition (CVD) ndi kukula kwa epitaxial.Iliyonse mwa njirazi ili ndi mawonekedwe ake ndipo imafunikira kuwongolera moyenera magawo osiyanasiyana kuti mupeze zotsatira zabwino.
1. Njira ya PVD: Pogwiritsa ntchito mpweya kapena kupopera ndi njira zina, cholinga cha SiC chimayikidwa pa gawo lapansi kuti apange filimu.Kanema wokonzedwa ndi njirayi ali ndi chiyero chapamwamba komanso crystallinity yabwino, koma liwiro la kupanga ndilochepa.
2. Njira ya CVD: Mwa kuphwanya mpweya wa silicon carbide pa kutentha kwakukulu, imayikidwa pa gawo lapansi kuti apange filimu yopyapyala.Makulidwe ndi kufanana kwa filimuyi yokonzedwa ndi njirayi ndi yokhoza kulamuliridwa, koma chiyero ndi crystallinity ndizosauka.
3. Epitaxial kukula: kukula kwa SiC epitaxial wosanjikiza pa silicon monocrystalline kapena zipangizo zina monocrystalline ndi mankhwala nthunzi deposition njira.Epitaxial wosanjikiza wokonzedwa ndi njirayi uli ndi kufanana kwabwino komanso magwiridwe antchito abwino kwambiri ndi gawo lapansi, koma mtengo wake ndi wokwera kwambiri.
三、Chiyembekezo cha ntchito: Kuwunikira zamtsogolo
Ndikukula kosalekeza kwaukadaulo wamagetsi amagetsi komanso kuchuluka kwa kufunikira kwa magwiridwe antchito apamwamba komanso zida zamagetsi zodalirika kwambiri, silicon carbide epitaxial disk ili ndi chiyembekezo chogwiritsa ntchito popanga zida za semiconductor.Amagwiritsidwa ntchito kwambiri popanga zida zamtundu wapamwamba kwambiri za semiconductor, monga magetsi amagetsi, inverters, rectifiers, etc. Kuphatikiza apo, amagwiritsidwanso ntchito kwambiri m'maselo a dzuwa, LED ndi madera ena.
Ndi maubwino ake apadera komanso kuwongolera kosalekeza kwa kupanga, silicon carbide epitaxial disk pang'onopang'ono ikuwonetsa kuthekera kwake kwakukulu m'munda wa semiconductor.Tili ndi zifukwa zokhulupirira kuti tsogolo la sayansi ndi luso lazopangapanga lidzagwira ntchito yofunika kwambiri.
Nthawi yotumiza: Nov-28-2023