M'munda wa semiconductor, kukhazikika kwa gawo lililonse ndikofunikira kwambiri panjira yonseyi. Komabe, m'malo otentha kwambiri, ma graphite amapangidwa ndi okosijeni mosavuta komanso kutayika, ndipo zokutira za SiC zimatha kupereka chitetezo chokhazikika pazigawo za graphite. MuSemiceragulu, tili ndi zida zathu zoyeretsera ma graphite, zomwe zimatha kuwongolera chiyero cha graphite pansipa 5ppm. Kuyera kwa zokutira za silicon carbide kuli pansi pa 0.5 ppm.
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Epitaxy Growth Susceptor
Zophika za silicon / silicon carbide ziyenera kudutsa njira zingapo kuti zigwiritsidwe ntchito pazida zamagetsi. Njira yofunikira ndi silicon / sic epitaxy, momwe zowotcha za silicon / sic zimanyamulidwa pamtunda wa graphite. Ubwino wapadera wa Semicera's silicon carbide-coated graphite base umaphatikizapo kuyera kwambiri, zokutira yunifolomu, komanso moyo wautali wautumiki. Amakhalanso ndi kukana kwamphamvu kwamankhwala komanso kukhazikika kwamafuta.
LED Chip Production
Pa zokutira zambiri za MOCVD riyakitala, mapulaneti m'munsi kapena chonyamulira amasuntha gawo lapansi lopyapyala. Kuchita kwa zinthu zoyambira kumakhudza kwambiri mtundu wa zokutira, zomwe zimakhudzanso kuchuluka kwa zidutswa za chip. Semicera's silicon carbide-yokutidwa ndi maziko amawonjezera kupanga kwamafuta apamwamba a LED ndikuchepetsa kupatuka kwa mawonekedwe. Timaperekanso zigawo zina za graphite kwa ma reactor onse a MOCVD omwe akugwiritsidwa ntchito pano. Titha kuvala pafupifupi chigawo chilichonse ndi zokutira za silicon carbide, ngakhale m'mimba mwake mpaka 1.5M, titha kuvala ndi silicon carbide.
Semiconductor Field, Oxidation Diffusion process, ndi zina.
Mu ndondomeko ya semiconductor, ndondomeko yowonjezera makutidwe ndi okosijeni imafuna kuyeretsedwa kwakukulu kwa mankhwala, ndipo ku Semicera timapereka machitidwe ndi CVD zokutira ntchito zambiri za silicon carbide.
Chithunzi chotsatirachi chikuwonetsa silicon carbide slurry ya Semicea ndi silicon carbide ng'anjo yamoto yomwe imatsukidwa mu 100.0- mlingowopanda fumbichipinda. Ogwira ntchito athu akugwira ntchito asanayambe kupaka. Kuyera kwa silicon carbide yathu kumatha kufika 99.99%, ndipo chiyero cha zokutira sic ndichoposa 99.99995%.