Silicon pa Insulator Wafers

Kufotokozera Kwachidule:

Zophika za Silicon-on-Insulator za Semicera zimapereka mayankho ogwira mtima pamapulogalamu apamwamba a semiconductor. Zoyenerana bwino ndi MEMS, masensa, ndi ma microelectronics, zopyapyalazi zimapereka kudzipatula kwamagetsi kwabwino komanso kutsika kwa parasitic capacitance. Semicera imatsimikizira kupanga molondola, kumapereka khalidwe losasinthika pamitundu yosiyanasiyana yaukadaulo. Tikuyembekezera kukhala bwenzi lanu kwa nthawi yayitali ku China.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Silicon pa Insulator Waferskuchokera ku Semicera adapangidwa kuti akwaniritse kufunikira kwa mayankho a semiconductor apamwamba kwambiri. Zophika zathu za SOI zimapereka magwiridwe antchito apamwamba kwambiri amagetsi komanso kuchepetsedwa kwa zida za parasitic, zomwe zimawapangitsa kukhala abwino kwa mapulogalamu apamwamba monga zida za MEMS, masensa, ndi mabwalo ophatikizika. Ukatswiri wa Semicera pakupanga zophika zimatsimikizira kuti aliyenseChinsinsi cha SOIimapereka zotsatira zodalirika, zapamwamba pazosowa zanu zaukadaulo wam'badwo wotsatira.

ZathuSilicon pa Insulator Wafersperekani malire abwino pakati pa kutsika mtengo ndi magwiridwe antchito. Pomwe mtengo wa soi wafer ukukulirakulira, zowotcha izi zimagwiritsidwa ntchito kwambiri m'mafakitale osiyanasiyana, kuphatikiza ma microelectronics ndi optoelectronics. Kupanga kolondola kwambiri kwa Semicera kumatsimikizira kulumikizana kwabwino kwambiri komanso kufananiza, kuwapangitsa kukhala oyenera kugwiritsa ntchito zosiyanasiyana, kuyambira pazitsulo za SOI mpaka zowotcha za silicon.

Zofunika Kwambiri:

Zophika zapamwamba za SOI zokometsedwa kuti zigwire ntchito mu MEMS ndi ntchito zina.

Mtengo wampikisano wa soi wafer wamabizinesi omwe akufuna mayankho apamwamba popanda kusokoneza mtundu.

Ndiwoyenera matekinoloje apamwamba kwambiri, omwe amapereka kudzipatula kwamagetsi kowonjezereka komanso kuchita bwino mu silicon pamakina opangira insulator.

ZathuSilicon pa Insulator Wafersamapangidwa kuti apereke mayankho ogwira mtima kwambiri, kuthandizira funde lotsatira laukadaulo muukadaulo wa semiconductor. Kaya mukugwira ntchito pa cavityZophika za SOI, zipangizo za MEMS, kapena silicon pazigawo zotetezera, Semicera imapereka zofufumitsa zomwe zimakwaniritsa miyezo yapamwamba kwambiri pamakampani.

Zinthu

Kupanga

Kafukufuku

Dummy

Crystal Parameters

Polytype

4H

Kulakwitsa koyang'ana pamwamba

<11-20>4±0.15°

Magetsi Parameters

Dopant

n-mtundu wa Nayitrogeni

Kukaniza

0.015-0.025ohm · masentimita

Mechanical Parameters

Diameter

150.0 ± 0.2mm

Makulidwe

350±25 μm

Choyambira chapansi pamayendedwe

[1-100] ± 5°

Kutalika kosalala koyambirira

47.5 ± 1.5mm

Sekondale flat

Palibe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kugwada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Kapangidwe

Kuchuluka kwa Micropipe

<1 pa/cm2

<10 pa/cm2

<15 pa/cm2

Zitsulo zonyansa

≤5E10 maatomu/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 pa/cm2

≤1000 E/cm2

NA

Front Quality

Patsogolo

Si

Kumaliza pamwamba

Si-nkhope CMP

Tinthu ting'onoting'ono

≤60ea/wafer (kukula ≥0.3μm)

NA

Zokanda

≤5ea/mm. Kutalika kwake ≤Diameter

Kutalika kokwanira≤2 * Diameter

NA

Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa

Palibe

NA

M'mphepete tchipisi / indents / fracture / hex mbale

Palibe

Magawo a polytype

Palibe

Malo owonjezera≤20%

Malo owonjezera ≤30%

Chizindikiro cha laser chakutsogolo

Palibe

Back Quality

Kumbuyo komaliza

C-nkhope CMP

Zokanda

≤5ea/mm,Cumulative kutalika≤2*Diameter

NA

Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents)

Palibe

Msana roughness

Ra≤0.2nm (5μm*5μm)

Chizindikiro cha laser kumbuyo

1 mm (kuchokera m'mphepete)

M'mphepete

M'mphepete

Chamfer

Kupaka

Kupaka

Epi-okonzeka ndi zoyika vacuum

Kupaka makaseti amitundu yambiri

*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD.

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Zophika za SiC

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