Semicera's SiN Ceramics Plain Substrates imapereka yankho logwira ntchito kwambiri pazinthu zosiyanasiyana zamagetsi ndi mafakitale. Zodziwika bwino chifukwa cha matenthedwe abwino kwambiri komanso mphamvu zamakina, magawowa amatsimikizira kugwira ntchito modalirika m'malo ovuta.
Zida zathu za ceramic za SiN (Silicon Nitride) zidapangidwa kuti zizitha kutentha kwambiri komanso kupsinjika kwambiri, kuzipanga kukhala zoyenera pamagetsi amphamvu kwambiri komanso zida zapamwamba za semiconductor. Kukhalitsa kwawo komanso kukana kugwedezeka kwa kutentha kumawapangitsa kukhala abwino kuti agwiritsidwe ntchito pamapulogalamu omwe kudalirika ndi magwiridwe antchito ndizofunikira.
Njira zopangira zolondola za Semicera zimatsimikizira kuti gawo lililonse lachigwa limakwaniritsa miyezo yapamwamba kwambiri. Izi zimabweretsa magawo okhala ndi makulidwe osasinthika komanso mawonekedwe apamwamba, omwe ndi ofunikira kuti akwaniritse bwino kwambiri pamisonkhano yamagetsi ndi machitidwe.
Kuphatikiza pazabwino zamawotchi komanso zamakina, SiN Ceramics Plain Substrates imapereka zinthu zabwino kwambiri zotchinjiriza magetsi. Izi zimatsimikizira kusokoneza kochepa kwa magetsi ndipo zimathandizira kuti pakhale kukhazikika komanso mphamvu zamagetsi zamagetsi, kupititsa patsogolo nthawi yawo yogwira ntchito.
Posankha Semicera's SiN Ceramics Plain Substrates, mukusankha chinthu chomwe chimaphatikiza sayansi yapamwamba ndi kupanga zapamwamba kwambiri. Kudzipereka kwathu pazabwino komanso zatsopano kumatsimikizira kuti mumalandira magawo omwe amakwaniritsa miyezo yapamwamba kwambiri yamakampani ndikuthandizira kupambana kwamapulojekiti anu apamwamba kwambiri.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
