Blue/green LED epitaxy yochokera ku semicera imapereka njira zotsogola zopangira ma LED apamwamba kwambiri. Zopangidwa kuti zithandizire njira zokulirapo za epitaxial, ukadaulo wa semicera wa Blue/green LED epitaxy umakulitsa luso komanso kulondola popanga ma LED a buluu ndi obiriwira, ofunikira pakugwiritsa ntchito ma optoelectronic osiyanasiyana. Pogwiritsa ntchito zipangizo zamakono za Si Epitaxy ndi SiC Epitaxy, yankholi limatsimikizira ubwino ndi kulimba.
Popanga, MOCVD Susceptor imakhala ndi gawo lofunikira, limodzi ndi zinthu monga PSS Etching Carrier, ICP Etching Carrier, ndi RTP Carrier, zomwe zimakulitsa chilengedwe chakukula kwa epitaxial. Semicera's Blue/green LED epitaxy idapangidwa kuti izipereka chithandizo chokhazikika cha LED Epitaxial Susceptor, Barrel Susceptor, ndi Monocrystalline Silicon, kuwonetsetsa kuti pakupanga zotsatira zosasinthika, zapamwamba kwambiri.
Njira ya epitaxyyi ndiyofunika kwambiri popanga Photovoltaic Parts ndikuthandizira mapulogalamu monga GaN pa SiC Epitaxy, kuwongolera magwiridwe antchito a semiconductor. Kaya mumasinthidwe a Pancake Susceptor kapena ogwiritsidwa ntchito pamakonzedwe ena apamwamba, mayankho a semicera a Blue/green LED epitaxy amapereka magwiridwe antchito odalirika, othandizira opanga kuti akwaniritse kufunikira kokulira kwa zida zapamwamba za LED.
Zofunikira zazikulu:
1. Kutentha kwakukulu kwa okosijeni kukana:
kukana kwa okosijeni kumakhalabe kwabwino kwambiri pamene kutentha kumafika pa 1600 C.
2. Chiyero chachikulu: chopangidwa ndi kuyika kwa nthunzi wamankhwala pansi pa kutentha kwambiri kwa chlorination.
3. Kukana kukokoloka kwa nthaka: kuuma kwakukulu, pamwamba, tinthu tating'onoting'ono.
4. Kukana kwa dzimbiri: asidi, alkali, mchere ndi organic reagents.
Zofunikira Zazikulu zaKupaka kwa CVD-SIC
| SiC-CVD Properties | ||
| Kapangidwe ka Crystal | FCC β gawo | |
| Kuchulukana | g/cm³ | 3.21 |
| Kuuma | Vickers kuuma | 2500 |
| Ukulu wa Mbewu | μm | 2-10 |
| Chemical Purity | % | 99.99995 |
| Kutentha Mphamvu | J·kg-1 ·K-1 | 640 |
| Kutentha kwa Sublimation | ℃ | 2700 |
| Felexural Mphamvu | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt bend, 1300 ℃) | 430 |
| Kukula kwa Thermal (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
