Kukonzekera njira wamba TaC yokutidwa graphite mbali

GAWO/1
CVD (Chemical Vapor Deposition) njira:
Pa 900-2300 ℃, pogwiritsa ntchito TaCl₅ndi CnHm monga tantalum ndi magwero a kaboni, H₂ monga kuchepetsa mpweya, Ar₂ monga mpweya wonyamulira, filimu yowonongeka. Chophimba chokonzekera ndi chophatikizika, yunifolomu komanso chiyero chapamwamba. Komabe, pali zovuta zina monga njira zovuta, mtengo wokwera mtengo, kuwongolera mpweya wovutirapo komanso kutsika kwadongosolo kwadongosolo.
GAWO/2
Njira yopangira slurry sintering:
slurry yomwe ili ndi gwero la kaboni, gwero la tantalum, dispersant ndi binder imakutidwa pa graphite ndipo imatenthedwa pa kutentha kwambiri itatha kuyanika. Chophimba chokonzekera chimakula popanda kuyang'ana nthawi zonse, chimakhala ndi mtengo wotsika ndipo ndi choyenera kupanga zazikulu. Iyenera kufufuzidwa kuti ikwaniritse yunifolomu ndi zokutira zonse pa graphite yayikulu, kuthetsa zolakwika zothandizira ndikuwonjezera mphamvu yomangira yolumikizira.
GAWO/3
Njira yopopera plasma:
Ufa wa TaC umasungunuka ndi plasma arc pa kutentha kwakukulu, kusinthidwa kukhala madontho otentha kwambiri ndi jeti yothamanga kwambiri, ndikupopera pamwamba pa zinthu za graphite. Ndikosavuta kupanga wosanjikiza wa oxide pansi pavumbulu, ndipo kugwiritsa ntchito mphamvu kumakhala kwakukulu.

 

Chithunzi . Thireyi yopyapyala ikagwiritsidwa ntchito mu chipangizo cha MOCVD chokulirapo cha GaN epitaxial (Veeco P75). Ikumanzere idakutidwa ndi TaC ndipo yomwe ili kumanja idakutidwa ndi SiC.

TaC yotsekedwambali za graphite ziyenera kuthetsedwa

GAWO/1
Mphamvu yomangirira:
Kuchulukitsa kwamafuta ndi zinthu zina zakuthupi pakati pa TaC ndi zida za kaboni ndizosiyana, mphamvu zomangira zomangira ndizochepa, zimakhala zovuta kupewa ming'alu, pores ndi kupsinjika kwamafuta, ndipo zokutira ndizosavuta kutulutsa mumlengalenga weniweni wokhala ndi zowola ndi zowola. mobwerezabwereza kukwera ndi kuzizira ndondomeko.
GAWO/2
Chiyero:
Kupaka kwa TaCkuyenera kukhala koyera kwambiri kuti kupewe zonyansa ndi kuipitsidwa pansi pa kutentha kwambiri, komanso momwe zinthu zilili bwino komanso miyezo yodziwika bwino ya carbon yaulere ndi zonyansa zamkati ndi mkati mwa zokutira zonse ziyenera kuvomerezedwa.
GAWO/3
Kukhazikika:
Kukana kutentha kwambiri komanso kukana kwachilengedwe kwamankhwala pamwamba pa 2300 ℃ ndizizindikiro zofunika kwambiri zoyesa kukhazikika kwa zokutira. Mapini, ming'alu, ngodya zosoweka, ndi malire ambewu yoyang'ana kumodzi ndizosavuta kupangitsa kuti mpweya wowononga ulowe ndikulowa mu graphite, zomwe zimapangitsa kulephera kwa chitetezo chambiri.
GAWO/4
Kukana kwa okosijeni:
TaC imayamba kukhala oxidize ku Ta2O5 ikakhala pamwamba pa 500 ℃, ndipo kuchuluka kwa okosijeni kumawonjezeka kwambiri ndi kuchuluka kwa kutentha ndi kuchuluka kwa okosijeni. Kuchuluka kwa okosijeni kumayambira kumalire a tirigu ndi timbewu tating'onoting'ono, ndipo pang'onopang'ono amapanga makristasi a columnar ndi makristasi osweka, zomwe zimapangitsa kuti pakhale mipata yambiri ndi mabowo, ndipo kulowetsedwa kwa okosijeni kumakula mpaka kupaka kumachotsedwa. Chosanjikiza cha oxide chimakhala ndi kusakhazikika bwino kwamafuta komanso mitundu yosiyanasiyana yowoneka.
GAWO/5
Kufanana ndi roughness:
Kugawidwa kosagwirizana kwa ❖ kuyanika kungayambitse kupsinjika kwa kutentha kwapafupi, kuonjezera chiopsezo cha kusweka ndi kuphulika. Kuonjezera apo, kuuma kwapamwamba kumakhudza mwachindunji kuyanjana pakati pa ❖ kuyanika ndi chilengedwe chakunja, ndipo kuuma kwambiri kumapangitsa kuti pakhale kukangana kwakukulu ndi chophwanyika ndi malo otentha.
GAWO/6
Kukula kwambewu:
Kukula kwambewu yunifolomu kumathandiza kukhazikika kwa zokutira. Ngati kukula kwa njere ndi kochepa, chomangiracho sichiri cholimba, ndipo n'chosavuta kukhala ndi oxidized ndi corrod, zomwe zimapangitsa kuti pakhale ming'alu yambiri ndi mabowo m'mphepete mwa tirigu, zomwe zimachepetsa chitetezo cha ❖ kuyanika. Ngati mbewuyo ndi yaikulu kwambiri, imakhala yovuta kwambiri, ndipo kupaka kwake kumakhala kosavuta kuphulika chifukwa cha kupsinjika kwa kutentha.