Semicera imayambitsaWafer Cassette Carrier, yankho lofunikira pakuwongolera kotetezeka komanso koyenera kwa ma semiconductor wafers. Chonyamulirachi chimapangidwa kuti chikwaniritse zofunikira pamakampani opanga ma semiconductor, kuwonetsetsa kuti zowola zanu zimatetezedwa komanso kukhulupirika panthawi yonse yopanga.
Zofunika Kwambiri:
•Kumanga Kwamphamvu:TheWafer Cassette Carrierimamangidwa kuchokera ku zipangizo zamtengo wapatali, zolimba zomwe zimapirira zovuta za malo a semiconductor, zomwe zimapereka chitetezo chodalirika ku kuipitsidwa ndi kuwonongeka kwa thupi.
•Kuyanjanitsa Yeniyeni:Zopangidwira kuti zigwirizane bwino, chonyamulirachi chimaonetsetsa kuti zowotcha zimasungidwa bwino, kuchepetsa chiopsezo cha kusokonezeka kapena kuwonongeka panthawi yoyendetsa.
•Kugwira Mosavuta:Zopangidwa ndi ergonomically kuti zigwiritsidwe ntchito mosavuta, chonyamuliracho chimathandizira kutsitsa ndi kutsitsa, ndikuwongolera magwiridwe antchito m'malo oyera.
•Kugwirizana:Imagwirizana ndi makulidwe ndi mitundu yosiyanasiyana yawafesi, ndikupangitsa kuti ikhale yosunthika pazosowa zosiyanasiyana zopangira semiconductor.
Khalani ndi chitetezo chosayerekezeka komanso kumasuka ndi Semicera'sWafer Cassette Carrier. Chonyamulira chathu chapangidwa kuti chikwaniritse miyezo yapamwamba kwambiri yopangira semiconductor, kuwonetsetsa kuti zowola zanu zimakhalabe zowoneka bwino kuyambira koyambira mpaka kumapeto. Khulupirirani Semicera kuti ikupatseni mtundu komanso kudalirika komwe mungafune pamachitidwe anu ovuta kwambiri.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
