Ukhondo wapamwambazidzakhudza kwambiri chiwongola dzanja chazotsatira za semiconductor ndi zinthu. Mpaka 50% ya zokolola zonse zimatayika chifukwapamwambakuipitsidwa.
Zinthu zomwe zingayambitse kusintha kosalamulirika pamagetsi a chipangizocho kapena njira yopangira zida zimatchedwa zonyansa. Zowononga zimatha kubwera kuchokera ku chowotcha chokha, chipinda choyera, zida zopangira, mankhwala opangira kapena madzi.WaferKuipitsidwa kumatha kuzindikirika poyang'anitsitsa, kuyang'anira ndondomeko, kapena kugwiritsa ntchito zida zowunikira zovuta pamayesero omaliza a chipangizo.
▲Zowonongeka pamwamba pa zowotcha za silicon | Network source network
Zotsatira za kuwunika kwa kuipitsidwa zitha kugwiritsidwa ntchito kuwonetsa kuchuluka ndi mtundu wa kuipitsidwa komwe amakumana nakomtandamu sitepe inayake, makina enieni kapena ndondomeko yonse. Malinga ndi gulu la njira zozindikirira,pamwambakuipitsidwa kungagawidwe mu mitundu yotsatirayi.
Kuwonongeka kwachitsulo
Kuwonongeka koyambitsidwa ndi zitsulo kungayambitse kuwonongeka kwa chipangizo cha semiconductor mosiyanasiyana.
Zitsulo zamchere kapena zitsulo zamchere zamchere (Li, Na, K, Ca, Mg, Ba, etc.) zingayambitse kutayikira kwamakono mu dongosolo la pn, lomwe limayambitsa kuwonongeka kwa oxide; kusintha kwachitsulo ndi heavy metal (Fe, Cr, Ni, Cu, Au, Mn, Pb, etc.) kuipitsidwa kungathe kuchepetsa moyo wonyamulira, kuchepetsa moyo wautumiki wa chigawocho kapena kuonjezera mdima wamakono pamene chigawocho chikugwira ntchito.
Njira zodziwika bwino zodziwira kuipitsidwa kwachitsulo ndizo kunyezimira kwathunthu kwa X-ray fluorescence, ma atomiki mayamwidwe spectroscopy ndi inductively kuphatikiza plasma mass spectrometry (ICP-MS).
▲ Kuyipitsidwa kwa Wafer pamwamba | ResearchGate
Kuyipitsidwa kwachitsulo kumatha kuchokera kuzinthu zomwe zimagwiritsidwa ntchito poyeretsa, etching, lithography, deposition, ndi zina zambiri, kapena kuchokera kumakina omwe amagwiritsidwa ntchito popanga izi, monga ma uvuni, ma reactors, implantation ya ion, ndi zina zambiri, kapena angayambitsidwe ndi kusasamalira kwawafa.
Tinthu kuipitsidwa
Madipoziti enieni azinthu nthawi zambiri amawonedwa pozindikira kuwala komwe kwamwazikana kuchokera pakuwonongeka kwapamtunda. Chifukwa chake, dzina lolondola kwambiri la sayansi la kuipitsidwa kwa tinthu ndi vuto la light-point. Kuyipitsidwa kwa tinthu kumatha kuyambitsa kutsekereza kapena kubisa zotsatira mu etching ndi lithography process.
Pakukula kwa filimu kapena kuyika, ma pinholes ndi ma microvoid amapangidwa, ndipo ngati tinthu tating'onoting'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'onoting'ono.
▲ Kupanga kwa tinthu tating'onoting'ono | Network source network
Tinthu tating'onoting'ono tating'onoting'ono tating'onoting'ono tating'onoting'ono titha kuyambitsa mithunzi pamwamba, monga pa photolithography. Ngati tinthu tating'onoting'ono tating'ono tating'ono tating'ono tating'onoting'ono timene timakhala pakati pa photomask ndi photoresist wosanjikiza, amatha kuchepetsa kukhudzana kukhudzana.
Kuphatikiza apo, amatha kuletsa ma ion othamanga panthawi yoyika ma ion kapena etching youma. Tinthu mwinanso anatsekeredwa ndi filimu, kotero kuti tokhala tokhala ndi tokhala. Zigawo zotsatiridwa pambuyo pake zimatha kusweka kapena kukana kudzikundikira m'malo awa, zomwe zimapangitsa kuti pakhale zovuta panthawi yowonekera.
Kuwonongeka kwachilengedwe
Zowonongeka zomwe zimakhala ndi kaboni, komanso zomangira zomwe zimagwirizanitsidwa ndi C, zimatchedwa organic contamination. Zowonongeka za organic zingayambitse zinthu zosayembekezereka za hydrophobic papamwamba, kuonjezera roughness pamwamba, kupanga pamwamba pa hazy, kusokoneza kukula kwa epitaxial layer, ndikukhudza kuyeretsa kwa kuipitsidwa kwazitsulo ngati zowonongeka sizikuchotsedwa poyamba.
Kuipitsidwa kwapamtunda kotereku kumawonedwa ndi zida monga matenthedwe amtundu wa MS, X-ray photoelectron spectroscopy, ndi Auger electron spectroscopy.
▲ Network source source
Kuwonongeka kwa gasi ndi kuipitsidwa kwa madzi
Mamolekyu a mumlengalenga ndi kuipitsidwa ndi madzi okhala ndi kukula kwa mamolekyu nthawi zambiri samachotsedwa ndi mpweya wabwino kwambiri wa particulate air (HEPA) kapena zosefera zotsika kwambiri (ULPA). Kuwonongeka kotereku nthawi zambiri kumayang'aniridwa ndi ion mass spectrometry ndi capillary electrophoresis.
Ena oyipitsa amatha kukhala m'magulu angapo, mwachitsanzo, ma tinthu titha kupangidwa ndi zida zopangidwa kapena zitsulo, kapena zonse, chifukwa chake, mtundu uwu wa kuipitsidwa umatha kukhalanso wotchulidwanso mitundu ina.
▲ Zowonongeka za maselo | Malingaliro a kampani IONICON
Kuonjezera apo, kuipitsidwa kwa wafer kungagawidwenso ngati kuipitsidwa kwa maselo, kuipitsidwa kwa tinthu, ndi kuipitsidwa kwa zinyalala zomwe zimachokera ku ndondomeko malinga ndi kukula kwa gwero la kuipitsidwa. Kukula kochepa kwa tinthu tating'onoting'ono, kumakhala kovuta kwambiri kuchotsa. Popanga zida zamakono zamakono, njira zoyeretsera zowotcha zimakhala ndi 30% - 40% yazinthu zonse zopanga.
▲Zowonongeka pamwamba pa zowotcha za silicon | Network source network
Nthawi yotumiza: Nov-18-2024