Solid SiC Focus mphete

Kufotokozera Kwachidule:

Mphete za Semicera's SiC Etch zidapangidwa kuti zizigwira ntchito kwambiri pa semiconductor etching application yokhala ndi kulimba kwapadera komanso mwatsatanetsatane. Wopangidwa kuchokera ku high-purity silicon carbide (SiC), mphete ya etch iyi imaposa etching ya plasma, etching youma, ndi njira zowotcha. Zopanga zapamwamba za Semicera zimatsimikizira kuti mphete iyi imapereka kukana kovala bwino komanso kukhazikika kwamafuta ngakhale m'malo ovuta kwambiri. Tikuyembekezera kukhala bwenzi lanu kwa nthawi yayitali ku China.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Solid SiC Focus Ring yochokera ku Semicera ndi gawo laling'ono lomwe limapangidwa kuti likwaniritse zofunikira pakupangira zida zapamwamba za semiconductor. Wopangidwa kuchokera ku ukhondo wapamwambaSilicon Carbide (SiC), mphete yoyang'anayi ndiyabwino pazogwiritsa ntchito zosiyanasiyana m'makampani a semiconductor, makamaka muNjira za CVD SiC, plasma etching, ndiICPRIE (Inductively Coupled Plasma Reactive Ion Etching). Zomwe zimadziwika chifukwa cha kukana kuvala kwapadera, kukhazikika kwa kutentha kwapamwamba, ndi chiyero, zimatsimikizira kugwira ntchito kwa nthawi yaitali m'madera omwe ali ndi nkhawa kwambiri.

Mu semiconductormtandaprocessing, Solid SiC Focus Rings ndiyofunikira pakusunga etching yolondola panthawi yowuma komanso kugwiritsa ntchito ma wafer etching. Mphete yoyang'ana ya SiC imathandizira kuyang'ana kwa plasma panthawi yamayendedwe monga makina a plasma etching, ndikupangitsa kuti ikhale yofunikira pakuyika zowotcha za silicon. Zinthu zolimba za SiC zimapereka kukana kosagwirizana ndi kukokoloka, kuwonetsetsa kuti zida zanu zimatenga nthawi yayitali komanso kuchepetsa nthawi yopumira, zomwe ndizofunikira kuti pakhale kutulutsa kwakukulu mukupanga semiconductor.

Solid SiC Focus Ring yochokera ku Semicera idapangidwa kuti ipirire kutentha kwambiri komanso mankhwala ankhanza omwe amakumana nawo m'makampani opanga ma semiconductor. Amapangidwa makamaka kuti agwiritsidwe ntchito mwatsatanetsatane kwambiri mongaCVD SiC zokutira, kumene ukhondo ndi kukhalitsa ndizofunikira kwambiri. Ndi kukana kwambiri kugwedezeka kwamafuta, mankhwalawa amatsimikizira kugwira ntchito mosasunthika komanso kosasunthika pansi pamikhalidwe yovuta kwambiri, kuphatikiza kutentha kwambiri panthawi yotentha.mtandaetching process.

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M'mapulogalamu a semiconductor, komwe kulondola komanso kudalirika ndikofunikira, Solid SiC Focus Ring imagwira ntchito yofunika kwambiri pakukweza magwiridwe antchito a etching. Mapangidwe ake olimba, opangidwa bwino kwambiri amapanga chisankho chabwino kwambiri kwa mafakitale omwe amafunikira zida zoyera kwambiri zomwe zimagwira ntchito movutikira. Kaya amagwiritsidwa ntchito muCVD SiC mphetekugwiritsa ntchito kapena ngati gawo la plasma etching process, Semicera's Solid SiC Focus Ring imathandizira kukhathamiritsa magwiridwe antchito a zida zanu, ndikupatsa moyo wautali komanso kudalirika komwe mukufuna kupanga.

Zofunika Kwambiri:

• Kukaniza kwapamwamba kwambiri komanso kukhazikika kwa kutentha kwapamwamba
• Zida za SiC zolimba kwambiri zokhala ndi moyo wautali
• Ndi abwino kwa plasma etching, ICP RIE, ndi dry etching applications
• Wangwiro kwa yotumbuluka etching, makamaka CVD SiC njira
• Kuchita kodalirika m'madera ovuta kwambiri komanso kutentha kwambiri
• Imawonetsetsa kuti zowotcha za silicon ndizolondola komanso zogwira mtima

Mapulogalamu:

• Njira za CVD SiC popanga semiconductor
• Makina a Plasma etching ndi ICP RIE
• Dry etching and wafer etching process
• Etching ndi kuika mu plasma etching makina
• Zigawo zolondola za mphete zopyapyala ndi mphete za CVD SiC

Chithunzi cha 109

Microscopic morphology ya CVD SiC pamwamba

Chithunzi cha 110

Microscopic morphology ya CVD SiC cross-section

Chithunzi cha 108
Semicera Ntchito
Semicera ntchito 2
Makina opangira zida
CNN processing, kuyeretsa mankhwala, CVD zokutira
Nyumba ya Semicera Ware
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