Semiceraamasangalala kuperekaKaseti ya PFA, chisankho chamtengo wapatali chogwirira ntchito m'malo omwe kukana kwamankhwala ndi kulimba ndikofunikira. Wopangidwa kuchokera ku zinthu za Perfluoroalkoxy (PFA) zoyera kwambiri, kasetiyi idapangidwa kuti izitha kupirira zovuta kwambiri pakupangira zida za semiconductor, kuwonetsetsa chitetezo ndi kukhulupirika kwa zophika zanu.
Kukaniza Chemical ZosafananaTheKaseti ya PFAamapangidwa kuti azitha kukana mankhwala osiyanasiyana, ndikupangitsa kuti ikhale chisankho chabwino kwambiri pamachitidwe omwe amaphatikiza ma acid, zosungunulira, ndi mankhwala ena owopsa. Kukaniza kwamankhwala kwamphamvu kumeneku kumatsimikizira kuti kasetiyo imakhalabe yosasunthika komanso yogwira ntchito ngakhale m'malo owononga kwambiri, motero imakulitsa moyo wake ndikuchepetsa kufunika kosinthidwa pafupipafupi.
Kumanga Kwapamwamba KwambiriZithunzi za SemiceraKaseti ya PFAamapangidwa kuchokera ku zinthu zoyera kwambiri za PFA, zomwe ndizofunikira kwambiri popewa kuipitsidwa panthawi yokonza zophika. Kumanga koyera kumeneku kumachepetsa chiwopsezo chopanga tinthu tating'onoting'ono komanso kutulutsa mankhwala, kuwonetsetsa kuti zowola zanu zimatetezedwa ku zinyalala zomwe zingasokoneze mtundu wawo.
Kukhalitsa Kukhazikika ndi KuchitaZapangidwira kuti zikhale zolimba, ndiKaseti ya PFAamasunga umphumphu wake structural pansi kutentha kwambiri ndi okhwima processing mikhalidwe. Kaya imakhala yotentha kwambiri kapena imagwiridwa mobwerezabwereza, kasetiyi imakhalabe ndi mawonekedwe ake komanso momwe imagwirira ntchito, zomwe zimapereka kudalirika kwanthawi yayitali m'malo ovuta kupanga.
Precision Engineering Kuti Mugwire MotetezedwaTheSemicera PFA Cassetteimakhala ndi uinjiniya wolondola womwe umatsimikizira kugwidwa kotetezeka komanso kokhazikika. Kagawo kalikonse kamakhala kopangidwa mosamala kuti tisunge zopingasa bwino m'malo mwake, kuteteza kusuntha kulikonse komwe kungayambitse kuwonongeka. Umisiri wolondolawu umathandizira kuyika kosalala kosasinthika komanso kolondola, kumathandizira kuti magwiridwe antchito azitha kugwira ntchito bwino.
Zosiyanasiyana Kugwiritsa Ntchito Panjira ZonseChifukwa cha zinthu zake zapamwamba zakuthupi, theKaseti ya PFAndi yosinthika mokwanira kuti igwiritsidwe ntchito pamagawo osiyanasiyana opanga semiconductor. Ndiwoyenera makamaka kuyika konyowa, kuyika kwamafuta amafuta (CVD), ndi njira zina zomwe zimaphatikizapo malo owopsa amankhwala. Kusinthasintha kwake kumapangitsa kukhala chida chofunikira posunga umphumphu wa ndondomeko ndi khalidwe la wafer.
Kudzipereka ku Quality ndi InnovationKu Semicera, tadzipereka kupereka zinthu zomwe zimakwaniritsa miyezo yapamwamba kwambiri yamakampani. TheKaseti ya PFAZimapereka chitsanzo cha kudziperekaku, kupereka yankho lodalirika lomwe limagwirizanitsa mosasunthika muzopanga zanu. Kaseti iliyonse imayang'aniridwa mosamalitsa kuti iwonetsetse kuti ikukwaniritsa zofunikira zathu zogwirira ntchito, kumapereka zabwino zomwe mumayembekezera kuchokera ku Semicera.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
