Filimu ya Silicon yolembedwa ndi Semicera ndi chinthu chapamwamba kwambiri, chopangidwa mwaluso kwambiri chomwe chimapangidwa kuti chikwaniritse zofunikira zamakampani opanga ma semiconductor. Wopangidwa kuchokera ku silicon yoyera, yankho la filimu yopyapyalali limapereka mawonekedwe ofanana, oyera kwambiri, komanso magetsi apadera komanso matenthedwe. Ndiwoyenera kugwiritsidwa ntchito pamitundu yosiyanasiyana ya semiconductor, kuphatikiza kupanga Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, ndi Epi-Wafer. Filimu ya Silicon ya Semicera imatsimikizira magwiridwe antchito odalirika komanso osasinthika, ndikupangitsa kuti ikhale chinthu chofunikira kwambiri pamakina apamwamba kwambiri.
Ubwino Wapamwamba Ndi Kuchita Kwa Semiconductor Manufacturing
Filimu ya Silicon ya Semicera imadziwika chifukwa cha mphamvu zake zamakina, kukhazikika kwamafuta ambiri, komanso kuchepa kwa chilema, zonse zomwe ndizofunikira pakupanga ma semiconductors ochita bwino kwambiri. Kaya amagwiritsidwa ntchito popanga zida za Gallium Oxide (Ga2O3), AlN Wafer, kapena Epi-Wafers, filimuyi imapereka maziko olimba a filimu yopyapyala komanso kukula kwa epitaxial. Kugwirizana kwake ndi magawo ena a semiconductor monga SiC Substrate ndi SOI Wafers amatsimikizira kusakanikirana kosasunthika m'njira zopangira zomwe zilipo kale, zomwe zimathandiza kusunga zokolola zambiri komanso mtundu wosasinthika wazinthu.
Mapulogalamu mu Semiconductor Viwanda
M'makampani opanga ma semiconductor, Semicera's Silicon Film imagwiritsidwa ntchito pazinthu zingapo, kuyambira kupanga Si Wafer ndi SOI Wafer kupita kuzinthu zapadera monga SiN Substrate ndi Epi-Wafer. Kuyeretsedwa kwakukulu ndi kulondola kwa filimuyi kumapangitsa kuti ikhale yofunikira popanga zida zapamwamba zomwe zimagwiritsidwa ntchito mu chirichonse kuchokera ku microprocessors ndi ma circuits ophatikizika kupita ku zipangizo za optoelectronic.
Kanema wa Silicon amatenga gawo lofunikira kwambiri pamayendedwe a semiconductor monga kukula kwa epitaxial, kulumikiza kozungulira, komanso kuyika filimu yopyapyala. Makhalidwe ake odalirika ndi ofunika makamaka kwa mafakitale omwe amafunikira malo olamulidwa kwambiri, monga zipinda zoyera mu nsalu za semiconductor. Kuphatikiza apo, Kanema wa Silicon amatha kuphatikizidwa m'makaseti kuti azigwira bwino komanso zonyamula katundu panthawi yopanga.
Kudalirika Kwanthawi Yaitali Ndi Kukhazikika
Ubwino umodzi wogwiritsa ntchito Semicera's Silicon Film ndi kudalirika kwake kwanthawi yayitali. Ndi kulimba kwake kwabwino komanso khalidwe losasinthika, filimuyi imapereka yankho lodalirika la mapangidwe apamwamba kwambiri. Kaya amagwiritsidwa ntchito pazida zapamwamba kwambiri za semiconductor kapena zipangizo zamakono zamakono, Semicera's Silicon Film imatsimikizira kuti opanga amatha kukwaniritsa ntchito zambiri komanso kudalirika pazinthu zosiyanasiyana.
Chifukwa Chiyani Musankhe Filimu ya Silicon ya Semicera?
Kanema wa Silicon wochokera ku Semicera ndichinthu chofunikira kwambiri pakugwiritsa ntchito kwambiri pamakampani opanga ma semiconductor. Makhalidwe ake ochita bwino kwambiri, kuphatikiza kukhazikika kwamafuta, kuyera kwambiri, ndi mphamvu zamakina, zimapangitsa kukhala chisankho choyenera kwa opanga omwe akufuna kukwaniritsa miyezo yapamwamba kwambiri pakupanga semiconductor. Kuchokera ku Si Wafer ndi SiC Substrate mpaka kupanga zida za Gallium Oxide Ga2O3, filimuyi imapereka mawonekedwe osayerekezeka komanso magwiridwe antchito.
Ndi Filimu ya Silicon ya Semicera, mutha kudalira chinthu chomwe chimakwaniritsa zofunikira zamakono opanga semiconductor, ndikupereka maziko odalirika am'badwo wotsatira wamagetsi.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |