Kodi epitaxy ndi chiyani?

Mainjiniya ambiri sadziwaepitaxy, yomwe imagwira ntchito yofunika kwambiri pakupanga zida za semiconductor.Epitaxyangagwiritsidwe ntchito zosiyanasiyana Chip mankhwala, ndi mankhwala osiyanasiyana mitundu epitaxy, kuphatikizapoNdi epitaxy, SiC epitaxy, GaN epitaxy, ndi zina.

Kodi epitaxy ndi chiyani?
Epitaxy nthawi zambiri imatchedwa "Epitaxy" mu Chingerezi. Mawuwa amachokera ku mawu achigiriki akuti “epi” (kutanthauza “pamwamba”) ndi “ma taxi” (kutanthauza “kakonzedwe”). Monga momwe dzinalo likusonyezera, limatanthauza kulinganiza bwino pamwamba pa chinthu. Njira ya epitaxy ndikuyika kagawo kakang'ono ka kristalo pagawo limodzi la kristalo. Chingwe cha kristalo chomwe changoyikidwa chatsopanochi chimatchedwa epitaxial layer.

Pali mitundu iwiri ikuluikulu ya epitaxy: homoepitaxial ndi heteroepitaxial. Homoepitaxial amatanthauza kukulitsa zinthu zomwezo pamtundu womwewo wa gawo lapansi. Epitaxial wosanjikiza ndi gawo lapansi ali ndi mawonekedwe ofanana ndendende. Heteroepitaxy ndi kukula kwa chinthu china pa gawo lapansi la chinthu chimodzi. Pankhaniyi, mawonekedwe a lattice a epitaxially wamkulu kristalo wosanjikiza ndi gawo lapansi likhoza kukhala losiyana. Kodi makristalo amodzi ndi polycrystalline ndi chiyani?
Mu semiconductors, nthawi zambiri timamva mawu akuti single crystal silicon ndi polycrystalline silicon. Chifukwa chiyani ma silicon ena amatchedwa makhiristo amodzi ndi silicon ena amatchedwa polycrystalline?

Crystal imodzi: Kukonzekera kwa latisi kumakhala kosalekeza komanso kosasinthika, popanda malire a tirigu, ndiko kuti, kristalo yonse imapangidwa ndi latiti imodzi yokhala ndi mawonekedwe a kristalo. Polycrystalline: Polycrystalline imapangidwa ndi njere zing'onozing'ono zambiri, zomwe zili ndi kristalo imodzi, ndipo maonekedwe awo ndi osadziwika kwa wina ndi mzake. Mbewu izi zimasiyanitsidwa ndi malire a tirigu. Mtengo wopangira zida za polycrystalline ndi wocheperako kuposa makhiristo amodzi, kotero amakhalabe othandiza pazinthu zina. Kodi njira ya epitaxial idzaphatikizidwa kuti?
Popanga mabwalo ophatikizika a silicon, njira ya epitaxial imagwiritsidwa ntchito kwambiri. Mwachitsanzo, silicon epitaxy imagwiritsidwa ntchito kukulitsa chosanjikiza choyera komanso chowongolera bwino cha silicon pa gawo lapansi la silicon, lomwe ndi lofunikira kwambiri popanga mabwalo ophatikizika apamwamba. Kuphatikiza apo, pazida zamagetsi, SiC ndi GaN ndi zida ziwiri zomwe zimagwiritsidwa ntchito kwambiri ndi bandgap semiconductor zomwe zimakhala ndi mphamvu zabwino kwambiri zogwirira ntchito. Zidazi nthawi zambiri zimabzalidwa pa silicon kapena magawo ena kudzera mu epitaxy. Pakulankhulana kwachulukidwe, ma semiconductor-based quantum bits nthawi zambiri amagwiritsa ntchito silicon germanium epitaxial structures. Ndi zina zotero.

Njira za kukula kwa epitaxial?

Njira zitatu zomwe zimagwiritsidwa ntchito kwambiri semiconductor epitaxy:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) ndi teknoloji ya kukula kwa semiconductor epitaxial yomwe imachitidwa pansi pa ultra-high vacuum mikhalidwe. Muukadaulo uwu, zomwe zimayambira zimasinthidwa kukhala ma atomu kapena ma molekyulu a ma molekyulu ndikuyikidwa pagawo la crystalline. MBE ndi ukadaulo wolondola kwambiri komanso wosinthika wa semiconductor woonda wa kukula kwa filimu yomwe imatha kuwongolera ndendende makulidwe azinthu zomwe zidayikidwa pamlingo wa atomiki.

Metal organic CVD (MOCVD): Mu njira ya MOCVD, zitsulo za organic ndi mpweya wa hydride zomwe zili ndi zinthu zofunika zimaperekedwa ku gawo lapansi pa kutentha koyenera, ndipo zida zofunikira za semiconductor zimapangidwa kudzera muzochita za mankhwala ndikuyika pagawo, pomwe zotsalira mankhwala ndi reaction mankhwala amachotsedwa.

Vapor Phase Epitaxy (VPE): Vapor Phase Epitaxy ndiukadaulo wofunikira womwe umagwiritsidwa ntchito popanga zida za semiconductor. Mfundo yake yayikulu ndikunyamula nthunzi wa chinthu chimodzi kapena pawiri mu mpweya wonyamulira ndikuyika makhiristo pagawo laling'ono pogwiritsa ntchito makemikolo.