Ndi njira ziti zazikulu pakukonza magawo a SiC?

 

Momwe timapangira masitepe a SiC substrates ndi motere:

 

1. Crystal Orientation:

Kugwiritsa ntchito ma X-ray diffraction kuwongolera kristalo ingot. Pamene mtengo wa X-ray uwongoleredwa pa nkhope yofunidwa ya kristalo, ngodya ya mtengo wosokonekera imatsimikizira momwe kristalo imayendera.

 

2. Kupera Diameter Yakunja:

Makhiristo amodzi omwe amamera muzitsulo za graphite nthawi zambiri amapitilira ma diameter wamba. Kupera kwake m'mimba mwake kumawachepetsera kukula kwake.

 

 

3. Malizani Kukupera Nkhope:

Magawo a 4-inch 4H-SiC nthawi zambiri amakhala ndi mbali ziwiri zoyikira, pulayimale ndi sekondale. Kupukuta kumaso kumatsegula m'mphepete mwa malo awa.

 

4. Kucheka Waya:

Kucheka waya ndi gawo lofunikira pakukonza magawo a 4H-SiC. Ming'alu ndi kuwonongeka kwapang'onopang'ono komwe kumachitika panthawi yocheka mawaya kumasokoneza njira zotsatila, kukulitsa nthawi yokonza ndikuwononga zinthu. Njira yodziwika kwambiri ndi macheka amitundu yambiri okhala ndi diamondi abrasive. Kuyenda kobwerezabwereza kwa mawaya achitsulo omangidwa ndi ma abrasives a diamondi amagwiritsidwa ntchito podula ingot ya 4H-SiC.

 

5. Chamfering:

Pofuna kupewa kutsetsereka m'mphepete ndi kuchepetsa kutayika kwa zinthu zomwe zingawonongeke panthawi yotsatira, nsonga zakuthwa za tchipisi zocheka ndi mawaya zimasinthidwa kukhala mawonekedwe odziwika.

 

6. Kupatulira:

Kucheka kwa waya kumasiya zipsera zambiri komanso zowonongeka zapansi panthaka. Kupatulira kumachitika pogwiritsa ntchito mawilo a diamondi kuti achotse zolakwikazi momwe angathere.

 

7. Kupera:

Izi zimaphatikizapo kugaya movutikira komanso kugaya bwino pogwiritsa ntchito tinthu tating'onoting'ono ta boron carbide kapena ma abrasives a diamondi kuti achotse zowonongeka zotsalira ndi zowonongeka zatsopano zomwe zimayambitsidwa panthawi yopatulira.

 

8. Kupukutira:

Masitepe omaliza amaphatikizapo kupukuta movutikira ndi kupukuta bwino pogwiritsa ntchito aluminiyamu kapena silicon oxide abrasives. Madzi opukuta amafewetsa pamwamba, omwe amachotsedwa ndi makina ndi abrasives. Sitepe iyi imatsimikizira kuti pamwamba pake pamakhala chosalala komanso chosawonongeka.

 

9. Kuyeretsa:

Kuchotsa particles, zitsulo, okusayidi mafilimu, organic zotsalira, ndi zina zoipitsa anachoka masitepe processing.