Mu ndondomeko yokonzekera yophika, pali maulalo awiri oyambirira: imodzi ndikukonzekera gawo lapansi, ndipo ina ndiyo kukhazikitsa ndondomeko ya epitaxial. Gawo laling'ono, chophatikizira chopangidwa mosamala kuchokera ku semiconductor single crystal material, chitha kuyikidwa mwachindunji popanga zowotcha ngati maziko opangira zida za semiconductor, kapena zitha kupitilizidwanso kudzera munjira za epitaxial.
Kotero, kodi denotation ndi chiyani? Mwachidule, epitaxy ndi kukula kwa kristalo watsopano wosanjikiza pa gawo limodzi la kristalo lomwe lakonzedwa bwino (kudula, kugaya, kupukuta, etc.). Chosanjikiza chatsopano cha kristalochi ndi gawo lapansili zitha kupangidwa ndi zinthu zomwezo kapena zida zosiyanasiyana, kuti kukula kofanana kapena kwaheteroepitaxial kukwaniritsidwe ngati pakufunika. Chifukwa chosanjikiza chatsopano cha kristalo chidzakula molingana ndi gawo la kristalo la gawo lapansi, amatchedwa epitaxial layer. Kukhuthala kwake nthawi zambiri kumakhala ma microns ochepa. Kutengera silicon mwachitsanzo, kukula kwa silicon epitaxial ndikukulitsa wosanjikiza wa silicon wokhala ndi mawonekedwe ofanana ndi kristalo monga gawo lapansi, kuwongolera kosinthika komanso makulidwe, pagawo la silicon single crystal gawo lapansi lomwe lili ndi mawonekedwe apadera a kristalo. Silicon single crystal layer yokhala ndi ma latisi abwino. Pamene epitaxial wosanjikiza wakula pa gawo lapansi, chonsecho amatchedwa epitaxial wafer.
Pamakampani achikhalidwe a silicon semiconductor, kupanga zida zothamanga kwambiri komanso zamphamvu kwambiri paziwombankhanga za silicon zimakumana ndi zovuta zina. Mwachitsanzo, zofunika za voteji mkulu kuwonongeka, ang'onoang'ono mndandanda kukana ndi yaing'ono machulukitsidwe voteji dontho m'dera wotolera n'zovuta kukwaniritsa. Kuyambitsidwa kwaukadaulo wa epitaxy kumathetsa mavutowa mwanzeru. Njira yothetsera vutoli ndikukulitsa epitaxial wosanjikiza kwambiri pamtunda wocheperako wa silicon, kenako kupanga zida pamtundu wapamwamba wa epitaxial. Mwa njira imeneyi, mkulu-resistivity epitaxial wosanjikiza amapereka mkulu kuwonongeka voteji kwa chipangizo, pamene otsika-resistivity gawo lapansi amachepetsa kukana gawo lapansi, potero kuchepetsa machulukitsidwe voteji dontho, potero kukwaniritsa mkulu kusweka voteji ndi yaing'ono Kusamala pakati kukana ndi kutsika kwamagetsi pang'ono.
Kuphatikiza apo, matekinoloje a epitaxy monga epitaxy gawo la nthunzi ndi epitaxy yamadzimadzi a GaAs ndi ma III-V, II-VI ndi zida zina zama cell semiconductor zidapangidwanso kwambiri ndipo zakhala maziko a zida zambiri zama microwave, zida za optoelectronic ndi mphamvu. zipangizo. Ukadaulo wofunikira kwambiri pakupangira, makamaka kugwiritsa ntchito bwino kwa ukadaulo wa ma molekyulu ndi ukadaulo wachitsulo-organic nthunzi gawo la epitaxy m'mizere yopyapyala, ma superlattices, zitsime zachulukidwe, ma superlattice osokonekera, ndi ma atomiki ang'onoang'ono osanjikiza epitaxy akhala gawo latsopano la kafukufuku wa semiconductor. Kukula kwa "Energy Belt Project" kwayala maziko olimba.
Ponena za zida za m'badwo wachitatu za semiconductor, pafupifupi zida zonse za semiconductor zimapangidwa pagawo la epitaxial, ndipo chowotcha cha silicon carbide chokha chimangogwira ntchito ngati gawo lapansi. Makulidwe a zinthu za SiC epitaxial, ndende yonyamula zam'mbuyo ndi magawo ena amatsimikizira mwachindunji mawonekedwe osiyanasiyana amagetsi a zida za SiC. Zida za silicon carbide zopangira ma voliyumu apamwamba zimayika patsogolo zofunikira pazigawo monga makulidwe a zida za epitaxial ndi ndende yonyamula kumbuyo. Chifukwa chake, ukadaulo wa silicon carbide epitaxial umakhala ndi gawo lalikulu pakugwiritsa ntchito bwino zida za silicon carbide. Kukonzekera kwa pafupifupi zida zonse zamagetsi za SiC zimakhazikika pazitsulo zapamwamba za SiC epitaxial. Kupanga zigawo za epitaxial ndi gawo lofunikira pamakampani opanga ma semiconductor a bandgap.
Nthawi yotumiza: May-06-2024