Njira zokutira za photoresist nthawi zambiri zimagawika kukhala zokutira zozungulira, zokutira za dip ndi zokutira zopukutira, zomwe zimakutira zozungulira zomwe zimagwiritsidwa ntchito kwambiri. Ndi zokutira zozungulira, photoresist imadonthozedwa pa gawo lapansi, ndipo gawo lapansi limatha kuzunguliridwa mwachangu kuti lipeze filimu ya photoresist. Pambuyo pake, filimu yolimba ikhoza kupezedwa mwa kutenthetsa pa mbale yotentha. Kupaka kwa spin ndi koyenera kupaka mafilimu owonda kwambiri (pafupifupi 20nm) mpaka makanema okhuthala pafupifupi 100um. Makhalidwe ake ndi ofanana bwino, makulidwe a filimu yofananira pakati pa zopyapyala, zolakwika zochepa, ndi zina zambiri, ndipo filimu yokhala ndi zokutira zambiri imatha kupezeka.
Spin ❖ kuyanika ndondomeko
Panthawi yopindika, kuthamanga kwakukulu kwa gawo lapansi kumatsimikizira makulidwe a filimu a photoresist. Ubale pakati pa liwiro lozungulira ndi makulidwe a filimu ndi motere:
Spin=kTn
Mu formula, Spin ndiye liwiro lozungulira; T ndi makulidwe a filimu; k ndi n ndi zosasintha.
Zinthu zomwe zimakhudza njira yokutira yozungulira
Ngakhale filimu makulidwe anatsimikiza ndi waukulu kasinthasintha liwiro, komanso zokhudzana ndi firiji, chinyezi, photoresist mamasukidwe akayendedwe ndi photoresist mtundu. Kuyerekeza kwa mitundu yosiyanasiyana ya ma curve zokutira a photoresist akuwonetsedwa mu Chithunzi 1.
Chithunzi 1: Kuyerekeza kwa mitundu yosiyanasiyana ya ma curve opaka ma photoresist
Mphamvu ya nthawi yayikulu yozungulira
Kufupikitsa nthawi yayikulu yozungulira, m'pamenenso makulidwe a filimuyo amakulirakulira. Pamene nthawi yayikulu yozungulira ikuwonjezeka, filimuyo imakhala yochepa kwambiri. Ikadutsa 20s, makulidwe a filimu amakhalabe osasinthika. Chifukwa chake, nthawi yayikulu yozungulira nthawi zambiri imasankhidwa kukhala yopitilira masekondi a 20. Ubale pakati pa nthawi yayikulu yozungulira ndi makulidwe a kanema akuwonetsedwa mu Chithunzi 2.
Chithunzi 2: Ubale pakati pa nthawi yayikulu yozungulira ndi makulidwe a kanema
Pamene photoresist ndi kudonthozera pa gawo lapansi, ngakhale wotsatira waukulu kasinthasintha liwiro ndi yemweyo, kasinthasintha liwiro gawo lapansi pa akudontha zingakhudze chomaliza filimu makulidwe. The makulidwe a photoresist filimu kumawonjezera ndi kuwonjezeka kwa gawo lapansi kasinthasintha liwiro pa akudontha, amene ndi chifukwa cha chikoka cha zosungunulira evaporation pamene photoresist ndi zikuwululidwa pambuyo akudontha. Chithunzi 3 chikuwonetsa mgwirizano pakati pa makulidwe a filimuyo ndi liwiro lalikulu lozungulira pama liwiro osiyanasiyana a kasinthasintha panthawi ya photoresist akudontha. Zitha kuwoneka kuchokera pachithunzichi kuti ndi kuwonjezeka kwa liwiro la kuzungulira kwa gawo lapansi lodontha, makulidwe a filimu amasintha mofulumira, ndipo kusiyana kumawonekera kwambiri m'deralo ndi liwiro lotsika kwambiri lozungulira.
Chithunzi 3: Ubale pakati pa makulidwe a filimu ndi liwiro lalikulu lozungulira pama liwiro osiyanasiyana a kasinthasintha panthawi ya photoresist.
Zotsatira za chinyezi pakupaka
Chinyezi chikachepa, makulidwe a filimu amawonjezeka, chifukwa kuchepa kwa chinyezi kumalimbikitsa kutuluka kwa zosungunulira. Komabe, kugawa makulidwe a filimu sikusintha kwambiri. Chithunzi 4 chikuwonetsa mgwirizano pakati pa chinyezi ndi kugawa makulidwe a filimu panthawi yopaka.
Chithunzi 4: Ubale pakati pa chinyezi ndi kugawa makulidwe a filimu panthawi yopaka
Zotsatira za kutentha pa ❖ kuyanika
Pamene kutentha kwa m'nyumba kumakwera, makulidwe a filimu amawonjezeka. Zitha kuwoneka kuchokera pa Chithunzi 5 kuti kugawa kwa makulidwe a filimu ya photoresist kumasintha kuchokera ku convex kupita ku concave. Kupindika pachithunzichi kumasonyezanso kuti kufanana kwakukulu kumapezeka pamene kutentha kwa m'nyumba kuli 26 ° C ndipo kutentha kwa photoresist ndi 21 ° C.
Chithunzi 5: Ubale pakati pa kutentha ndi kugawa makulidwe a filimu panthawi yopaka
Zotsatira za liwiro la utsi pakupaka
Chithunzi 6 chikuwonetsa mgwirizano pakati pa liwiro la kutopa ndi kugawa makulidwe a kanema. Popanda utsi, zikuwonetsa kuti pakati pa mtandawo umakhala wokhuthala. Kuwonjezeka kwa liwiro la utsi kumapangitsanso kufanana, koma ngati kuchulukitsidwa kwambiri, kufanana kumachepa. Zitha kuwoneka kuti pali mtengo wabwino kwambiri wa liwiro la kutulutsa.
Chithunzi 6: Ubale pakati pa liwiro la kutopa ndi kugawa makulidwe a kanema
Chithandizo cha HMDS
Pofuna kuti wojambula zithunzi azitha kuvala bwino, chophikacho chiyenera kuthandizidwa ndi hexamethyldisilazane (HMDS). Makamaka pamene chinyezi chimayikidwa pamwamba pa filimu ya Si oxide, silanol imapangidwa, yomwe imachepetsa kumatira kwa photoresist. Pofuna kuchotsa chinyezi ndi kuwola silanol, chophikacho nthawi zambiri chimatenthedwa mpaka 100-120 ° C, ndipo HMDS ya nkhungu imayambitsidwa kuti iwononge mankhwala. Zomwe zimagwirira ntchito zikuwonetsedwa mu Chithunzi 7. Kupyolera mu chithandizo cha HMDS, hydrophilic pamwamba ndi ngodya yaing'ono yokhala ndi hydrophobic pamwamba ndi yaikulu kukhudzana ngodya. Kuwotcha chophatikizika akhoza kupeza apamwamba photoresist adhesion.
Chithunzi 7: HMDS reaction mechanism
Zotsatira za chithandizo cha HMDS zitha kuwonedwa poyesa mbali yolumikizana. Chithunzi 8 chikuwonetsa mgwirizano pakati pa nthawi ya chithandizo cha HMDS ndi ngodya yolumikizana (kutentha kwamankhwala 110 ° C). Gawo laling'ono ndi Si, nthawi ya chithandizo cha HMDS ndi yayikulu kuposa 1min, mbali yolumikizana ndi yayikulu kuposa 80 °, ndipo zotsatira za chithandizo ndizokhazikika. Chithunzi 9 chikuwonetsa mgwirizano pakati pa kutentha kwa chithandizo cha HMDS ndi ngodya yolumikizana (nthawi yamankhwala 60s). Kutentha kukadutsa 120 ℃, ngodya yolumikizana imachepa, kusonyeza kuti HMDS imawola chifukwa cha kutentha. Choncho, chithandizo cha HMDS nthawi zambiri chimachitika pa 100-110 ℃.
Chithunzi 8: Ubale pakati pa nthawi ya chithandizo cha HMDS
ndi kukhudzana angle (mankhwala kutentha 110 ℃)
Chithunzi 9: Ubale pakati pa kutentha kwa chithandizo cha HMDS ndi ngodya yolumikizana (nthawi yamankhwala 60s)
Chithandizo cha HMDS chimachitidwa pa gawo lapansi la silicon ndi filimu ya okusayidi kuti apange chithunzi cha photoresist. Filimu ya okusayidi imayikidwa ndi hydrofluoric acid ndi chotchinga chowonjezera, ndipo amapezeka kuti pambuyo pa chithandizo cha HMDS, chithunzi cha photoresist chitha kusungidwa kuti chisagwe. Chithunzi 10 chikuwonetsa zotsatira za chithandizo cha HMDS (kukula kwachitsanzo ndi 1um).
Chithunzi 10: Zotsatira za chithandizo cha HMDS (kukula kwachitsanzo ndi 1um)
Kuphikatu
Pa liwiro lomwelo kasinthasintha, ndi apamwamba kutentha prebaking, ang'onoang'ono filimu makulidwe, zomwe zimasonyeza kuti apamwamba prebaking kutentha, kwambiri zosungunulira ukuphwera, chifukwa mu woonda filimu makulidwe. Chithunzi 11 chikuwonetsa mgwirizano pakati pa kutentha kophika kale ndi Dill's A parameter. The A parameter imasonyeza kuchuluka kwa photosensitive wothandizira. Monga momwe tikuonera pachithunzichi, pamene kutentha kusanayambe kuphika kumakwera pamwamba pa 140 ° C, chizindikiro cha A chimachepa, kusonyeza kuti photosensitive wothandizira amawola pa kutentha kuposa izi. Chithunzi 12 chikuwonetsa ma spectral transmittance pa kutentha kosiyanasiyana kophika kale. Pa 160 ° C ndi 180 ° C, kuwonjezeka kwa transmittance kungawonedwe mu kutalika kwa kutalika kwa 300-500nm. Izi zimatsimikizira kuti photosensitive wothandizira amawotcha ndikuwola pa kutentha kwambiri. Kutentha kophika kale kuli ndi mtengo wabwino kwambiri, womwe umatsimikiziridwa ndi maonekedwe a kuwala ndi kukhudzidwa.
Chithunzi 11: Ubale pakati pa kutentha kophika kale ndi Dill's A parameter
(mtengo woyezedwa wa OFPR-800/2)
Chithunzi 12: Spectral transmittance pa kutentha kosiyanasiyana kophika musanaphike
(OFPR-800, makulidwe a filimu 1um)
Mwachidule, njira yokutira ya spin ili ndi ubwino wapadera monga kuwongolera kulondola kwa makulidwe a filimu, kukwera mtengo kwa ntchito, mikhalidwe yochepetsetsa, ndi ntchito yosavuta, kotero imakhala ndi zotsatira zazikulu zochepetsera kuipitsidwa, kupulumutsa mphamvu, ndi kupititsa patsogolo ntchito zamtengo wapatali. M'zaka zaposachedwa, zokutira zozungulira zakhala zikuchulukirachulukira, ndipo kugwiritsa ntchito kwake kwafalikira pang'onopang'ono kumadera osiyanasiyana.
Nthawi yotumiza: Nov-27-2024