Semicera's Silicon On Insulator (SOI) Wafer ili patsogolo pakupanga zatsopano za semiconductor, yopereka kudzipatula kwamagetsi kokwezeka komanso magwiridwe antchito apamwamba kwambiri. Kapangidwe ka SOI, kopangidwa ndi kachitsulo kakang'ono ka silicon pagawo lotsekera, kumapereka mapindu ofunikira pazida zamagetsi zogwira ntchito kwambiri.
Zophika zathu za SOI zidapangidwa kuti zichepetse mphamvu ya parasitic ndi mafunde otuluka, zomwe ndizofunikira kuti pakhale mabwalo ophatikizika othamanga kwambiri komanso otsika. Ukadaulo wapamwambawu umatsimikizira kuti zida zimagwira ntchito bwino, ndi liwiro labwino komanso kuchepa kwa mphamvu zamagetsi, zomwe ndizofunikira kwambiri pamagetsi amakono.
Njira zopangira zapamwamba zogwiritsidwa ntchito ndi Semicera zimatsimikizira kupanga zophika za SOI zofananira bwino komanso zosasinthika. Ubwinowu ndi wofunikira pakugwiritsa ntchito matelefoni, zamagalimoto, ndi zamagetsi ogula, pomwe zida zodalirika komanso zogwira ntchito kwambiri zimafunikira.
Kuphatikiza pa ubwino wawo wamagetsi, zowomba za SOI za Semicera zimapereka kutentha kwapamwamba kwambiri, kupititsa patsogolo kutentha kwa kutentha ndi kukhazikika pazida zolimba kwambiri komanso zamphamvu kwambiri. Izi ndizofunikira makamaka pamapulogalamu omwe amakhudza kutenthetsa kwakukulu ndipo amafuna kuwongolera bwino kwa kutentha.
Posankha Semicera's Silicon Pa Insulator Wafer, mumagulitsa zinthu zomwe zimathandizira kupita patsogolo kwaukadaulo wapamwamba. Kudzipereka kwathu pazabwino komanso zatsopano kumawonetsetsa kuti zowotcha zathu za SOI zikukwaniritsa zofunikira zamakampani amakono a semiconductor, ndikupereka maziko a zida zamagetsi zam'badwo wotsatira.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |