TaC yokutidwa ndi epitaxial wafer carriersNthawi zambiri amagwiritsidwa ntchito pokonzekera zida zapamwamba za optoelectronic, zida zamagetsi, masensa ndi magawo ena. IziEpitaxial wafer chonyamuliraamatanthauza kuyika kwaTaCfilimu yopyapyala pa gawo lapansi panthawi ya kukula kwa kristalo kuti ipange chophatikizika chokhala ndi mawonekedwe apadera ndi magwiridwe antchito pokonzekera chipangizo chotsatira.
Ukadaulo wa Chemical vapor deposition (CVD) nthawi zambiri umagwiritsidwa ntchito pokonzekeraTaC yokutidwa ndi epitaxial wafer carriers. Pochita zinthu zoyambira zitsulo zachitsulo ndi mpweya wotulutsa mpweya kutentha kwambiri, filimu ya TaC imatha kuyikidwa pamwamba pa gawo lapansi la kristalo. Filimuyi ikhoza kukhala ndi magetsi, kuwala komanso makina opangira magetsi ndipo ndi yoyenera kukonzekera zipangizo zosiyanasiyana zogwira ntchito kwambiri.
Semicera imapereka zokutira zapadera za tantalum carbide (TaC) pazinthu zosiyanasiyana ndi zonyamulira.Semicera kutsogolera njira yokutira imathandizira zokutira za tantalum carbide (TaC) kuti zikhale zoyera kwambiri, kukhazikika kwa kutentha kwambiri komanso kulolerana kwamankhwala, kupititsa patsogolo mtundu wamakristali a SIC/GAN ndi zigawo za EPI (Graphite yokutidwa ndi TaC susceptor), ndi kukulitsa moyo wa zigawo zikuluzikulu za reactor. Kugwiritsa ntchito tantalum carbide TaC ❖ kuyanika ndi kuthetsa vuto m'mphepete ndi kusintha khalidwe la kristalo kukula, ndi Semicera wapambana anathetsa tantalum carbide ❖ kuyanika luso (CVD), kufika mlingo mayiko apamwamba.
Pambuyo pazaka za chitukuko, Semicera yagonjetsa teknoloji yaCVD TaCndi zoyesayesa zolumikizana za dipatimenti ya R&D. Zowonongeka ndizosavuta kuchitika pakukula kwa zowotcha za SiC, koma mutatha kugwiritsa ntchitoTaC, kusiyana kwake ndi kwakukulu. Pansipa pali kufananiza kwa zophika zophika ndi popanda TaC, komanso magawo a Simicera pakukula kwa kristalo imodzi.
ndi komanso popanda TaC
Mukatha kugwiritsa ntchito TaC (kumanja)
Komanso, Semicera'sZinthu zokutidwa ndi TaCkuwonetsa moyo wautali wautumiki komanso kukana kutentha kwambiri poyerekeza ndiZovala za SiC.Miyezo ya labotale yawonetsa kuti athuZovala za TaCimatha kuchita mosasinthasintha kutentha mpaka madigiri 2300 Celsius kwa nthawi yayitali. M'munsimu muli zitsanzo za zitsanzo zathu:
