CVD SiC Etching mphete

Kufotokozera Kwachidule:

Mphete ya CVD SiC Etching yochokera ku Semicera idapangidwa kuti ikwaniritse zofunikira pakupanga semiconductor. Wopangidwa kuchokera ku silicon carbide yapamwamba kwambiri, mphete yotchinga iyi imatsimikizira magwiridwe antchito apamwamba munjira zosiyanasiyana zama etching. Semicera imayika patsogolo kulimba komanso kulondola, ndikupangitsa mphete zathu kukhala chinthu chofunikira pakugwiritsa ntchito kwa semiconductor iliyonse yapamwamba.

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Chifukwa chiyani Silicon Carbide ikuphimba?

CVD SiC Etching mphete yochokera ku Semicera, yankho loyamba lopangidwira njira zapamwamba zopangira semiconductor. Mphete zathu za etching zidapangidwa mwaluso kuti ziwongolere magwiridwe antchito a mitu ya shawa ya CVD SiC, kuwonetsetsa kuti pakhale zotsatira zabwino kwambiri pakugawa. Ndi zomangamanga zolimba komanso uinjiniya wolondola, mphetezi zimapereka kudalirika komanso kuchita bwino komwe kumafunikira pakugwiritsa ntchito zowuma zapamwamba kwambiri.

Ku Semicera, timamvetsetsa gawo lofunikira lomwe silicon carbide imachita muukadaulo wa semiconductor. Mphete zathu za CVD SiC etching zidapangidwa makamaka kuti zigwirizane ndi njira zosiyanasiyana, kuphatikiza MOCVD ndi njira zina zolumikizira. Kupangidwa kolimba kwa SiC kumatsimikizira kukhazikika kwamafuta komanso kukana kwamankhwala, kupangitsa mphete zathu zomangira kukhala chisankho chomwe timakonda pamadera ovuta kwambiri.

Kudzipereka kwathu pazatsopano ndi mtundu kumawonetsetsa kuti mphete iliyonse ya CVD SiC etching ikukwaniritsa miyezo yapamwamba kwambiri yamakampani. Sankhani Semicera pamayankho anu etching ndikukumana ndi magwiridwe antchito osayerekezeka komanso kulimba kogwirizana ndi zosowa zanu zapadera. Ndi ukatswiri wathu mu SiC showerheads ndi etching technology, tili pano kuti tikuthandizireni kuchita bwino mu gawo la semiconductor.

M'munda wa semiconductor, kukhazikika kwa gawo lililonse ndikofunikira kwambiri panjira yonseyi. Komabe, m'malo otentha kwambiri, ma graphite amapangidwa ndi okosijeni mosavuta komanso kutayika, ndipo zokutira za SiC zimatha kupereka chitetezo chokhazikika pazigawo za graphite. MuSemiceragulu, tili ndi zida zathu zoyeretsera ma graphite, zomwe zimatha kuwongolera chiyero cha graphite pansipa 5ppm. Kuyera kwa zokutira za silicon carbide kulinso pansi pa 5ppm.