Semicera's Silicon Nitride Ceramic Substrate imayimira pachimake chaukadaulo wapamwamba kwambiri, wopereka matenthedwe apadera komanso mawonekedwe amphamvu amakina. Wopangidwira ntchito zogwira ntchito kwambiri, gawo lapansili limayenda bwino kwambiri m'malo omwe amafunikira kasamalidwe kodalirika kawotenthetsera komanso kukhulupirika kwamapangidwe.
Magawo athu a Silicon Nitride Ceramic Substrates adapangidwa kuti azitha kupirira kutentha kwambiri komanso mikhalidwe yoyipa, kuwapangitsa kukhala abwino pazida zamagetsi zamphamvu kwambiri komanso zothamanga kwambiri. Kutentha kwawo kwapamwamba kwambiri kumatsimikizira kutentha kwabwino, komwe kuli kofunikira kuti pakhale ntchito komanso moyo wautali wa zipangizo zamagetsi.
Kudzipereka kwa Semicera pamtundu wabwino kumawonekera mu Silicon Nitride Ceramic Substrate iliyonse yomwe timapanga. Gawo lirilonse limapangidwa pogwiritsa ntchito njira zamakono kuti zitsimikizidwe kuti zikugwira ntchito mosasinthasintha komanso zolakwika zochepa. Kulondola kwapamwamba kumeneku kumathandizira zofuna zolimba zamafakitale monga zamagalimoto, zakuthambo, ndi matelefoni.
Kuphatikiza pazabwino zawo zotentha komanso zamakina, magawo athu amapereka zinthu zabwino kwambiri zotchinjiriza magetsi, zomwe zimathandizira kudalirika kwathunthu kwa zida zanu zamagetsi. Pochepetsa kusokoneza magetsi komanso kukhazikika kwazinthu, Semicera's Silicon Nitride Ceramic Substrates imagwira ntchito yofunika kwambiri pakuwongolera magwiridwe antchito a chipangizocho.
Kusankha Semicera's Silicon Nitride Ceramic Substrate kumatanthauza kuyika ndalama pachinthu chomwe chimapereka magwiridwe antchito apamwamba komanso kulimba. Magawo athu amapangidwa kuti akwaniritse zosowa zamapulogalamu apamwamba amagetsi, kuwonetsetsa kuti zida zanu zimapindula ndiukadaulo wapamwamba kwambiri komanso kudalirika kwapadera.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
