Ndi njira ziti zazikulu pakukonza magawo a SiC?

Momwe timapangira masitepe a SiC substrates ndi motere:

1. Crystal Orientation: Kugwiritsa ntchito diffraction ya X-ray kuwongolera kristalo ingot. Pamene mtengo wa X-ray uwongoleredwa pa nkhope yofunidwa ya kristalo, ngodya ya mtengo wosokonekera imatsimikizira momwe kristalo imayendera.

2. Kukupera Diameter Yakunja: Makhiristo amodzi omwe amamera muzitsulo za graphite nthawi zambiri amapitilira ma diameter wamba. Kupera kwake m'mimba mwake kumawachepetsera kukula kwake.

 

3.Kumaliza Kukupera Nkhope: Magawo a 4-inch 4H-SiC amakhala ndi mbali ziwiri zoyikira, pulayimale ndi sekondale. Kupukuta kumaso kumatsegula m'mphepete mwa malo awa.

4. Kucheka pawaya: Kucheka waya ndi gawo lofunikira pakukonza magawo a 4H-SiC. Ming'alu ndi kuwonongeka kwapang'onopang'ono komwe kumachitika panthawi yocheka mawaya kumasokoneza njira zotsatila, kukulitsa nthawi yokonza ndikuwononga zinthu. Njira yodziwika kwambiri ndi macheka amitundu yambiri okhala ndi diamondi abrasive. Kuyenda kobwerezabwereza kwa mawaya achitsulo omangidwa ndi ma abrasives a diamondi amagwiritsidwa ntchito podula ingot ya 4H-SiC.

5. Chamfering: Pofuna kupewa kutsetsereka kwa m'mphepete ndikuchepetsa kutayika kwa zinthu pakanthawi kotsatira, m'mphepete mwa tchipisi tawaya amasechedwera ndi mawonekedwe ake.

6. Kupatulira: Kucheka mawaya kumasiya zipsera zambiri komanso kuwonongeka kwapang'onopang'ono. Kupatulira kumachitika pogwiritsa ntchito mawilo a diamondi kuti achotse zolakwikazi momwe angathere.

7. Kupera: Izi zimaphatikizapo kugaya movutikira ndi kugaya bwino pogwiritsa ntchito tinthu tating'onoting'ono ta boron carbide kapena ma abrasives a diamondi kuchotsa zowonongeka zotsalira ndi zowonongeka zatsopano zomwe zimayambitsidwa panthawi yopatulira.

8. Kupukuta: Njira zomalizira zimaphatikizapo kupukuta movutikira ndi kupukuta bwino pogwiritsa ntchito aluminiyamu kapena silicon oxide abrasives. Madzi opukuta amafewetsa pamwamba, omwe amachotsedwa ndi makina ndi abrasives. Sitepe iyi imatsimikizira kuti pamwamba pake pamakhala chosalala komanso chosawonongeka.

9. Kuyeretsa: Kuchotsa tinthu tating'onoting'ono, zitsulo, mafilimu a oxide, zotsalira za organic, ndi zonyansa zina zomwe zimachoka pamasitepe opangira.