Mbiri ya kafukufuku
Kufunika kwa kagwiritsidwe ntchito ka silicon carbide (SiC): Monga cholumikizira chachikulu cha semiconductor, silicon carbide yakopa chidwi kwambiri chifukwa champhamvu zake zamagetsi (monga bandgap yokulirapo, kuthamanga kwa ma elekitironi apamwamba komanso kusinthasintha kwamafuta). Zinthuzi zimapangitsa kuti zigwiritsidwe ntchito kwambiri popanga zida zamagetsi, kutentha kwambiri komanso mphamvu zamagetsi, makamaka pamagetsi amagetsi.
Chikoka cha zolakwika za kristalo: Ngakhale zabwino za SiC izi, zolakwika mu kristalo zimakhalabe vuto lalikulu lomwe likulepheretsa kupanga zida zogwira ntchito kwambiri. Zowonongeka izi zitha kusokoneza magwiridwe antchito a chipangizocho ndikusokoneza kudalirika kwa chipangizocho.
Ukadaulo wa kujambula kwa X-ray: Kuti muwongolere kukula kwa kristalo ndikumvetsetsa momwe ziwopsezo zimakhudzira magwiridwe antchito a chipangizocho, ndikofunikira kuwonetsa ndikuwunika kasinthidwe kachilema mu makristalo a SiC. X-ray topological imaging (makamaka kugwiritsa ntchito matabwa a synchrotron radiation) yakhala njira yofunika kwambiri yodziwira zomwe zimatha kupanga zithunzi zowoneka bwino zamkati mwa kristalo.
Malingaliro ofufuza
Kutengera ukadaulo wa ray tracing kayeseleledwe: Nkhaniyi ikupereka malingaliro ogwiritsira ntchito ukadaulo wa ray tracing kayeseleledwe kutengera kachitidwe kosiyanitsa ndi mawonekedwe kuti ayesere kusiyanitsa komwe kumawonedwa pazithunzi zenizeni za X-ray. Njirayi yatsimikiziridwa kuti ndi njira yabwino yophunzirira zinthu za crystal defect mu semiconductors zosiyanasiyana.
Kupititsa patsogolo ukadaulo woyerekeza: Pofuna kutengera bwino kusuntha kosiyanasiyana komwe kumawonedwa mu makhiristo a 4H-SiC ndi 6H-SiC, ofufuzawo adawongolera ukadaulo wa ray tracing kayeseleledwe ndikuphatikiza zotsatira za kupumula kwapamtunda ndi kuyamwa kwamagetsi.
Zofufuza
Kusanthula kwa mtundu wa dislocation: Nkhaniyi ikuwunikanso mawonekedwe a mitundu yosiyanasiyana ya zoduka (monga ma screw dislocations, dislocations m'mphepete, kusakanikirana kosakanikirana, kusuntha kwa ndege ya basal ndi kutayika kwamtundu wa Frank) mumitundu yosiyanasiyana ya SiC (kuphatikiza 4H ndi 6H) pogwiritsa ntchito kufufuza kwa ray. luso loyerekeza.
Kagwiritsidwe ntchito kaukadaulo woyerekeza: Kugwiritsa ntchito ukadaulo wa ray tracing kayeseleledwe mumikhalidwe yosiyana siyana monga kufowokeka kwa beam topology ndi plane wave topology, komanso momwe mungadziwire kuya kwakuya kwa kusuntha kudzera muukadaulo woyerekeza amawerengedwa.
Kuphatikizika kwa zoyeserera ndi zofananira: Poyerekeza zithunzi zoyeserera za X-ray topological ndi zithunzi zofananira, kulondola kwaukadaulo wofananira pozindikira mtundu wa dislocation, vector ya Burgers ndi kugawa kwapamalo kwa ma dislocation mu kristalo kumatsimikiziridwa.
Zotsatira za kafukufuku
Kuchita bwino kwaukadaulo woyeserera: Kafukufukuyu akuwonetsa kuti ukadaulo wa ray tracing kayeseleledwe ndi njira yosavuta, yosawononga komanso yosamvetsetseka yowululira mawonekedwe amitundu yosiyanasiyana ya ma dislocation mu SiC ndipo amatha kuyerekeza bwino kuzama kolowera kolowera.
Kusanthula kasinthidwe ka 3D dislocation: Kupyolera muukadaulo woyerekeza, kusanthula kwa masinthidwe a 3D dislocation ndi kuyeza kachulukidwe kumatha kuchitidwa, komwe ndikofunikira kuti timvetsetse momwe zimakhalira komanso kusinthika kwa kusuntha pakukula kwa kristalo.
Zomwe zidzachitike m'tsogolo: Ukadaulo wotsata mayendedwe a Ray ukuyembekezeka kugwiritsidwanso ntchito ku topology yamphamvu kwambiri komanso ma labotale a X-ray topology. Kuphatikiza apo, ukadaulo uwu ukhoza kukulitsidwanso pakutengera mawonekedwe a chilema cha ma polytypes ena (monga 15R-SiC) kapena zida zina za semiconductor.
Chithunzi Mwachidule
Chithunzi 1: Chithunzi chojambula cha synchrotron radiation X-ray topological imaging imaging, kuphatikizapo transmission (Laue) geometry, reverse reflection (Bragg) geometry, ndi grazing incidence geometry. Ma geometries awa amagwiritsidwa ntchito makamaka kujambula zithunzi za X-ray zakuthambo.
Chithunzi 2: Chithunzi chojambula cha X-ray diffraction ya malo opotoka mozungulira wononga wononga. Chiwerengerochi chikufotokozera mgwirizano wapakati pa mtengo wa zochitika (s0) ndi mtengo wosiyana (sg) ndi ndege yapafupi yapafupi (n) ndi ngodya ya Bragg (θB).
Chithunzi 3: Kumbuyo-kumbuyo kwa X-ray zithunzi zojambula za micropipes (MPs) pa 6H-SiC wafer ndi kusiyana kwa kusokoneza screw dislocation (b = 6c) pansi pa zochitika zofanana.
Chithunzi 4: Ma Micropipe awiriawiri mu chithunzi chakumbuyo chowonetsera pamwamba pa 6H-SiC wafer. Zithunzi za aphungu omwewo okhala ndi mipata yosiyana ndi aphungu kumbali zosiyana zimawonetsedwa ndi mayendedwe a ray.
Chithunzi cha 5: Kukula kwa msipu Zithunzi za X-ray za mawonekedwe otsekedwa ndi screw dislocations (TSDs) pa 4H-SiC wafer akuwonetsedwa. Zithunzizi zikuwonetsa kusiyanitsa kowonjezereka m'mphepete.
Chithunzi 6: Ma Ray tracing mafanizidwe a zochitika za msipu Zithunzi za X-ray zakumanja za 1c TSDs za kumanzere ndi zamanja za 1c TSD pa 4H-SiC wafer zikuwonetsedwa.
Chithunzi 7: Ma Ray tracing simulations a TSDs mu 4H-SiC ndi 6H-SiC akuwonetsedwa, akuwonetsa kusokonezeka ndi ma Burgers vectors osiyanasiyana ndi polytypes.
Chithunzi 8: Imawonetsa zochitika zodyera msipu zithunzi za X-ray zamitundu yosiyanasiyana ya ulusi m'mphepete (TEDs) pa 4H-SiC wafers, ndi zithunzi za TED topological zotsatiridwa pogwiritsa ntchito njira yowunikira ma ray.
Chithunzi 9: Imawonetsa X-ray-reflection back-reflection topological images of various TED TED pa 4H-SiC wafers, ndi kufananizidwa kwa TED kusiyana.
Chithunzi cha 10: Imawonetsa zithunzi zofananira za ray za dislocations zosakanikirana (TMDs) zokhala ndi ma vector enieni a Burgers, ndi zithunzi zoyeserera zakuthambo.
Chithunzi cha 11: Ikuwonetsa zithunzi zakumbuyo zakumbuyo za ma basal plane dislocation (BPDs) pa zowotcha za 4H-SiC, ndi chithunzi chojambula cha mawonekedwe ofananirako a m'mphepete.
Chithunzi cha 12: Imawonetsa zithunzi zofananira za ray za ma BPD akumanja akumanja akuya mosiyanasiyana poganizira kumasuka komanso kuyamwa kwazithunzi.
Chithunzi 13: Imawonetsa zithunzi zofananira za ray yamanja yamanja ya helical BPD pa kuya kosiyana, ndi zochitika msipu X-ray topological zithunzi.
Chithunzi cha 14: Imawonetsa chithunzithunzi cha kusuntha kwa ndege yoyambira kumbali iliyonse pazitsulo za 4H-SiC, ndi momwe mungadziwire kuzama kolowera poyesa kutalika kwake.
Chithunzi cha 15: Kusiyanitsa kwa BPDs ndi ma vectors osiyanasiyana a Burgers ndi mayendedwe amizere m'malo odyetserako zithunzi za X-ray topological, ndi zotsatira zofananira zofananira.
Chithunzi cha 16: Chifaniziro cha ray tracing kayeseleledwe ka TSD yamanja yopotoka pa 4H-SiC wafer, ndi zochitika msipu X-ray topological chithunzi chikuwonetsedwa.
Chithunzi cha 17: The ray tracing simulation ndi chithunzithunzi choyesera cha TSD yopotoka pa 8 ° offset 4H-SiC wafer ikuwonetsedwa.
Chithunzi 18: Ma ray omwe amatsata zithunzi zofananira za TSD ndi TMD zopotoka zokhala ndi ma Burger ma vectors osiyanasiyana koma mzere womwewo ukuwonetsedwa.
Chithunzi cha 19: Chifaniziro cha ray tracing kayeseleledwe ka Frank-type dislocations, ndi zofanana zochitika msipu X-ray topological chithunzi akuwonetsedwa.
Chithunzi cha 20: Chithunzi chofalitsidwa choyera cha X-ray cha topological cha micropipe pa 6H-SiC wafer, ndi chithunzi chofananira cha ray chikuwonetsedwa.
Chithunzi cha 21: Chithunzi chamsipu cha monochromatic X-ray topological sample of axially cut sample of 6H-SiC, ndi ray tracing simulation image of the BPDs ikuwonetsedwa.
Chithunzi 22: chikuwonetsa ray tracing kayeseleledwe zithunzi za BPDs mu 6H-SiC axially kudula zitsanzo pa ngodya zosiyanasiyana zochitika.
Chithunzi 23: chikuwonetsa ray tracing simulation zithunzi za TED, TSD ndi TMDs mu 6H-SiC axially kudula zitsanzo pansi msipu zochitika geometry.
Chithunzi cha 24: chikuwonetsa zithunzi za X-ray zakutsogolo za TSD zopotoka kumbali zosiyanasiyana za mzere wa isoclinic pa 4H-SiC wafer, ndi zithunzi zofananira zotsatizana ndi ray.
Nkhaniyi ndi yongogawana nawo maphunziro. Ngati pali kuphwanya kulikonse, chonde titumizireni kuti tichotse.
Nthawi yotumiza: Jun-18-2024