Semicera imapereka zokutira zapadera za tantalum carbide (TaC) pazinthu zosiyanasiyana ndi zonyamulira.Semicera kutsogolera njira yokutira imathandizira zokutira za tantalum carbide (TaC) kuti zikhale zoyera kwambiri, kukhazikika kwa kutentha kwambiri komanso kulolerana kwamankhwala, kupititsa patsogolo mtundu wamakristali a SIC/GAN ndi zigawo za EPI (Graphite yokutidwa ndi TaC susceptor), ndi kukulitsa moyo wa zigawo zikuluzikulu za reactor. Kugwiritsa ntchito tantalum carbide TaC ❖ kuyanika ndi kuthetsa vuto m'mphepete ndi kusintha khalidwe la kristalo kukula, ndi Semicera wapambana anathetsa tantalum carbide ❖ kuyanika luso (CVD), kufika mlingo mayiko apamwamba.
Kubwera kwa 8-inch silicon carbide (SiC) wafers, zofunikira pamayendedwe osiyanasiyana a semiconductor zakhala zovuta kwambiri, makamaka panjira za epitaxy komwe kutentha kumatha kupitilira madigiri 2000 Celsius. Zipangizo zachikhalidwe za susceptor, monga graphite zokutidwa ndi silicon carbide, zimakonda kutsika pa kutentha kwakukulu, kusokoneza ndondomeko ya epitaxy. Komabe, CVD tantalum carbide (TaC) imathetsa bwino nkhaniyi, kupirira kutentha mpaka madigiri 2300 Celsius ndikupereka moyo wautali wautumiki. Lumikizanani ndi Semicera's Kupaka kwa Tantalum Carbid Hafu-mwezikuti mufufuze zambiri za mayankho athu apamwamba.
Pambuyo pazaka za chitukuko, Semicera yagonjetsa teknoloji yaCVD TaCndi zoyesayesa zolumikizana za dipatimenti ya R&D. Zowonongeka ndizosavuta kuchitika pakukula kwa zowotcha za SiC, koma mutatha kugwiritsa ntchitoTaC, kusiyana kwake ndi kwakukulu. Pansipa pali kufananiza kwa zophika zophika ndi popanda TaC, komanso magawo a Simicera pakukula kwa kristalo imodzi.
ndi komanso popanda TaC
Mukatha kugwiritsa ntchito TaC (kumanja)
Komanso, Semicera'sZinthu zokutidwa ndi TaCkuwonetsa moyo wautali wautumiki komanso kukana kutentha kwambiri poyerekeza ndiZovala za SiC.Miyezo ya labotale yawonetsa kuti athuZovala za TaCimatha kuchita mosasinthasintha kutentha mpaka madigiri 2300 Celsius kwa nthawi yayitali. M'munsimu muli zitsanzo za zitsanzo zathu:
TaC yokutidwa ndi susceptor
Graphite yokhala ndi TaC yokutidwa ndi reactor
