Si Substrate yolembedwa ndi Semicera ndi gawo lofunikira pakupanga zida zogwira ntchito kwambiri za semiconductor. Wopangidwa kuchokera ku Silicon yoyera kwambiri (Si), gawo lapansili limapereka kufanana kwapadera, kukhazikika, komanso kusinthika kwabwino kwambiri, ndikupangitsa kuti ikhale yabwino pamapulogalamu angapo apamwamba pamsika wa semiconductor. Kaya imagwiritsidwa ntchito mu Si Wafer, SiC Substrate, SOI Wafer, kapena SiN Substrate yopanga, Semicera Si Substrate imapereka mawonekedwe osasinthika komanso magwiridwe antchito apamwamba kwambiri kuti akwaniritse zomwe zikuchulukirachulukira zaukadaulo wamakono wamagetsi ndi zida.
Magwiridwe Osafananiza Ndi Kuyera Kwambiri ndi Kulondola
Semicera's Si Substrate imapangidwa pogwiritsa ntchito njira zapamwamba zomwe zimatsimikizira kuyera kwambiri komanso kuwongolera kolimba. Gawoli limakhala ngati maziko opangira zinthu zosiyanasiyana zogwira ntchito kwambiri, kuphatikiza Epi-Wafers ndi AlN Wafers. Kulondola komanso kufananiza kwa Si Substrate kumapangitsa kukhala chisankho chabwino kwambiri popanga zigawo zoonda za epitaxial ndi zinthu zina zofunika kwambiri zomwe zimagwiritsidwa ntchito popanga ma semiconductors am'badwo wotsatira. Kaya mukugwira ntchito ndi Gallium Oxide (Ga2O3) kapena zida zina zapamwamba, Semicera's Si Substrate imatsimikizira kudalirika komanso magwiridwe antchito apamwamba kwambiri.
Mapulogalamu mu Semiconductor Manufacturing
M'makampani opanga ma semiconductor, Si Substrate yochokera ku Semicera imagwiritsidwa ntchito mosiyanasiyana, kuphatikiza Si Wafer ndi SiC Substrate kupanga, komwe imapereka maziko okhazikika, odalirika pakuyika zigawo zogwira ntchito. Gawo laling'onoli limagwira ntchito yofunika kwambiri popanga ma SOI Wafers (Silicon On Insulator), omwe ndi ofunikira pa ma microelectronics apamwamba komanso mabwalo ophatikizika. Kuphatikiza apo, ma Epi-Wafers (epitaxial wafers) omangidwa pa Si Substrates ndi ofunikira pakupanga zida zogwira ntchito kwambiri za semiconductor monga ma transistors amagetsi, ma diode, ndi mabwalo ophatikizika.
Si Substrate imathandiziranso kupanga zida zogwiritsa ntchito Gallium Oxide (Ga2O3), chida chodalirika cha bandgap chomwe chimagwiritsidwa ntchito pamagetsi apamwamba pamagetsi amagetsi. Kuphatikiza apo, kuyanjana kwa Semicera's Si Substrate ndi AlN Wafers ndi magawo ena apamwamba kumawonetsetsa kuti imatha kukwaniritsa zofunikira zosiyanasiyana zamafakitale apamwamba kwambiri, ndikupangitsa kuti ikhale yankho labwino kwambiri popanga zida zotsogola pama foni, magalimoto, ndi mafakitale. .
Ubwino Wodalirika komanso Wosasinthika wa Mapulogalamu Apamwamba Apamwamba
Si Substrate yolembedwa ndi Semicera idapangidwa mwaluso kuti ikwaniritse zovuta zopanga semiconductor. Kukhazikika kwake kwapadera komanso mawonekedwe apamwamba apamwamba kumapangitsa kuti ikhale chinthu choyenera kugwiritsidwa ntchito m'makaseti pamayendedwe ophatikizika, komanso kupanga zigawo zolondola kwambiri pazida za semiconductor. Kuthekera kwa gawo lapansi kuti likhalebe lokhazikika pansi pamikhalidwe yosiyana siyana kumapangitsa kuti pakhale zolakwika zochepa, kukulitsa zokolola ndi magwiridwe antchito a chinthu chomaliza.
Ndi matenthedwe ake apamwamba kwambiri, mphamvu zamakina, komanso chiyero chambiri, Semicera's Si Substrate ndiye chinthu chosankhika kwa opanga omwe akufuna kukwaniritsa miyezo yapamwamba kwambiri yolondola, yodalirika, komanso magwiridwe antchito pakupanga semiconductor.
Sankhani Semicera's Si Substrate ya High-Purity, High-Performance Solutions
Kwa opanga makampani opanga ma semiconductor, Si Substrate yochokera ku Semicera imapereka yankho lamphamvu, lapamwamba kwambiri pamagwiritsidwe osiyanasiyana, kuyambira kupanga Si Wafer mpaka kupanga Epi-Wafers ndi SOI Wafers. Ndi kuyera kosayerekezeka, kulondola, ndi kudalirika, gawo lapansili limathandizira kupanga zida zamtundu wa semiconductor, kuwonetsetsa kuti zikugwira ntchito kwanthawi yayitali komanso kuchita bwino. Sankhani Semicera pazosowa zanu za gawo la Si, ndikudalira chinthu chomwe chapangidwa kuti chikwaniritse zofunikira zaukadaulo wamawa.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |