CVD SiC mphete ya Bulk

Bulk CVD SiC Ring Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Mphete zambiri za CVD SiC zimagwiritsa ntchito gasi wa silicon hydride (monga silicon hydride) ndi mpweya wotulutsa mpweya (monga methane) monga zopangira, zomwe zimachita kutentha kwambiri kuti zisungidwe zazikuluzikulu za SiC pagawo lapansi kapena nkhungu. Njirayi imalola kuti SiC ikhale yofanana pamtunda waukulu, ndikupanga mphete yolimba komanso yosasinthasintha.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Chifukwa chiyani Silicon Carbide Etching mphete?

RTPCVD SiC mpheteamagwiritsidwa ntchito kwambiri m'mafakitale ndi sayansi m'malo otentha kwambiri komanso malo owononga. Imagwira ntchito yofunika kwambiri pakupanga semiconductor, optoelectronics, makina olondola komanso makampani opanga mankhwala. Mapulogalamu apadera ndi awa:

1. Kupanga semiconductor:RTP CVD SiC mpheteangagwiritsidwe ntchito kutentha ndi kuziziritsa zida za semiconductor, kupereka khola kutentha kutentha ndi kuonetsetsa kulondola ndi kusasinthasintha kwa ndondomekoyi.

2. Optoelectronics: Chifukwa cha kutentha kwake kwabwino kwambiri komanso kutentha kwakukulu, RTPCVD SiC mpheteangagwiritsidwe ntchito ngati zipangizo zothandizira ndi kutentha kutentha kwa lasers, zida zoyankhulirana za fiber optic ndi zigawo za kuwala.

3. Makina olondola: Mphete za RTP CVD SiC zitha kugwiritsidwa ntchito popanga zida zolondola ndi zida zomwe zimatentha kwambiri komanso malo owononga, monga ng'anjo zotentha kwambiri, zida za vacuum ndi zida zamagetsi.

4. Makampani a Chemical: Chifukwa cha kukana kwake kwa dzimbiri ndi kukhazikika kwa mankhwala, mphete za RTP CVD SiC zitha kugwiritsidwa ntchito m'mitsuko, mapaipi ndi ma reactors muzochita zamankhwala ndi njira zothandizira.

Epi System

RTP System

CVD System

Zogulitsa:

1. Kumanani ndi njira yomwe ili pansipa 28nm

2. Super dzimbiri kukana

3. Super woyera ntchito

4. Super kuuma

5. Kuchulukana kwakukulu

6. Kukana kutentha kwakukulu

7. Valani kukana

Ntchito yamalonda:

Zida za silicon carbide zimakhala ndi mawonekedwe olimba kwambiri, kukana kuvala, kukana kwa dzimbiri komanso kukhazikika kwa kutentha kwambiri. Zogulitsa zomwe zimakhala ndi magwiridwe antchito ambiri zimagwiritsidwa ntchito kwambiri mu etching youma ndi njira za TF/Diffusion.