Zida za semiconductor za m'badwo wachitatu makamaka zikuphatikizapo SiC, GaN, diamondi, ndi zina zotero, chifukwa kusiyana kwake kwa gulu (Mwachitsanzo) ndi kwakukulu kuposa kapena kofanana ndi ma volts 2.3 amagetsi (eV), omwe amadziwikanso kuti zipangizo zamakono zopangira magetsi. Poyerekeza ndi zida za semiconductor za m'badwo wachitatu ndi wachiwiri, zida za semiconductor za m'badwo wachitatu zili ndi zabwino zaukadaulo wapamwamba wamatenthedwe, malo amagetsi osweka kwambiri, kuchuluka kwakusamuka kwa ma elekitironi apamwamba komanso mphamvu zomangirira, zomwe zimatha kukwaniritsa zofunikira zatsopano zamaukadaulo amakono amagetsi apamwamba. kutentha, mphamvu, kuthamanga, kuthamanga kwafupipafupi komanso kukana kwa radiation ndi zinthu zina zovuta. Ili ndi mwayi wofunikira wogwiritsa ntchito chitetezo cha dziko, ndege, ndege, kufufuza mafuta, kusungirako kuwala, ndi zina zotero, ndipo imatha kuchepetsa kutaya mphamvu ndi 50% m'mafakitale ambiri monga mauthenga a Broadband, mphamvu ya dzuwa, kupanga magalimoto, kuyatsa kwa semiconductor, ndi gridi yanzeru, ndipo kumatha kuchepetsa kuchuluka kwa zida ndi 75%, zomwe ndizofunikira kwambiri pakukula kwa sayansi ndiukadaulo wa anthu.
Chinthu 项目 | GaN-FS-CU-C50 | GaN-FS-CN-C50 | GaN-FS-C-SI-C50 |
Diameter | 50.8 ± 1 mm | ||
Makulidwe厚度 | 350 ± 25 μm | ||
Kuwongolera | C ndege (0001) kuchoka kumbali yopita ku M-axis 0.35 ± 0.15° | ||
Prime Flat | (1-100) 0 ± 0.5°, 16 ± 1 mm | ||
Sekondale Flat | (11-20) 0 ± 3°, 8 ± 1 mm | ||
Conductivity | N-mtundu | N-mtundu | Semi-Insulating |
Kukaniza (300K) | <0.1 Ω·cm | <0.05 Ω·cm | > 106 Ω·cm |
TTV | ≤ 15 μm | ||
BOW | ≤ 20 μm | ||
Ga Face Surface Kuyipa | <0.2 nm (yopukutidwa); | ||
kapena <0.3 nm (mankhwala opukutidwa ndi apamwamba a epitaxy) | |||
N Nkhope Ya Pamaso | 0.5 ~ 1.5 μm | ||
kusankha: 1 ~ 3 nm (nthaka yabwino); <0.2 nm (yopukutidwa) | |||
Dislocation Density | Kuchokera 1 x 105 mpaka 3 x 106 cm-2 (yowerengeredwa ndi CL)* | ||
Macro Defect Density | <2cm-2 | ||
Malo Ogwiritsidwa Ntchito | > 90% (kupatulapo m'mphepete ndi zovuta zazikulu) | ||
Ikhoza kusinthidwa malinga ndi zofuna za makasitomala, mawonekedwe osiyanasiyana a silicon, safiro, SiC yochokera ku GaN epitaxial sheet. |