Isostatic PECVD Graphite Boat

Kufotokozera Kwachidule:

Isostatic PECVD graphite bwato chimagwiritsidwa ntchito maulalo zosiyanasiyana za semiconductor kupanga, monga polysilicon filimu mafunsidwe, okusayidi filimu mafunsidwe, nitride filimu mafunsidwe, etc. ntchito zake zabwino zimapangitsa kukhala yabwino yopyapyala chonyamulira mu ndondomeko PECVD.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

SEMICERA isostatic PECVD graphite bwato ndi mkulu-chiyero, mkulu-kachulukidwe graphite mankhwala opangidwa kuti yopyapyala thandizo mu PECVD (plasma kumatheka mankhwala nthunzi mafunsidwe) ndondomeko. SEMICERA imagwiritsa ntchito ukadaulo wapamwamba kwambiri wa isostatic kuwonetsetsa kuti bwato la graphite lili ndi kukana kwa kutentha kwambiri, kukana kwa dzimbiri, kukhazikika kwapakatikati komanso kuwongolera kwamafuta, chomwe ndi chofunikira kwambiri popanga semiconductor.

SEMICERA isostatic PECVD graphite boti ili ndi zotsatirazi:

▪ Kuyera Kwambiri: Zinthu za graphite zimakhala zoyera kwambiri komanso zosadetsedwa kwambiri kuti zisaipitsidwe ndi pamwamba pake.

▪ Kuchulukirachulukira: Kuchulukana kwambiri, mphamvu zamakina kwambiri, zimatha kupirira kutentha kwambiri komanso malo opanda vacuum.

▪ Kukhazikika bwino kwa mawonekedwe: Kusintha kwakung'ono pa kutentha kwakukulu kuti zitsimikizire kukhazikika kwa njira.

▪ Matenthedwe abwino kwambiri: Samutsani bwino kutentha kuti mupewe kutentha kwambiri.

▪ Kulimbana ndi dzimbiri mwamphamvu: Kutha kukana kukokoloka ndi mpweya wowononga wamitundumitundu ndi madzi a m’magazi.

Performance parameter	semicera	Mtengo wa SGL R6510	Performance parameter
Kuchulukana (g/cm3)	1.91	1.83	1.85
Mphamvu yopindika (MPa)	63	60	49
Mphamvu yamphamvu (MPa)	135	130	103
Kulimba M'mphepete mwa nyanja (HS)	70	64	60
Coefficient of thermal expansion (10-6/K)	85	105	130
Coefficient of thermal expansion (10-6/K)	5.85	4.2	5.0
Kukaniza (μΩm)	11-13	13	10

Ubwino wotisankha:
▪ Kusankha Zinthu: Zida za graphite zoyera kwambiri zimagwiritsidwa ntchito kuonetsetsa kuti zinthu zili bwino.
▪ Ukadaulo wopangira: Kusindikiza kwa Isostatic kumagwiritsidwa ntchito kutsimikizira kuchuluka kwazinthu komanso kufanana.
▪ Kusintha makulidwe: Maboti a graphite a kukula ndi mawonekedwe osiyanasiyana amatha kusinthidwa malinga ndi zosowa za makasitomala.
▪ Chithandizo cha pamwamba: Njira zosiyanasiyana zochizira pamwamba zimaperekedwa, monga zokutira silicon carbide, boron nitride, ndi zina zotero, kuti zigwirizane ndi zofunikira zosiyanasiyana.