Kukula ndi Kugwiritsa Ntchito Silicon Carbide (SiC)
1. Zaka 100 Zatsopano mu SiC
Ulendo wa silicon carbide (SiC) unayamba mu 1893, pamene Edward Goodrich Acheson adapanga ng'anjo ya Acheson, pogwiritsa ntchito zipangizo za carbon kuti akwaniritse kupanga mafakitale a SiC kupyolera mu kutentha kwa magetsi kwa quartz ndi carbon. Izi zinayambitsa chiyambi cha mafakitale a SiC ndipo zinapatsa Acheson patent.
Kumayambiriro kwa zaka za m'ma 1900, SiC idagwiritsidwa ntchito ngati chotupa chifukwa cha kuuma kwake komanso kukana kuvala. Pofika mkatikati mwa zaka za m'ma 1900, kupita patsogolo kwaukadaulo wa Chemical vapor deposition (CVD) kunatsegula mwayi watsopano. Ofufuza a Bell Labs, motsogozedwa ndi Rustum Roy, adayika maziko a CVD SiC, kukwaniritsa zokutira zoyamba za SiC pamalo a graphite.
M'zaka za m'ma 1970 zidawoneka bwino kwambiri pamene Union Carbide Corporation idagwiritsa ntchito graphite yokhala ndi SiC pakukula kwa epitaxial kwa zida za semiconductor za gallium nitride (GaN). Kupita patsogolo kumeneku kunathandizira kwambiri ma LED ndi ma lasers opangidwa ndi GaN apamwamba kwambiri. Kwa zaka zambiri, zokutira za SiC zakula kupitilira ma semiconductors mpaka kugwiritsa ntchito muzamlengalenga, zamagalimoto, ndi zamagetsi zamagetsi, chifukwa chakusintha kwaukadaulo wopanga.
Masiku ano, zatsopano monga kupopera mankhwala kwamafuta, PVD, ndi nanotechnology zikupititsa patsogolo magwiridwe antchito ndi kugwiritsa ntchito zokutira za SiC, kuwonetsa kuthekera kwake m'minda yakutsogolo.
2. Kumvetsetsa Mapangidwe a Crystal a SiC ndi Ntchito
SiC ili ndi ma polytypes opitilira 200, ogawidwa ndi ma atomiki awo kukhala ma cubic (3C), hexagonal (H), ndi rhombohedral (R). Pakati pa izi, 4H-SiC ndi 6H-SiC amagwiritsidwa ntchito kwambiri pazida zamphamvu kwambiri ndi optoelectronic, motero, pamene β-SiC imayamikiridwa chifukwa chapamwamba kwambiri cha kutentha kwa kutentha, kukana kuvala, ndi kukana kwa dzimbiri.
β-SiCswapadera katundu, monga matenthedwe madutsidwe wa120-200 W/m·Kndi coefficient yowonjezera matenthedwe yofanana kwambiri ndi graphite, ipangitseni kukhala chinthu chokonda kwambiri zokutira pamwamba pazida zopyapyala za epitaxy.
3. Zovala za SiC: Katundu ndi Njira Zokonzekera
Zovala za SiC, zomwe nthawi zambiri zimakhala β-SiC, zimagwiritsidwa ntchito kwambiri kuti ziwonjezere zinthu zapamtunda monga kuuma, kukana kuvala, komanso kukhazikika kwamafuta. Njira zodziwika zokonzekera ndi izi:
- Chemical Vapor Deposition (CVD):Amapereka zokutira zapamwamba kwambiri zomatira bwino komanso zofanana, zabwino kwa magawo akulu ndi ovuta.
- Kuyika Nthunzi Pathupi (PVD):Amapereka chiwongolero cholondola pamapangidwe a zokutira, oyenera kugwiritsa ntchito molondola kwambiri.
- Njira Zopoperapolira, Ma Electrochemical Deposition, ndi Slurry Coating: Gwiritsani ntchito ngati njira zotsika mtengo zamapulogalamu enaake, ngakhale ndi zoletsa zosiyanasiyana pakumatira ndi kufananiza.
Njira iliyonse imasankhidwa malinga ndi mawonekedwe a gawo lapansi ndi zofunikira zomwe zimagwiritsidwa ntchito.
4. SiC-Coated Graphite Susceptors mu MOCVD
Ma graphite susceptors okhala ndi SiC ndi ofunikira kwambiri mu Metal Organic Chemical Vapor Deposition (MOCVD), njira yofunika kwambiri popanga semiconductor ndi optoelectronic material.
Ma susceptors awa amapereka chithandizo champhamvu pakukula kwa filimu ya epitaxial, kuonetsetsa kuti kutentha kumakhazikika komanso kuchepetsa kuipitsidwa. Kupaka kwa SiC kumapangitsanso kukana kwa okosijeni, mawonekedwe a pamwamba, ndi mawonekedwe a mawonekedwe, kumathandizira kuwongolera bwino pakukula kwa filimu.
5. Kupita Kutsogolo
M'zaka zaposachedwa, zoyesayesa zazikulu zakhala zikuyang'aniridwa pakuwongolera njira zopangira magawo a graphite okhala ndi SiC. Ochita kafukufuku akuyang'ana kwambiri kukulitsa chiyero cha zokutira, kufanana, komanso moyo wautali ndikuchepetsa mtengo. Kuphatikiza apo, kufufuza zinthu zatsopano mongazokutira za tantalum carbide (TaC).imapereka kusintha komwe kungathe kuchitika pakupanga matenthedwe ndi kukana dzimbiri, ndikutsegulira njira zothetsera mibadwo yotsatira.
Pamene kufunikira kwa ma graphite susceptors opangidwa ndi SiC kukukulirakulira, kupita patsogolo pakupanga mwanzeru komanso kupanga m'mafakitale kudzathandizira kutukuka kwazinthu zapamwamba kwambiri kuti zikwaniritse zosowa zamakampani a semiconductor ndi optoelectronics.
Nthawi yotumiza: Nov-24-2023