Kuyeretsa kwakukulu kwa SiC Carrier / Susceptor

Kuyeretsedwa kwakukulu kwa SiC Carrier/Susceptor Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Silicon carbide bearing disc imadziwikanso kuti SIC tray, silicon carbide etching disc, ICP etching disc. Silicon carbide tray for LED etching (SiC tray) φ600mm ndi chowonjezera chapadera chakuya silicon etching (ICP etching makina).

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Kufotokozera

Silicon carbide ceramics imakhala ndi makina abwino kwambiri kutentha kutentha, monga mphamvu yayikulu, kuuma kwakukulu, modulus yotanuka kwambiri, ndi zina zotero, ilinso ndi kukhazikika kwapamwamba kwambiri kwa kutentha monga kutsika kwa kutentha, kutsika kwa kutentha kwapakati, ndi kuuma kwapadera komanso kuwala. processing ntchito.
Ndiwoyenera makamaka kupanga zida zadothi zokhazikika pazida zophatikizika zamagawo monga makina a lithography, omwe amagwiritsidwa ntchito kwambiri popanga chonyamulira cha SiC / susceptor, bwato la SiC wafer, kuyamwa chimbale, mbale yozizirira madzi, chowunikira mwatsatanetsatane, kabati ndi zida zina za ceramic.

chonyamulira2

chonyamulira3

chonyamulira4

Ubwino wake

High kutentha kukana: ntchito yachibadwa pa 1800 ℃
Kutentha kwapamwamba: kofanana ndi zinthu za graphite
Kuuma kwakukulu: kuuma kwachiwiri kwa diamondi, boron nitride
Kukana kwa dzimbiri: asidi amphamvu ndi alkali alibe dzimbiri, kukana kwa dzimbiri kuli bwino kuposa tungsten carbide ndi alumina.
Kulemera kopepuka: kachulukidwe kochepa, pafupi ndi aluminiyamu
Palibe mapindikidwe: otsika coefficient of matenthedwe kukula
Thermal shock resistance: imatha kupirira kusintha kwa kutentha, kukana kugwedezeka kwa kutentha, ndipo imakhala yokhazikika
Silicon carbide chonyamulira monga sic etching chonyamulira, ICP etching susceptor, chimagwiritsidwa ntchito semiconductor CVD, vacuum sputtering etc.

Ubwino wake

Katundu	Mtengo	Njira
Kuchulukana	3.21g/cc	Sink-float ndi dimension
Kutentha kwenikweni	0.66 J/g °K	Kuwala kwa laser pulsed
Flexural mphamvu	450 MPa 560 MPa	4 point bend, RT4 point bend, 1300°
Kulimba kwa fracture	2.94 MPa m1/2	Microindentation
Kuuma	2800	Vicker, 500g katundu
Elastic ModulusYoung's Modulus	450 GPA430 GPA	4 pt bend, RT4 pt bend, 1300 °C
Kukula kwambewu	2 - 10 μm	Mtengo wa SEM

Mbiri Yakampani

WeiTai Energy Technology Co., Ltd. ndi katundu wotsogola wa zoumba zapamwamba semiconductor ndi wopanga yekha ku China amene nthawi imodzi kupereka mkulu-chiyero pakachitsulo carbide ceramic (makamaka Recrystallized SiC) ndi CVD SiC ❖ kuyanika. Kuphatikiza apo, kampani yathu idadziperekanso ku minda ya ceramic monga aluminiyamu nitride, zirconia, ndi silicon nitride, etc.

Zogulitsa zathu zazikulu kuphatikiza: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer boat (Photovoltaic & Semiconductor), silicon carbide ng'anjo chubu, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide mtengo, komanso zokutira CVD SiC ndi TaC zokutira. Zogulitsa zomwe zimagwiritsidwa ntchito makamaka m'mafakitale a semiconductor ndi photovoltaic, monga zida zakukula kwa kristalo, epitaxy, etching, ma CD, zokutira ndi ng'anjo zoyatsira, etc.
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