Kupaka kwa CVD SiC

Kuyamba kwa Silicon Carbide Coating 

Zovala zathu za Chemical Vapor Deposition (CVD) Silicon Carbide (SiC) ndizosanjikiza zolimba kwambiri komanso zosavala, zabwino m'malo omwe amafunikira dzimbiri komanso kukana kutentha.Kupaka kwa Silicon Carbideimayikidwa mu zigawo zoonda pamagawo osiyanasiyana kudzera munjira ya CVD, yopereka mawonekedwe apamwamba kwambiri.


Zofunika Kwambiri

       ● -Chiyero Chapadera: Kudzitamandira kopitilira muyeso-woyera wa99.99995%, wathuKupaka kwa SiCamachepetsa chiopsezo choyipitsidwa muzochitika zodziwika bwino za semiconductor.

● -Kukana Kwapamwamba: Imawonetsa kukana kwabwino kwa mavalidwe ndi dzimbiri, ndikupangitsa kuti ikhale yabwino pamakonzedwe ovuta amankhwala ndi plasma.
● -High Thermal Conductivity: Imawonetsetsa kuti ikugwira ntchito modalirika pakutentha kwambiri chifukwa champhamvu zake zotentha.
● -Dimensional Kukhazikika: Imasunga umphumphu pa kutentha kosiyanasiyana, chifukwa cha kutsika kwake kowonjezera kutentha.
● -Kulimba Kulimba: Ndi kuuma mlingo wa40 GPA, zokutira zathu za SiC zimalimbana ndi kukhudzidwa kwakukulu komanso kuyabwa.
● -Smooth Surface Finish: Amapereka mapeto ngati galasi, kuchepetsa kupanga tinthu tating'onoting'ono komanso kupititsa patsogolo ntchito.


Mapulogalamu

Semicera Zovala za SiCamagwiritsidwa ntchito m'magawo osiyanasiyana opanga semiconductor, kuphatikiza:

● -Kupanga Chip cha LED
● -Kupanga kwa Polysilicon
● -Kukula kwa Semiconductor Crystal
● -Silicon ndi SiC Epitaxy
● -Thermal Oxidation and Diffusion (TO&D)

 

Timapereka zida zokutira za SiC zopangidwa kuchokera ku graphite yamphamvu kwambiri ya isostatic, kaboni fiber-reinforced carbon ndi 4N recrystallized silicon carbide, yopangidwira ma reactors okhala ndi bedi,STC-TCS converters, CZ unit reflectors, SiC wafer paddle, SiCwafer paddle, SiC wafer chubu, ndi zonyamulira zopyapyala zomwe zimagwiritsidwa ntchito mu PECVD, silicon epitaxy, MOCVD process.


Ubwino

● -Kutalikitsidwa kwa Moyo Wanu: Amachepetsa kwambiri nthawi yochepetsera zida komanso mtengo wokonza, kupititsa patsogolo ntchito zonse zopanga.
● -Kupititsa patsogolo Ubwino: Imakwaniritsa malo oyeretsedwa kwambiri ofunikira pakukonza semiconductor, motero kumakulitsa mtundu wazinthu.
● -Kuwonjezera Mwachangu: Imakulitsa njira zamatenthedwe ndi ma CVD, zomwe zimapangitsa kuti nthawi yozungulira ikhale yayifupi komanso zokolola zambiri.


Mfundo Zaukadaulo
     

● -Mapangidwe: FCC β gawo polycrystaline, makamaka (111) oriented
● -Kuchulukanakukula: 3.21g/cm³
● -Kuuma: 2500 Vickes kuuma (500g katundu)
● -Kuthyoka Kwambiri: 3.0 MPa·m1/2
● -Kuwonjezera Kutentha Kwambiri (100–600 °C): 4.3 x 10-6k-1
● -Elastic Modulus(1300 ℃):435 GPA
● -Kunenepa Kwambiri Kwafilimu:100µm
● -Kulimba Pamwamba:2-10 µm


Purity Data (Yoyesedwa ndi Glow Discharge Mass Spectroscopy)

Chinthu

ppm

Chinthu

ppm

Li

<0.001

Cu

<0.01

Be

<0.001

Zn

<0.05

Al

<0.04

Ga

<0.01

P

<0.01

Ge

<0.05

S

<0.04

As

<0.005

K

<0.05

In

<0.01

Ca

<0.05

Sn

<0.01

Ti

<0.005

Sb

<0.01

V

<0.001

W

<0.05

Cr

<0.05

Te

<0.01

Mn

<0.005

Pb

<0.01

Fe

<0.05

Bi

<0.05

Ni

<0.01

 

 
Pogwiritsa ntchito ukadaulo wamakono wa CVD, timapereka ogwirizanaSiC zokutira zothetserakukwaniritsa zosowa zamakasitomala athu ndikuthandizira kupita patsogolo pakupanga ma semiconductor.