Masiku ano paukadaulo wamagetsi, zida za semiconductor zimagwira ntchito yofunika kwambiri. Mwa iwo,silicon carbide (SiC)monga gulu lalikulu la gap semiconductor material, ndi ubwino wake wochita bwino, monga magetsi owonongeka kwambiri, kuthamanga kwapamwamba, kuthamanga kwapamwamba, ndi zina zotero, pang'onopang'ono akuyamba kuyang'ana pa ofufuza ndi mainjiniya. Thesilicon carbide epitaxial disk, monga gawo lofunikira la izo, zawonetsa kuthekera kwakukulu kogwiritsa ntchito.
一、epitaxial disk performance: zabwino zonse
1. Malo amagetsi owonongeka kwambiri: poyerekeza ndi zida zachikhalidwe za silicon, gawo lamagetsi lowonongeka lasilicon carbidendi nthawi zopitilira 10. Izi zikutanthauza kuti pansi pa zinthu zomwezo voteji, zipangizo zamagetsi ntchitosilicon carbide epitaxial disksimatha kupirira mafunde apamwamba, potero imapanga zida zamagetsi zamagetsi, zothamanga kwambiri, zamphamvu kwambiri.
2. Kuthamanga kwapamwamba kwambiri: kuthamanga kwa machulukitsidwe asilicon carbidendi nthawi yoposa 2 ya silicon. Kugwira ntchito pa kutentha kwakukulu komanso kuthamanga kwambiri, ndisilicon carbide epitaxial diskamachita bwino, zomwe zimathandizira kwambiri kukhazikika ndi kudalirika kwa zida zamagetsi.
3. High dzuwa matenthedwe madutsidwe: matenthedwe madutsidwe wa silicon carbide ndi kuposa 3 nthawi silicon. Izi zimathandiza kuti zipangizo zamagetsi zizitha kutentha bwino panthawi yogwiritsira ntchito mphamvu zambiri, potero zimalepheretsa kutenthedwa ndi kupititsa patsogolo chitetezo cha chipangizo.
4. Kukhazikika kwamankhwala kwabwino kwambiri: m'malo ovuta kwambiri monga kutentha kwambiri, kuthamanga kwambiri komanso ma radiation amphamvu, ntchito ya silicon carbide ikadali yokhazikika monga kale. Izi zimapangitsa kuti silicon carbide epitaxial disk ikhalebe yogwira ntchito bwino pakukumana ndi zovuta.
二、kupanga njira: chosema mosamala
Njira zazikulu zopangira SIC epitaxial disk ndikuphatikizapo vapor deposition (PVD), chemical vapor deposition (CVD) ndi kukula kwa epitaxial. Iliyonse mwa njirazi ili ndi mawonekedwe ake ndipo imafunikira kuwongolera moyenera magawo osiyanasiyana kuti mupeze zotsatira zabwino.
1. Njira ya PVD: Pogwiritsa ntchito mpweya kapena kupopera ndi njira zina, cholinga cha SiC chimayikidwa pa gawo lapansi kuti apange filimu. Kanema wokonzedwa ndi njirayi ali ndi chiyero chapamwamba komanso crystallinity yabwino, koma liwiro la kupanga ndilochepa.
2. Njira ya CVD: Mwa kuphwanya mpweya wa silicon carbide pa kutentha kwakukulu, imayikidwa pa gawo lapansi kuti apange filimu yopyapyala. Makulidwe ndi kufanana kwa filimuyi yokonzedwa ndi njirayi ndi yokhoza kulamuliridwa, koma chiyero ndi crystallinity ndizosauka.
3. Epitaxial kukula: kukula kwa SiC epitaxial wosanjikiza pa silicon monocrystalline kapena zipangizo zina monocrystalline ndi mankhwala nthunzi deposition njira. Epitaxial wosanjikiza wokonzedwa ndi njirayi uli ndi kufanana kwabwino komanso magwiridwe antchito abwino kwambiri ndi gawo lapansi, koma mtengo wake ndi wokwera kwambiri.
三、Chiyembekezo cha Ntchito: Kuwunikira zamtsogolo
Ndi kukula kosalekeza kwa ukadaulo wamagetsi amagetsi komanso kuchuluka kwa kufunikira kwa magwiridwe antchito apamwamba komanso zida zamagetsi zodalirika kwambiri, silicon carbide epitaxial disk ili ndi chiyembekezo chogwiritsa ntchito kwambiri popanga zida za semiconductor. Amagwiritsidwa ntchito kwambiri popanga zida zamtundu wapamwamba kwambiri za semiconductor, monga magetsi amagetsi, inverters, rectifiers, etc. Komanso, amagwiritsidwanso ntchito kwambiri m'maselo a dzuwa, LED ndi madera ena.
Ndi ubwino wake wapadera wa ntchito komanso kupititsa patsogolo kosalekeza kwa kupanga, silicon carbide epitaxial disk pang'onopang'ono ikuwonetsa kuthekera kwake kwakukulu m'munda wa semiconductor. Tili ndi zifukwa zokhulupirira kuti tsogolo la sayansi ndi luso lazopangapanga lidzagwira ntchito yofunika kwambiri.
Nthawi yotumiza: Nov-28-2023