Semicera ndiwonyadira kuperekaGa2O3Gawo lapansi, chida cham'mphepete chomwe chakonzeka kusintha mphamvu zamagetsi ndi ma optoelectronics.Gallium Oxide (Ga2O3) magawoamadziwika chifukwa cha ultra-wide bandgap, kuwapanga kukhala abwino pazida zamphamvu kwambiri komanso zothamanga kwambiri.
Zofunika Kwambiri:
• Ultra-Wide Bandgap: Ga2O3 imapereka bandgap pafupifupi 4.8 eV, yomwe imakulitsa kwambiri kuthekera kwake kuthana ndi ma voltages apamwamba ndi kutentha poyerekeza ndi zida zachikhalidwe monga Silicon ndi GaN.
• High Breakdown Voltage: Ndi gawo lapadera losweka, theGa2O3Gawo lapansindi yabwino pazida zomwe zimafuna mphamvu yamagetsi apamwamba, kuonetsetsa kuti zikuyenda bwino komanso zodalirika.
• Kukhazikika kwa Matenthedwe: Kukhazikika kwapamwamba kwa zinthuzo kumapangitsa kuti ikhale yoyenera kugwiritsidwa ntchito m'malo ovuta kwambiri, kusunga magwiridwe antchito ngakhale pamavuto.
• Ntchito Zosiyanasiyana: Zabwino kuti zigwiritsidwe ntchito pamagetsi apamwamba kwambiri, zida za UV optoelectronic, ndi zina, zomwe zimapereka maziko olimba a machitidwe apamwamba a zamagetsi.
Dziwani za tsogolo laukadaulo wa semiconductor ndi Semicera'sGa2O3Gawo lapansi. Zapangidwa kuti zigwirizane ndi zomwe zikukulirakulira zamagetsi amphamvu kwambiri komanso othamanga kwambiri, gawo lapansili limakhazikitsa mulingo watsopano wogwirira ntchito komanso kukhazikika. Khulupirirani Semicera kuti ikupatseni mayankho azinthu zovuta kwambiri.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
