Silicon-Impregnated Silicon Carbide (SiC) Paddle ndi Wafer Carrier

Kufotokozera Kwachidule:

Silicon-Impregnated Silicon Carbide (SiC) Paddle ndi Wafer Carrier ndi zinthu zophatikizika kwambiri zomwe zimapangidwa ndikulowetsa silicon mu matrix opangidwanso ndi silicon carbide ndikulandira chithandizo chapadera. Nkhaniyi imaphatikiza mphamvu yayikulu komanso kulekerera kutentha kwambiri kwa silicon carbide yopangidwanso ndi kupititsa patsogolo kwa silicon, ndikuwonetsa magwiridwe antchito kwambiri pamikhalidwe yovuta kwambiri. Amagwiritsidwa ntchito kwambiri m'munda wa chithandizo cha kutentha kwa semiconductor, makamaka m'malo omwe amafunikira kutentha kwakukulu, kuthamanga kwambiri komanso kukana kuvala kwambiri, ndipo ndi chinthu chabwino kwambiri chopangira zida zopangira kutentha kwa semiconductor kupanga.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Zowonetsa Zamalonda

TheSilicon-Impregnated Silicon Carbide (SiC) Paddle ndi Wafer Carrieridapangidwa kuti ikwaniritse zofunikira za semiconductor thermal processing application. Wopangidwa kuchokera ku SiC yoyera kwambiri komanso yowongoleredwa ndi silicon impregnation, mankhwalawa amapereka kuphatikiza kwapadera kwa magwiridwe antchito a kutentha kwambiri, matenthedwe abwino kwambiri, kukana kwa dzimbiri, komanso mphamvu zamakina.

Mwa kuphatikiza sayansi yapamwamba ndi kupanga mwatsatanetsatane, yankho ili limatsimikizira magwiridwe antchito apamwamba, kudalirika, komanso kulimba kwa opanga semiconductor.

Zofunika Kwambiri

1.Kukaniza Kwambiri Kutentha Kwambiri

Ndi malo osungunuka opitirira 2700 ° C, zipangizo za SiC zimakhala zokhazikika pansi pa kutentha kwakukulu. Kuyika kwa silicon kumapangitsanso kukhazikika kwawo kwa kutentha, kuwalola kuti athe kupirira kutentha kwanthawi yayitali popanda kufowoka kapena kuwonongeka kwa magwiridwe antchito.

2.Superior Thermal Conductivity

Kutentha kwapadera kwa silicon-impregnated SiC kumatsimikizira kugawidwa kwa kutentha kofanana, kuchepetsa kupsinjika kwa kutentha panthawi yovuta kwambiri. Katunduyu amatalikitsa moyo wa zida komanso amachepetsa nthawi yopangira zinthu, ndikupangitsa kuti ikhale yabwino pakutentha kwambiri.

3.Oxidation ndi Corrosion Resistance

Chosanjikiza cholimba cha silicon oxide chimapanga mwachilengedwe pamwamba, chomwe chimapereka kukana kwa okosijeni ndi dzimbiri. Izi zimatsimikizira kudalirika kwa nthawi yayitali m'malo ovuta ogwirira ntchito, kuteteza zonse zakuthupi ndi zozungulira.

4.Kulimba Kwambiri Kwamakina ndi Kukaniza Kuvala

Silicon-impregnated SiC imakhala ndi mphamvu zophatikizika bwino komanso kukana kuvala, kusunga umphumphu wake pansi pa katundu wambiri, kutentha kwambiri. Izi zimachepetsa chiwopsezo cha kuwonongeka kokhudzana ndi mavalidwe, kuwonetsetsa kuti magwiridwe antchito azigwiritsidwa ntchito nthawi yayitali.

Zofotokozera

Dzina lazogulitsa	SC-RSiC-Si
Zakuthupi	Silicon Impregnation Silicon Carbide Compact (kuyera kwambiri)
Mapulogalamu	Zigawo Zochizira Kutentha kwa Semiconductor, Zida Zopangira Semiconductor
Fomu yobweretsera	Thupi lopangidwa (Sintered body)

Kupanga			Mechanical Property	Young's Modulus (GPA)	Kupindika Mphamvu (MPa)
Kupanga (vol%)	α-SiC	α-SiC	RT	370	250
Kupanga (vol%)	82	18	800°C	360	220
Kuchulukirachulukira (kg/m³)	3.02 x 10³		1200 ° C	340	220
Kutentha kwapang'onopang'ono °C	1350		Chiwerengero cha Poisson	0.18(RT)
Thermal Property	Thermal Conductivity (W/(m· K))	Kuthekera Kwake Kutentha (kJ/(kg·K))	Coefficient of Thermal Expansion (1/K)
RT	220	0.7	RT~700°C	3.4x10^-6
700°C	60	1.23	700 ~ 1200°C	4.3 x10^-6

Zonyansa ((ppm)

Chinthu

Mtengo wazinthu

<0.5

<0.1

0.3

<0.1

<0.3

Mapulogalamu

▪Semiconductor Thermal Processing:Zoyenera pamachitidwe monga chemical vapor deposition (CVD), kukula kwa epitaxial, ndi annealing, komwe kuwongolera kutentha ndi kulimba kwazinthu ndikofunikira.

▪Zonyamula Wafer & Paddles:Amapangidwa kuti azigwira ndi kunyamula zopatulira motetezeka panthawi yotentha kwambiri.

▪Malo Ogwirira Ntchito Kwambiri: Oyenera makonda omwe amafunikira kukana kutentha, kukhudzana ndi mankhwala, komanso kupsinjika kwamakina.

Ubwino wa Silicon-Impregnated SiC

Kuphatikizika kwa silicon carbide yapamwamba kwambiri komanso ukadaulo wapamwamba wa silicon impregnation umapereka zopindulitsa zosayerekezeka:

▪Kulondola:Imakulitsa kulondola ndi kuwongolera kwa semiconductor processing.

▪Kukhazikika:Imalimbana ndi malo ovuta popanda kusokoneza magwiridwe antchito.

▪Moyo wautali:Imakulitsa moyo wautumiki wa zida zopangira semiconductor.

▪Kuchita bwino:Kupititsa patsogolo zokolola poonetsetsa kuti zotsatira zodalirika komanso zosasinthasintha.

Chifukwa Chiyani Sankhani Mayankho Athu a Silicon-Impregnated SiC?

At Semicera, timakhazikika popereka mayankho ogwira mtima kwambiri ogwirizana ndi zosowa za opanga semiconductor. Silicon-Impregnated Silicon Carbide Paddle yathu ndi Wafer Carrier amayesedwa mwamphamvu ndikutsimikiziridwa kuti akwaniritse miyezo yamakampani. Posankha Semicera, mumapeza mwayi wopeza zida zapamwamba zomwe zimapangidwira kukhathamiritsa njira zanu zopangira ndikukulitsa luso lanu lopanga.

Mfundo Zaukadaulo

▪Zofunika:High-purity silicon carbide yokhala ndi silicon impregnation.

▪Kutentha kwa Ntchito:Kufikira 2700 ° C.

▪ Thermal Conductivity:Zokwera kwambiri pakugawa kutentha kofanana.

▪Makhalidwe Otsutsa:Oxidation, dzimbiri, ndi kusamva kuvala.

▪Mapulogalamu:Yogwirizana ndi machitidwe osiyanasiyana opangira ma semiconductor otentha.

CNN processing, kuyeretsa mankhwala, CVD zokutira

Lumikizanani nafe

Mwakonzeka kukweza njira yanu yopangira semiconductor? ContactSemiceralero kuti mudziwe zambiri za Silicon-Impregnated Silicon Carbide Paddle ndi Wafer Carrier.

▪Imelo: sales01@semi-cera.com/sales05@semi-cera.com

▪Foni: + 86-0574-8650 3783

▪Malo:No.1958 Jiangnan Road, Ningbo High tech, Zone, Province la Zhejiang, 315201, China

Zam'mbuyo: Isostatic PECVD Graphite Boat

Ena: Kuyera kwakukulu CVD Silicon Carbide yaiwisi