Chifukwa chiyani zida za Semiconductor zimafunikira "Epitaxial Layer"

Chiyambi cha Dzina "Epitaxial Wafer"

Kukonzekera kwawafa kumakhala ndi njira ziwiri zazikulu: kukonzekera gawo lapansi ndi njira ya epitaxial. Gawoli limapangidwa ndi semiconductor single crystal material ndipo nthawi zambiri limakonzedwa kuti lipange zida za semiconductor. Ikhozanso kuchitidwa ndi epitaxial processing kuti ipange epitaxial wafer. Epitaxy imatanthawuza njira yokulitsa kristalo watsopano wosanjikiza pagawo limodzi lokonzedwa bwino la kristalo. kristalo watsopano umodzi ukhoza kukhala wa zinthu zomwezo monga gawo lapansi (homogeneous epitaxy) kapena zinthu zosiyana (heterogeneous epitaxy). Popeza kuti kristalo watsopanoyo amakula mogwirizana ndi gawo la kristalo la gawo lapansi, amatchedwa epitaxial layer. Mphepete mwa epitaxial wosanjikiza imatchedwa epitaxial wafer (epitaxial wafer = epitaxial layer + substrate). Zipangizo zopangidwa pa epitaxial layer zimatchedwa "forward epitaxy," pamene zipangizo zopangidwa pa gawo lapansi zimatchedwa "reverse epitaxy," kumene epitaxial layer imagwira ntchito ngati chithandizo.

Homogeneous ndi Heterogeneous Epitaxy

▪Homogeneous Epitaxy:Epitaxial wosanjikiza ndi gawo lapansi amapangidwa ndi zinthu zomwezo: mwachitsanzo, Si/Si, GaAs/GaAs, GaP/GaP.

▪Heterogeneous Epitaxy:Epitaxial wosanjikiza ndi gawo lapansi amapangidwa ndi zinthu zosiyanasiyana: mwachitsanzo, Si/Al₂O₃, GaS/Si, GaAlAs/GaAs, GaN/SiC, etc.

Wopukutidwa Wafers

Kodi Epitaxy Amathetsa Mavuto Otani?

Zida zambiri za kristalo zokha ndizosakwanira kukwaniritsa zovuta zomwe zikuchulukirachulukira za kupanga zida za semiconductor. Chifukwa chake, chakumapeto kwa 1959, njira yowonda yocheperako ya kristalo yomwe imadziwika kuti epitaxy idapangidwa. Koma ukadaulo wa epitaxial unathandizira bwanji kupititsa patsogolo kwa zida? Kwa silicon, chitukuko cha silicon epitaxy chinachitika panthawi yovuta pamene kupanga ma transistors apamwamba kwambiri, apamwamba kwambiri a silicon kunakumana ndi zovuta zazikulu. Malinga ndi mfundo za transistor, kukwaniritsa ma frequency apamwamba ndi mphamvu kumafuna kuti voteji yakuwonongeka kwa dera la osonkhanitsa ikhale yokwera, ndipo kukana kwa mndandanda kukhala wotsika, kutanthauza kuti voteji ya machulukitsidwe iyenera kukhala yaying'ono. Zakale zimafuna resistivity yapamwamba muzinthu zosonkhanitsa, pamene zotsirizirazo zimafuna resistivity yochepa, yomwe imapanga kutsutsana. Kuchepetsa makulidwe a dera lotolera kuti muchepetse kukana kwamitundu ingapo kungapangitse kuti chophika cha silicon chikhale chowonda kwambiri komanso chosalimba kuti chisasunthike, ndipo kutsitsa kopingasa kungasemphane ndi chofunikira choyamba. Kukula kwaukadaulo wa epitaxial kunathetsa nkhaniyi. Yankho lake linali kukulitsa kusanjikiza kwakukulu kwa epitaxial pagawo lochepa la rensistivity. Chipangizocho chimapangidwira pamtundu wa epitaxial, kuonetsetsa kuti mphamvu yowonongeka kwambiri ya transistor, pamene gawo lapansi lochepetsetsa limachepetsa kukana kwapansi ndikuchepetsa mphamvu ya saturation, kuthetsa kutsutsana pakati pa zofunikira ziwirizi.

Kuphatikiza apo, matekinoloje a epitaxial a III-V ndi II-VI ma semiconductors apawiri monga GaAs, GaN, ndi ena, kuphatikiza gawo la nthunzi ndi epitaxy yamadzimadzi, awona kupita patsogolo kwakukulu. Ukadaulo uwu wakhala wofunikira popanga zida zambiri za microwave, optoelectronic, ndi magetsi. Makamaka, njira monga molecular beam epitaxy (MBE) ndi metal-organic chemical vapor deposition (MOCVD) zakhala zikugwiritsidwa ntchito bwino pazigawo zopyapyala, zazikulu, zitsime za quantum, superlattices zochulukidwa, ndi zigawo za atomiki zopyapyala za epitaxial, kuyala maziko olimba a chitukuko cha magawo atsopano a semiconductor monga "band engineering."

M'magwiritsidwe ntchito, zida zambiri za wide-bandgap semiconductor zimapangidwa pazigawo za epitaxial, ndi zida ngati silicon carbide (SiC) zomwe zimagwiritsidwa ntchito ngati magawo. Chifukwa chake, kuwongolera gawo la epitaxial ndichinthu chofunikira kwambiri pamakampani opanga ma semiconductor amitundu yambiri.

Epitaxy Technology: Zisanu ndi ziwiri Zofunika Kwambiri

1. Epitaxy ikhoza kukula (kapena yotsika) yosanjikiza yopingasa pamtunda wochepa (kapena wapamwamba) wa resistivity substrate.

2. Epitaxy imalola kukula kwa N (kapena P) mitundu ya epitaxial pamagulu a P (kapena N) amtundu wa P (kapena N), kupanga mwachindunji mgwirizano wa PN popanda malipiro omwe amadza pamene akugwiritsa ntchito kufalikira kuti apange mgwirizano wa PN pa gawo limodzi la kristalo.

3. Pophatikizana ndi teknoloji ya chigoba, kukula kwa epitaxial kosankha kungathe kuchitidwa m'madera enaake, zomwe zimathandiza kupanga maulendo ophatikizika ndi zipangizo zomwe zimakhala ndi mapangidwe apadera.

4. Kukula kwa Epitaxial kumalola kulamulira kwa mitundu ya doping ndi kuyika, ndi kuthekera kokwaniritsa kusintha kwadzidzidzi kapena pang'onopang'ono m'maganizo.

5. Epitaxy imatha kukula mosiyanasiyana, mitundu yambiri, yamagulu ambiri okhala ndi nyimbo zosinthika, kuphatikizapo zigawo zowonda kwambiri.

6. Kukula kwa Epitaxial kumatha kuchitika pa kutentha pansi pa malo osungunuka a zinthu, ndi kukula kolamulirika, kulola kulondola kwa msinkhu wa atomiki mu makulidwe osanjikiza.

7. Epitaxy imathandizira kukula kwa zigawo za kristalo zomwe sizingakokedwe muzitsulo, monga GaN ndi ternary / quaternary compound semiconductors.

Mitundu Yosiyanasiyana ya Epitaxial ndi Njira za Epitaxial

Mwachidule, zigawo za epitaxial zimapereka mawonekedwe owongolera mosavuta komanso abwino kwambiri a kristalo kuposa magawo ambiri, omwe amapindulitsa pakupanga zida zapamwamba.