SemiceraSilicon Carbide Ceramic Coatingndi chotchingira choteteza kwambiri chopangidwa ndi zinthu zolimba kwambiri komanso zosamva kuvala za silicon carbide (SiC). Chophimbacho nthawi zambiri chimayikidwa pamwamba pa gawo lapansi ndi CVD kapena PVD ndondomeko ndizitsulo za silicon carbide, kupereka zabwino kwambiri mankhwala dzimbiri kukana ndi kutentha kwambiri bata. Chifukwa chake, Silicon Carbide Ceramic Coating imagwiritsidwa ntchito kwambiri pazinthu zazikulu za zida zopangira semiconductor.
Pakupanga semiconductor,Kupaka kwa SiCimatha kupirira kutentha kwambiri mpaka 1600 ° C, kotero Silicon Carbide Ceramic Coating nthawi zambiri imagwiritsidwa ntchito ngati chotchinga choteteza zida kapena zida zopewera kuwonongeka kwa kutentha kwambiri kapena malo owononga.
Nthawi yomweyo,zokutira za silicon carbide ceramicakhoza kukana kukokoloka kwa zidulo, alkalis, oxides ndi mankhwala reagents, ndipo ali mkulu dzimbiri kukana zosiyanasiyana mankhwala zinthu. Chifukwa chake, mankhwalawa ndi oyenera madera osiyanasiyana owononga mumakampani a semiconductor.
Kuphatikiza apo, poyerekeza ndi zida zina za ceramic, SiC ili ndi matenthedwe apamwamba kwambiri ndipo imatha kutentha bwino. Izi zimatsimikizira kuti mumayendedwe a semiconductor omwe amafunikira kuwongolera bwino kwa kutentha, kutentha kwapamwamba kwaSilicon Carbide Ceramic Coatingzimathandiza kufalitsa kutentha mofanana, kuteteza kutentha kwapafupi, ndikuwonetsetsa kuti chipangizocho chimagwira ntchito pa kutentha koyenera.
Zoyambira zakuthupi za CVD sic zokutira | |
Katundu | Mtengo Wodziwika |
Kapangidwe ka Crystal | FCC β gawo polycrystalline, makamaka (111) yolunjika |
Kuchulukana | 3.21g/cm³ |
Kuuma | 2500 Vickers kuuma (500g katundu) |
Grain SiZe | 2 ~ 10μm |
Chemical Purity | 99.99995% |
Kutentha Mphamvu | 640 jkg-1·K-1 |
Kutentha kwa Sublimation | 2700 ℃ |
Flexural Mphamvu | 415 MPa RT 4-mfundo |
Young's Modulus | 430 Gpa 4pt bend, 1300 ℃ |
Thermal Conductivity | 300Wm-1·K-1 |
Kukula kwa Thermal (CTE) | 4.5 × 10-6K-1 |