Kodi MOCVD Susceptor ndi chiyani?

Metal-Organic Chemical Vapor Deposition (MOCVD) ndi njira yofunika kwambiri pamakampani opanga ma semiconductor, pomwe makanema owonda kwambiri amayikidwa pagawo. Chigawo chachikulu cha ndondomeko ya MOCVD ndi susceptor, chinthu chofunika kwambiri chomwe chimagwira ntchito yofunika kwambiri powonetsetsa kuti mafilimu opangidwa ndi ofanana komanso abwino.

Kodi Susceptor ndi chiyani? Susceptor ndi gawo lapadera lomwe limagwiritsidwa ntchito munjira ya MOCVD kuthandizira ndikutenthetsa gawo lapansi lomwe mafilimu owonda amayikidwapo. Imagwira ntchito zingapo, kuphatikiza kuyamwa mphamvu yamagetsi yamagetsi, kuyisintha kuti ikhale yotentha, ndikugawa kutentha uku mozungulira gawo lapansi. Kutentha kwa yunifolomu kumeneku ndikofunikira pakukula kwa mafilimu osakanikirana ndi makulidwe ake komanso kapangidwe kake.

Mitundu ya Susceptors:
1. Graphite Susceptors: Nthawi zambiri yokutidwa ndi wosanjikiza zoteteza, mongasilicon carbide (SiC), graphite susceptors amadziwika kuti mkulu matenthedwe conductivity ndi bata. TheKupaka kwa SiCimapereka malo olimba, otetezera omwe amatsutsa dzimbiri ndi kuwonongeka pa kutentha kwakukulu.

2. Silicon Carbide (SiC) Susceptors: Izi zimapangidwa kwathunthu kuchokera ku SiC, zomwe zimapereka kukhazikika kwamafuta komanso kukana kuvala ndi kung'ambika.SiC susceptorsndizoyenera makamaka njira zotentha kwambiri komanso malo owononga.
BwanjiOsokonezaNtchito mu MOCVD:

Mu ndondomeko ya MOCVD, ma precursors amalowetsedwa mu chipinda cha riyakitala, momwe amawola ndikuchitapo kanthu kuti apange filimu yopyapyala pa gawo lapansi. Choyatsira chimagwira ntchito yofunikira powonetsetsa kuti gawo lapansi likutenthedwa mofanana, zomwe ndizofunikira kwambiri kuti filimuyo ikhale yosasinthasintha pamtunda wonse wapansi. Zida ndi mapangidwe a susceptor amasankhidwa mosamala kuti agwirizane ndi zofunikira za ndondomeko yoyika, monga kutentha ndi kuyanjana kwa mankhwala.
Ubwino Wogwiritsa NtchitoMa Susceptors Apamwamba:
• Kupititsa patsogolo Mafilimu Abwino: Popereka kutentha kwamtundu umodzi, zowawa zimathandiza kukwaniritsa mafilimu omwe ali ndi makulidwe osagwirizana ndi kapangidwe kake, komwe kuli kofunikira pakuchita kwa zida za semiconductor.
• Kuwonjezeka kwa Njira Yogwirira Ntchito: Othandizira apamwamba kwambiri amapangitsa kuti ntchito yonse ya MOCVD ikhale yogwira ntchito mwa kuchepetsa mwayi wa zolakwika ndikuwonjezera zokolola za mafilimu ogwiritsidwa ntchito.
• Utali Wautali ndi Kudalirika: Zotengera zopangidwa kuchokera ku zinthu zolimba monga SiC zimatsimikizira kudalirika kwa nthawi yayitali komanso kuchepetsa mtengo wokonza.

Kutsiliza: Choyimitsira ndi chinthu chofunikira kwambiri pamayendedwe a MOCVD, chomwe chimakhudza kwambiri momwe filimu yowonda imakhalira komanso mphamvu zake. Posankha zida ndi kapangidwe koyenera ka susceptor, opanga semiconductor amatha kukhathamiritsa njira zawo, zomwe zimapangitsa kuti chipangizocho chizigwira bwino ntchito ndikuchepetsa mtengo wopangira. Pamene kufunikira kwa zipangizo zamakono zamakono zikupitirira kukula, kufunikira kwapamwamba kwambiri kwa MOCVD susc