Silicon Pa Insulator Wafer

Kufotokozera Kwachidule:

Semicera's Silicon On Insulator (SOI) Wafer imapereka magetsi odzipatula kwapadera komanso kasamalidwe ka matenthedwe pamapulogalamu apamwamba kwambiri. Zopangidwa kuti zipereke magwiridwe antchito apamwamba komanso kudalirika kwazida, zowotcha izi ndi chisankho chabwino kwambiri paukadaulo wapamwamba wa semiconductor. Sankhani Semicera kuti mupeze mayankho amtundu wa SOI.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Semicera's Silicon On Insulator (SOI) Wafer ili patsogolo pakupanga zatsopano za semiconductor, yopereka kudzipatula kwamagetsi kokwezeka komanso magwiridwe antchito apamwamba kwambiri. Kapangidwe ka SOI, kopangidwa ndi kachitsulo kakang'ono ka silicon pagawo lotsekera, kumapereka mapindu ofunikira pazida zamagetsi zogwira ntchito kwambiri.

Zophika zathu za SOI zidapangidwa kuti zichepetse mphamvu ya parasitic ndi mafunde otuluka, zomwe ndizofunikira kuti pakhale mabwalo ophatikizika othamanga kwambiri komanso otsika. Ukadaulo wapamwambawu umatsimikizira kuti zida zimagwira ntchito bwino, ndi liwiro labwino komanso kuchepa kwa mphamvu zamagetsi, zomwe ndizofunikira kwambiri pamagetsi amakono.

Njira zopangira zapamwamba zogwiritsidwa ntchito ndi Semicera zimatsimikizira kupanga zophika za SOI zofananira bwino komanso zosasinthika. Ubwinowu ndi wofunikira pakugwiritsa ntchito matelefoni, zamagalimoto, ndi zamagetsi ogula, pomwe zida zodalirika komanso zogwira ntchito kwambiri zimafunikira.

Kuphatikiza pa ubwino wawo wamagetsi, zowomba za SOI za Semicera zimapereka kutentha kwapamwamba kwambiri, kupititsa patsogolo kutentha kwa kutentha ndi kukhazikika pazida zolimba kwambiri komanso zamphamvu kwambiri. Izi ndizofunikira makamaka pamapulogalamu omwe amakhudza kutenthetsa kwakukulu ndipo amafuna kuwongolera bwino kwa kutentha.

Posankha Semicera's Silicon Pa Insulator Wafer, mumagulitsa zinthu zomwe zimathandizira kupita patsogolo kwaukadaulo wapamwamba. Kudzipereka kwathu pazabwino komanso zatsopano kumawonetsetsa kuti zowotcha zathu za SOI zikukwaniritsa zofunikira zamakampani amakono a semiconductor, ndikupereka maziko a zida zamagetsi zam'badwo wotsatira.

Zinthu

Kupanga

Kafukufuku

Dummy

Crystal Parameters

Polytype

4H

Kulakwitsa koyang'ana pamwamba

<11-20>4±0.15°

Magetsi Parameters

Dopant

n-mtundu wa Nayitrogeni

Kukaniza

0.015-0.025ohm · masentimita

Mechanical Parameters

Diameter

150.0 ± 0.2mm

Makulidwe

350±25 μm

Choyambira chapansi pamayendedwe

[1-100] ± 5°

Kutalika kosalala koyambirira

47.5 ± 1.5mm

Sekondale flat

Palibe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kugwada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Kapangidwe

Kuchuluka kwa Micropipe

<1 pa/cm2

<10 pa/cm2

<15 pa/cm2

Zitsulo zonyansa

≤5E10 maatomu/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 pa/cm2

≤1000 E/cm2

NA

Front Quality

Patsogolo

Si

Kumaliza pamwamba

Si-nkhope CMP

Tinthu ting'onoting'ono

≤60ea/wafer (kukula ≥0.3μm)

NA

Zokanda

≤5ea/mm. Kutalika kwake ≤Diameter

Kutalika kokwanira≤2 * Diameter

NA

Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa

Palibe

NA

M'mphepete tchipisi / indents / fracture / hex mbale

Palibe

Magawo a polytype

Palibe

Malo owonjezera≤20%

Malo owonjezera ≤30%

Chizindikiro cha laser chakutsogolo

Palibe

Back Quality

Kumbuyo komaliza

C-nkhope CMP

Zokanda

≤5ea/mm,Cumulative kutalika≤2*Diameter

NA

Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents)

Palibe

Msana roughness

Ra≤0.2nm (5μm*5μm)

Chizindikiro cha laser kumbuyo

1 mm (kuchokera m'mphepete)

M'mphepete

M'mphepete

Chamfer

Kupaka

Kupaka

Epi-okonzeka ndi zoyika vacuum

Kupaka makaseti amitundu yambiri

*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD.

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Zophika za SiC

  • Zam'mbuyo:
  • Ena: