SiC Coated Graphite Base Susceptors a MOCVD

SiC Coated Graphite Base Susceptorskwa MOCVD kuchokera ku semicera amapangidwa kuti apereke ntchito yapadera mu njira za kukula kwa epitaxial. Chophimba chapamwamba cha silicon carbide pamtunda wa graphite chimatsimikizira kukhazikika, kukhazikika, komanso kutenthetsa bwino kwa matenthedwe panthawi ya MOCVD (Metal Organic Chemical Vapor Deposition). Pogwiritsa ntchito ukadaulo waukadaulo wa semicera, mutha kukwaniritsa kulondola komanso kuchita bwinoNdi EpitaxyndiSiC Epitaxymapulogalamu.

IziZovuta za MOCVDadapangidwa kuti azithandizira zigawo zingapo zofunika za semiconductor, mongaPSS Etching Carrier, ICP Etching Carrier,ndiWonyamula RTP, kuwapangitsa kukhala osunthika pantchito zosiyanasiyana za etching ndi epitaxial. Kudzipereka kwa Semicera pamiyezo yayikulu kumawonetsetsa kuti ovutitsidwawa amakwaniritsa zofunikira zakupanga kwamakono kwa semiconductor.

Zabwino kugwiritsidwa ntchito muLED EpitaxialMa Susceptor, Barrel Susceptor, ndi Monocrystalline Silicon njira, zotengera izi zitha kusinthidwa makonda osiyanasiyana kukula kwake, kuphatikiza masinthidwe a Pancake Susceptor. Zimagwiranso ntchito kwambiri pakugwiritsa ntchito ma Photovoltaic Parts, kuwapanga kukhala gawo lofunikira kwambiri pakupanga ma cell a dzuwa.

Kuphatikiza apo, SiC Coated Graphite Base Susceptors ya MOCVD ndi yokometsedwa kwa GaN pa SiC Epitaxy, yopereka kuyanjana kwakukulu ndi zida zapamwamba za semiconductor. Kaya mumayang'ana kwambiri zokolola kapena kukulitsa kukula kwa epitaxial, zotengera za semicera zimapereka kudalirika komanso magwiridwe antchito ofunikira kuti muchite bwino m'mafakitale apamwamba kwambiri.