Semicera imapereka mwambo wapamwamba kwambirisilicon carbide cantilever paddlesidapangidwa kuti ikweze njira zopangira semiconductor. ZatsopanoSiC palakamangidwe kamapangitsa kuti pakhale kukhazikika kwapadera komanso kukana kutentha kwambiri, kumapangitsa kuti ikhale yofunika kwambiri pogwira zopindika m'malo ovuta kutentha kwambiri.
ThePansi ya silicon carbideimapangidwa kuti ipirire kutenthedwa kwambiri ndikusunga umphumphu, kuwonetsetsa kuti mayendedwe odalirika a kafeti panthawi yovuta kwambiri yopanga semiconductor. Ndi mphamvu zamakina apamwamba, izibwato lamkatiamachepetsa chiwopsezo cha kuwonongeka kwa zopingasa, zomwe zimapangitsa kuti pakhale zokolola zambiri komanso kupanga kosasintha.
Chimodzi mwazatsopano zazikulu mu Semicera's SiC paddle chili muzosankha zake zamapangidwe. Zokonzedwa kuti zikwaniritse zosowa zenizeni zopangira, paddle imapereka kusinthasintha pakuphatikizidwa ndi zida zosiyanasiyana zokhazikitsira, kupangitsa kuti ikhale yankho labwino pakupanga kwamakono. Kumanga kopepuka koma kolimba kumathandizira kugwirira ntchito mosavuta ndikuchepetsa nthawi yogwira ntchito, zomwe zimathandizira kuti pakhale bwino pakupanga semiconductor.
Kuwonjezera matenthedwe ake ndi makina katundu, ndiPansi ya silicon carbideimapereka kukana kwamphamvu kwamankhwala, kulola kuti igwire ntchito modalirika ngakhale m'malo ovuta kwambiri. Izi zimapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito m'njira zophatikizira ma etching, deposition, ndi chithandizo cha kutentha kwambiri, komwe kusunga kukhulupirika kwa boti lawafer ndikofunikira pakuwonetsetsa kuti kutulutsa kwapamwamba kwambiri.
Zakuthupi za Recrystallized Silicon Carbide | |
Katundu | Mtengo Wodziwika |
Kutentha kogwira ntchito (°C) | 1600 ° C (ndi mpweya), 1700 ° C (kuchepetsa chilengedwe) |
Zinthu za SiC | 99.96% |
Zaulere za Si | <0.1% |
Kuchulukana kwakukulu | 2.60-2.70 g / masentimita3 |
Zowoneka porosity | < 16% |
Kupanikizika kwamphamvu | > 600 MPa |
Kuzizira kopinda mphamvu | 80-90 MPa (20°C) |
Mphamvu yopindika yotentha | 90-100 MPa (1400°C) |
Kukula kwa kutentha pa 1500°C | 4.70 10-6/°C |
Thermal conductivity @ 1200 ° C | 23 W/m•K |
Elastic moduli | 240 GPA |
Thermal shock resistance | Zabwino kwambiri |