Kodi CVD SiC ndi chiyani
Chemical vapor deposition (CVD) ndi njira yoyika vacuum yomwe imagwiritsidwa ntchito popanga zida zolimba kwambiri. Izi nthawi zambiri zimagwiritsidwa ntchito popanga semiconductor kupanga mafilimu owonda pamwamba pa zowonda. Pokonzekera SiC ndi CVD, gawo lapansili limawonekera kwa otsogolera amodzi kapena angapo osasunthika, omwe amachitira mankhwala pamtunda wa gawo lapansi kuti asungire gawo lofunikira la SiC. Mwa njira zambiri zopangira zida za SiC, zinthu zomwe zimakonzedwa ndi kuyika kwa nthunzi wamankhwala zimakhala ndi zofanana komanso zoyera, ndipo njirayo imakhala ndi mphamvu zowongolera.
Zida za CVD SiC ndizofunikira kwambiri kuti zigwiritsidwe ntchito m'makampani opangira zida zamagetsi zomwe zimafunikira zida zogwirira ntchito kwambiri chifukwa cha kuphatikiza kwawo kwapadera kwamafuta, magetsi ndi mankhwala. CVD SiC zigawo chimagwiritsidwa ntchito etching zipangizo, MOCVD zida, Si epitaxial zida ndi SiC epitaxial zida, mofulumira matenthedwe processing zida ndi zina.
Ponseponse, gawo lalikulu kwambiri pamsika wazinthu za CVD SiC ndikuyika zida. Chifukwa cha kuchepa kwake komanso kusinthasintha kwa mpweya wa chlorine-ndi fluorine wokhala ndi etching, CVD silicon carbide ndi chinthu chabwino kwambiri pazigawo monga mphete zoyang'ana mu zida za plasma etching.
Zigawo za CVD silicon carbide mu etching zida zimaphatikizapo mphete zowunikira, mitu ya shawa ya gasi, thireyi, mphete zam'mphepete, ndi zina. Kutengera mphete yowunikira monga chitsanzo, mphete yowunikira ndi gawo lofunikira lomwe limayikidwa kunja kwa chophatikizira ndikulumikizana mwachindunji ndi chophatikizira. Pogwiritsa ntchito magetsi pa mpheteyo kuti ayang'ane plasma yomwe imadutsa mu mphete, plasma imayang'ana pa chophatikizira kuti chikhale chofanana.
Mphete zachikhalidwe zimapangidwa ndi silicon kapena quartz. Ndi kupita patsogolo kwa Integrated circuit miniaturization, kufunikira ndi kufunikira kwa etching process mu Integrated circuit kupanga zikuchulukirachulukira, ndipo mphamvu ndi mphamvu za etching plasma zikupitilira kukula. Makamaka, mphamvu ya plasma yofunikira pazida zophatikizira (CCP) za plasma ndizokwera kwambiri, motero kuchuluka kwa mphete zomwe zimapangidwa ndi silicon carbide zikuchulukirachulukira. Chithunzi chojambula cha CVD silicon carbide focus ring chikuwonetsedwa pansipa:
Nthawi yotumiza: Jun-20-2024