Zithunzi za SemiceraSilicon Carbide Epitaxyidapangidwa kuti ikwaniritse zofunikira zamapulogalamu amakono a semiconductor. Pogwiritsa ntchito njira zapamwamba za kukula kwa epitaxial, timawonetsetsa kuti gulu lililonse la silicon carbide likuwonetsa mawonekedwe apadera a crystalline, kufanana, komanso kachulukidwe kakang'ono. Makhalidwewa ndi ofunikira kwambiri popanga zida zamagetsi zamagetsi zogwira ntchito kwambiri, pomwe kuyendetsa bwino komanso kuyendetsa bwino ndikofunikira.
TheSilicon Carbide Epitaxyndondomeko ku Semicera imakonzedwa kuti ipange zigawo za epitaxial zokhala ndi makulidwe enieni ndi kuwongolera doping, kuwonetsetsa kuti zimagwira ntchito mosasinthasintha pazida zosiyanasiyana. Mlingo wolondolawu ndi wofunikira pakugwiritsa ntchito magalimoto amagetsi, machitidwe opangira mphamvu zongowonjezwdwa, komanso kulumikizana kwanthawi yayitali, komwe kudalirika komanso kuchita bwino ndikofunikira.
Komanso, Semicera'sSilicon Carbide Epitaxyimapereka ma conductivity owonjezera amafuta komanso ma voliyumu apamwamba kwambiri, zomwe zimapangitsa kukhala chisankho chokondedwa pazida zomwe zimagwira ntchito movutikira. Katunduwa amathandizira kuti zida zizikhala ndi moyo wautali komanso kuwongolera magwiridwe antchito, makamaka m'malo okhala ndi mphamvu zambiri komanso kutentha kwambiri.
Semicera imaperekanso zosankha zomwe mungasinthireSilicon Carbide Epitaxy, kulola mayankho ogwirizana omwe amakwaniritsa zofunikira za chipangizocho. Kaya ndi kafukufuku kapena kupanga kwakukulu, zigawo zathu za epitaxial zapangidwa kuti zithandize mbadwo wotsatira wa zatsopano za semiconductor, zomwe zimathandiza kupanga zipangizo zamagetsi zamphamvu, zogwira mtima, komanso zodalirika.
Pophatikiza ukadaulo wotsogola komanso njira zowongolera bwino, Semicera imawonetsetsa kuti athuSilicon Carbide EpitaxyZogulitsa sizimangokwaniritsa komanso kupitilira miyezo yamakampani. Kudzipereka kumeneku kukuchita bwino kumapangitsa zigawo zathu za epitaxial kukhala maziko abwino a mapulogalamu apamwamba a semiconductor, ndikutsegulira njira yopambana mumagetsi amagetsi ndi ma optoelectronics.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
