Magawo olimba a CVD SILICON CARBIDE amadziwika ngati kusankha koyambirira kwa mphete za RTP/EPI ndi zoyambira ndi zigawo za plasma aetch cavity zomwe zimagwira ntchito pamatenthedwe apamwamba ofunikira (> 1500 ℃), zofunika pachiyero ndizokwera kwambiri (> 99.9995%) ndi ntchitoyo imakhala yabwino makamaka pamene kukana kwa mankhwala kuli kwakukulu kwambiri. Zidazi zilibe magawo achiwiri pamphepete mwa tirigu, kotero kuti zigawo zake zimapanga tinthu tating'onoting'ono kuposa zipangizo zina. Kuonjezera apo, zigawozi zimatha kutsukidwa pogwiritsa ntchito HF / HCl yotentha ndi kuwonongeka pang'ono, zomwe zimapangitsa kuti tinthu tating'onoting'ono tizikhala ndi moyo wautali wautumiki.