Semicera imapereka zokutira zapadera za tantalum carbide (TaC) pazinthu zosiyanasiyana ndi zonyamulira.Semicera kutsogolera njira yokutira imathandizira zokutira za tantalum carbide (TaC) kuti zikhale zoyera kwambiri, kukhazikika kwa kutentha kwambiri komanso kulolerana kwamankhwala, kupititsa patsogolo mtundu wamakristali a SIC/GAN ndi zigawo za EPI (Graphite yokutidwa ndi TaC susceptor), ndi kukulitsa moyo wa zigawo zikuluzikulu za reactor. Kugwiritsa ntchito tantalum carbide TaC ❖ kuyanika ndi kuthetsa vuto m'mphepete ndi kusintha khalidwe la kristalo kukula, ndi Semicera wapambana anathetsa tantalum carbide ❖ kuyanika luso (CVD), kufika mlingo mayiko apamwamba.
Pambuyo pazaka za chitukuko, Semicera yagonjetsa teknoloji yaCVD TaCndi zoyesayesa zolumikizana za dipatimenti ya R&D. Zowonongeka ndizosavuta kuchitika pakukula kwa zowotcha za SiC, koma mutatha kugwiritsa ntchitoTaC, kusiyana kwake ndi kwakukulu. Pansipa pali kufananiza kwa zophika zophika ndi popanda TaC, komanso magawo a Semicera pakukula kwa kristalo umodzi.
ndi komanso popanda TaC
Mukatha kugwiritsa ntchito TaC (kumanja)
Kuphatikiza apo, moyo wautumiki wa zinthu zokutira za Semicera za TaC ndi zazitali komanso zosagwirizana ndi kutentha kwambiri kuposa za zokutira za SiC. Pambuyo pa nthawi yayitali ya kuyeza kwa labotale, TaC yathu imatha kugwira ntchito kwa nthawi yayitali mpaka madigiri 2300 Celsius. Izi ndi zina mwa zitsanzo zathu:
(a) Chithunzi chojambula cha chipangizo chokulirapo cha SiC single crystal ingot pogwiritsa ntchito njira ya PVT (b) bulaketi yambewu yokutidwa ndi TaC yapamwamba (kuphatikiza mbewu ya SiC) (c) mphete ya kalozera ya graphite yokutidwa ndi TAC
