Monga tikudziwira, m'munda wa semiconductor, single crystal silicon (Si) ndiyomwe imagwiritsidwa ntchito kwambiri komanso yayikulu kwambiri padziko lonse lapansi. Pakadali pano, zinthu zopitilira 90% zama semiconductor zimapangidwa pogwiritsa ntchito zida za silicon. Pakuchulukirachulukira kwa zida zamphamvu kwambiri komanso zamagetsi zamagetsi zamagetsi zamakono, zofunikira zolimba zayikidwa patsogolo pazigawo zazikulu za zida za semiconductor monga bandgap wide, kusweka kwa mphamvu yamagetsi, kuchuluka kwa ma elekitironi, komanso kusinthasintha kwamafuta. Pazifukwa izi, zida zambiri za semiconductor zimayimiridwa ndisilicon carbide(SiC) atuluka ngati okonda kugwiritsa ntchito kachulukidwe kamphamvu kwambiri.
Monga pawiri semiconductor,silicon carbidendi osowa kwambiri m'chilengedwe ndipo amawonekera mu mawonekedwe a mineral moissanite. Pakadali pano, pafupifupi ma silicon carbide onse omwe amagulitsidwa padziko lapansi amapangidwa mwachinyengo. Silicon carbide ili ndi maubwino a kuuma kwakukulu, kukhathamiritsa kwamafuta kwambiri, kukhazikika kwamafuta abwino, komanso gawo lamagetsi lowonongeka kwambiri. Ndizinthu zabwino zopangira zida zopangira ma semiconductor apamwamba kwambiri komanso amphamvu kwambiri.
Ndiye, zida za silicon carbide power semiconductor zimapangidwa bwanji?
Kodi pali kusiyana kotani pakati pa njira yopangira zida za silicon carbide ndi njira yachikhalidwe yopangira silicon? Kuyambira m'magazini ino, "Zinthu zaSilicon Carbide ChipangizoKupanga” kudzawulula zinsinsi chimodzi ndi chimodzi.
I
Njira yoyendetsera kupanga zida za silicon carbide
Njira yopangira zida za silicon carbide nthawi zambiri imakhala yofanana ndi zida zopangidwa ndi silicon, makamaka kuphatikiza zithunzi, kuyeretsa, doping, etching, kupanga mafilimu, kupatulira ndi njira zina. Ambiri opanga zida zamagetsi amatha kukwaniritsa zofunikira zopangira zida za silicon carbide pokweza mizere yawo yopangira potengera njira yopangira silicon. Komabe, mawonekedwe apadera a zida za silicon carbide zimatsimikizira kuti njira zina pakupangira zida zake ziyenera kudalira zida zapadera kuti zitheke kupanga zida za silicon carbide kupirira voteji yayikulu komanso yapano.
II
Chiyambi cha ma silicon carbide special process modules
Ma module apadera a silicon carbide amaphimba jekeseni, kupanga mapangidwe a chipata, morphology etching, metallization, ndi kupatulira.
(1) Jakisoni wa jekeseni: Chifukwa champhamvu kwambiri ya carbon-silicon chomangira mu silicon carbide, maatomu onyansa ndi ovuta kufalitsa mu silicon carbide. Pokonzekera zida za silicon carbide, doping ya PN junctions imatha kupezeka ndi kuyika kwa ion pa kutentha kwakukulu.
Doping nthawi zambiri imachitika ndi ayoni odetsedwa monga boron ndi phosphorous, ndipo kuya kwa doping nthawi zambiri kumakhala 0.1μm ~ 3μm. Kuyika ma ion amphamvu kwambiri kumawononga kapangidwe ka silicon carbide komweko. Kutentha kwakukulu kumafunika kukonza zowonongeka za latisi chifukwa cha kuikidwa kwa ayoni ndi kuwongolera mphamvu ya annealing pa roughness pamwamba. Njira zazikuluzikulu ndikuyika ma ion a kutentha kwambiri komanso kutentha kwambiri.
Chithunzi 1 Chojambula chojambula cha ion implantation ndi zotsatira za kutentha kwakukulu
(2) Mapangidwe a zipata: Ubwino wa mawonekedwe a SiC/SiO2 uli ndi chikoka chachikulu pa kusamuka kwa mayendedwe ndi kudalirika kwa chipata cha MOSFET. Ndikofunikira kupanga njira yeniyeni yachipata cha oxide ndi post-oxidation annealing njira zolipirira zomangira zolendewera pamawonekedwe a SiC/SiO2 okhala ndi maatomu apadera (monga maatomu a nayitrogeni) kuti akwaniritse zofunikira za mawonekedwe apamwamba a SiC/SiO2 komanso apamwamba. kusamuka kwa zipangizo. Njira zazikuluzikulu ndi chipata cha oxide high-temperature oxidation, LPCVD, ndi PECVD.
Chithunzi 2 Chithunzi chojambula cha mawonekedwe wamba a oxide filimu komanso kutentha kwambiri kwa okosijeni
(3) Etching ya Morphology: Zida za silicon carbide zimakhala zosungunulira mu mankhwala osungunulira, ndipo kuwongolera bwino kwa morphology kumatha kutheka kokha kudzera mu njira zowuma; zida zopangira chigoba, kusankha kwa chigoba, gasi wosakanikirana, kuwongolera kwapambali, kuchuluka kwa ma etching, roughness yam'mbali, ndi zina zotere ziyenera kupangidwa molingana ndi mawonekedwe a silicon carbide. Njira zazikuluzikulu ndikuyika filimu yopyapyala, photolithography, corrosion yamafilimu a dielectric, ndi njira zowuma.
Chithunzi 3 Chithunzi chojambula cha silicon carbide etching process
(4) Metallization: Gwero la elekitirodi la chipangizocho limafuna chitsulo kuti chikhale chogwirizana ndi ohmic chosakanizidwa ndi silicon carbide. Izi sizimangofunika kuwongolera ndondomeko yoyika zitsulo ndikuwongolera mawonekedwe a kukhudzana kwachitsulo-semiconductor, komanso kumafuna kutentha kwapamwamba kwambiri kuti muchepetse kutalika kwa chotchinga cha Schottky ndikukwaniritsa kukhudzana kwachitsulo-silicon carbide ohmic. Njira zazikuluzikulu ndi zitsulo magnetron sputtering, electron mtengo evaporation, ndi mofulumira matenthedwe annealing.
Chithunzi 4 Schematic chithunzi cha magnetron sputtering mfundo ndi zotsatira metallization
(5) Njira yopatulira: Silicon carbide zinthu zimakhala ndi mawonekedwe olimba kwambiri, kulimba kwambiri komanso kulimba kwapang'onopang'ono. Kachitidwe kake kakupera kamakhala kosavuta kupangitsa kuti zinthu ziwonongeke, zomwe zimayambitsa kuwonongeka kwa pamwamba ndi pansi. Njira zatsopano zogaya ziyenera kupangidwa kuti zikwaniritse zofunikira zopangira zida za silicon carbide. Pachimake njira ndi kupatulira akupera zimbale, filimu kumamatira ndi peeling, etc.
Chithunzi 5 Chithunzi chojambula cha kabati kakang'ono kakupera/kupatulira mfundo
Nthawi yotumiza: Oct-22-2024