Silicon pa Insulator Waferskuchokera ku Semicera adapangidwa kuti akwaniritse kufunikira kwa mayankho a semiconductor apamwamba kwambiri. Zophika zathu za SOI zimapereka magwiridwe antchito apamwamba kwambiri amagetsi komanso kuchepetsedwa kwa zida za parasitic, zomwe zimawapangitsa kukhala abwino kwa mapulogalamu apamwamba monga zida za MEMS, masensa, ndi mabwalo ophatikizika. Ukatswiri wa Semicera pakupanga zophika zimatsimikizira kuti aliyenseChinsinsi cha SOIimapereka zotsatira zodalirika, zapamwamba pazosowa zanu zaukadaulo wam'badwo wotsatira.
ZathuSilicon pa Insulator Wafersperekani malire abwino pakati pa kutsika mtengo ndi magwiridwe antchito. Pomwe mtengo wa soi wafer ukukulirakulira, zowotcha izi zimagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana, kuphatikiza ma microelectronics ndi optoelectronics. Kupanga kolondola kwambiri kwa Semicera kumatsimikizira kulumikizana kwabwino kwambiri komanso kufananiza, kuwapangitsa kukhala oyenera kugwiritsa ntchito zosiyanasiyana, kuyambira pazitsulo za SOI mpaka zowotcha za silicon.
Zofunika Kwambiri:
•Zophika zapamwamba za SOI zokometsedwa kuti zigwire ntchito mu MEMS ndi ntchito zina.
•Mtengo wampikisano wa soi wafer wamabizinesi omwe akufuna mayankho apamwamba popanda kusokoneza mtundu.
•Ndiwoyenera matekinoloje apamwamba kwambiri, omwe amapereka kudzipatula kwamagetsi kowonjezereka komanso kuchita bwino mu silicon pamakina opangira insulator.
ZathuSilicon pa Insulator Wafersamapangidwa kuti apereke mayankho ogwira mtima kwambiri, kuthandizira funde lotsatira laukadaulo muukadaulo wa semiconductor. Kaya mukugwira ntchito pa cavityZophika za SOI, zipangizo za MEMS, kapena silicon pazigawo zotetezera, Semicera imapereka zofufumitsa zomwe zimakwaniritsa miyezo yapamwamba kwambiri pamakampani.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |