TheMtengo wa MOCVDNjira ndi imodzi mwa njira zokhazikika zomwe zimagwiritsidwa ntchito pamakampani kuti zikule mafilimu apamwamba kwambiri amtundu umodzi wa crystalline, monga gawo limodzi la InGaN epilayers, zipangizo za III-N, ndi mafilimu a semiconductor okhala ndi mapangidwe ambiri, ndipo ndi ofunika kwambiri kupanga zida za semiconductor ndi optoelectronic.
TheSiC zokutira MOCVD susceptorndi chophatikizira chapadera chophimbidwa ndi silicon carbide (SiC) chaepitaxial kukula mu njira ya metal organic chemical vapor deposition (MOCVD).
The SiC ❖ kuyanika ali kwambiri kukana mankhwala ndi matenthedwe bata, kupangitsa kukhala yabwino kusankha MOCVD susceptors ntchito amafuna njira kukula epitaxial.
Chigawo chachikulu cha ndondomeko ya MOCVD ndi susceptor, yomwe ndi chinthu chofunika kwambiri kuti muwonetsetse kuti mafilimu opangidwa ndi opyapyala amafanana ndi abwino.
Kodi susceptor ndi chiyani? The susceptor ndi chigawo chapadera chomwe chimagwiritsidwa ntchito mu njira ya MOCVD kuthandizira ndi kutentha gawo lapansi lomwe filimu yopyapyala imayikidwa. Lili ndi ntchito zingapo, kuphatikizapo kuyamwa mphamvu yamagetsi yamagetsi, kusandulika kukhala kutentha, ndikugawa mofanana kutentha kwa gawo lapansi. Kutentha kwa yunifolomu kumeneku ndikofunikira pakukula kwa mafilimu opyapyala omwe ali ndi makulidwe ake komanso kapangidwe kake.
Mitundu ya susceptors:
1. Ma graphite susceptors: Ma graphite susceptors nthawi zambiri amakutidwa ndi wosanjikiza woteteza mongasilicon carbide (SiC), yomwe imadziwika chifukwa cha kutentha kwake kwapamwamba komanso kukhazikika. TheKupaka kwa SiCamapereka malo olimba, otetezera omwe amakana dzimbiri ndi kuwonongeka pa kutentha kwakukulu.
2. Silicon carbide (SiC) susceptors: Ma susceptors awa amapangidwa kwathunthu ndi SiC ndipo amakhala ndi kukhazikika kwabwino kwa kutentha komanso kukana kuvala. Ma susceptors a SiC ndiwoyenera makamaka kutengera kutentha kwambiri komanso malo owononga.
Momwe susceptors amagwirira ntchito mu MOCVD:
Mu njira ya MOCVD, ma precursors amalowetsedwa mu chipinda chochitiramo momwe amawola ndikuchitapo kanthu kuti apange filimu yopyapyala pamtunda. Choyatsira chimagwira ntchito yofunikira powonetsetsa kuti gawo lapansi likutenthedwa mofanana, zomwe ndizofunikira kwambiri kuti filimuyi ikhale yosasinthasintha pamtunda wonse wapansi. Zinthu ndi mapangidwe a susceptor amasankhidwa mosamala kuti akwaniritse zofunikira za ndondomeko yoyika, monga kutentha kwa kutentha ndi kuyanjana kwa mankhwala.
Ubwino wogwiritsa ntchito ma susceptors apamwamba kwambiri:
• Kupititsa patsogolo filimu yabwino: Popereka kugawa kwa kutentha kwa yunifolomu, susceptor imathandizira kukwaniritsa mafilimu ndi makulidwe osakanikirana ndi mapangidwe, omwe ndi ofunika kwambiri pakugwira ntchito kwa zipangizo za semiconductor.
• Kupititsa patsogolo njira zogwirira ntchito: Zowonongeka zapamwamba zimawonjezera mphamvu zonse za ndondomeko ya MOCVD mwa kuchepetsa mwayi wa zolakwika ndikuwonjezera zokolola za mafilimu ogwiritsidwa ntchito.
• Kutalika kwa moyo ndi kudalirika: Zogwiritsira ntchito zopangidwa ndi zinthu zolimba monga SiC zimatsimikizira kudalirika kwa nthawi yaitali ndikuchepetsa ndalama zosamalira.
Susceptor ndi gawo lofunikira kwambiri munjira ya MOCVD ndipo imakhudza mwachindunji momwe filimu yochepetsera imapangidwira. Kuti mumve zambiri za kukula komwe kulipo, zoyeserera za MOCVD ndi mitengo, chonde musazengereze kulumikizana nafe. Akatswiri athu adzakhala okondwa kukulangizani pazinthu zoyenera ndikuyankha mafunso anu onse.
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Nthawi yotumiza: Aug-12-2024