Njira yopangira silicon carbide wafer

Chophika cha silicon carbideamapangidwa ndi chiyero chapamwamba cha silicon ufa ndi chiyero chapamwamba cha kaboni ufa monga zopangira, ndipo silicon carbide crystal imakula ndi njira yosinthira nthunzi (PVT), ndikusinthidwa kukhalamchere wa silicon carbide.

① Kaphatikizidwe kazinthu zopangira. High chiyero pakachitsulo ufa ndi mkulu chiyero mpweya ufa anali osakaniza malinga ndi chiŵerengero, ndi pakachitsulo carbide particles anali apanga pa kutentha pamwamba 2,000 ℃. Pambuyo kuphwanya, kuyeretsa ndi njira zina, chiyero chapamwamba cha silicon carbide powder zopangira zomwe zimakwaniritsa zofunikira za kukula kwa kristalo zimakonzedwa.

② kukula kwa kristalo. Pogwiritsa ntchito ufa wapamwamba wa SIC ngati zopangira, kristaloyo idakulitsidwa ndi njira yosinthira nthunzi (PVT) pogwiritsa ntchito ng'anjo yodzipangira yokha ya kristalo.

③ processing ingot. Silicon carbide crystal ingot yomwe idapezedwa idayendetsedwa ndi X-ray single crystal orientator, kenako pansi ndikugudubuzika, ndikusinthidwa kukhala kristalo wamba wa silicon carbide.

④ kudula kristalo. Pogwiritsa ntchito zida zodulira mizere yambiri, makristalo a silicon carbide amadulidwa kukhala mapepala owonda osapitilira 1mm.

⑤ Chip kugaya. Chophikacho chimakanthidwa kuti chikhale chosalala komanso cholimba chomwe chimafunidwa ndi madzi opera a diamondi amitundu yosiyanasiyana.

⑥ Chip kupukuta. Silicon carbide yopukutidwa popanda kuwonongeka kwa pamwamba idapezedwa ndi kupukuta kwamakina ndi kupukuta kwamakina.

⑦ Kuzindikira kwa chip. Gwiritsani ntchito ma microscope, X-ray diffractometer, microscope yamphamvu ya atomiki, tester resistivity tester, surface flatness tester, surface defect comprehensive tester ndi zida zina ndi zipangizo kuti muzindikire kachulukidwe ka microtubule, khalidwe la crystal, kuuma kwa pamwamba, resistivity, warpage, kupindika, kusintha makulidwe, kukanda pamwamba ndi magawo ena a silicon carbide wafer. Malingana ndi izi, mlingo wa khalidwe la chip umatsimikiziridwa.

⑧ Kuyeretsa chip. Tsamba lopukuta la silicon carbide limatsukidwa ndi choyeretsa ndi madzi oyera kuti achotse madzi otsalira opukutira ndi dothi lina pa pepala lopukuta, ndiyeno chowotchacho chimawomberedwa ndikugwedezeka ndi nayitrogeni yoyera kwambiri ndi makina owumitsa; Chophikacho chimakutidwa mubokosi lachitsamba choyera muchipinda choyera kwambiri kuti mupange chowotcha cha silicon carbide chokonzekera kunsi kwa mtsinje.

Kukula kwa chip kumapangitsa kuti kukula kwa kristalo kukhale kovuta kwambiri komanso ukadaulo wopanga, komanso kukwezera kupanga bwino kwa zida zakumunsi, kumachepetsa mtengo wagawo.