Semicera's 8 Inch N-type SiC Wafers ali patsogolo pa luso la semiconductor, ndikupereka maziko olimba opangira zida zamagetsi zogwira ntchito kwambiri. Ma wafer awa adapangidwa kuti akwaniritse zofunikira zamagetsi amakono, kuyambira pamagetsi amagetsi mpaka mabwalo othamanga kwambiri.
Ma doping amtundu wa N mu zowotcha za SiC izi zimakulitsa mphamvu yamagetsi, kuwapangitsa kukhala abwino kwa ntchito zosiyanasiyana, kuphatikiza ma diode amagetsi, ma transistors, ndi amplifiers. Kuwongolera kwapamwamba kumatsimikizira kutayika kwa mphamvu zochepa komanso kugwira ntchito moyenera, zomwe ndizofunikira kwambiri pazida zomwe zimagwira ntchito pafupipafupi komanso mphamvu zamagetsi.
Semicera imagwiritsa ntchito njira zopangira zapamwamba kuti apange zowotcha za SiC zokhala ndi mawonekedwe apamwamba komanso zolakwika zochepa. Mlingo wolondolawu ndi wofunikira pamapulogalamu omwe amafunikira magwiridwe antchito komanso kulimba, monga mafakitale apamlengalenga, magalimoto, ndi matelefoni.
Kuphatikizira Semicera's 8 Inch N-type SiC Wafers mumzere wanu wopanga kumapereka maziko opangira zida zomwe zimatha kupirira malo ovuta komanso kutentha kwambiri. Zophika izi ndizoyenera kugwiritsa ntchito kutembenuza mphamvu, ukadaulo wa RF, ndi magawo ena ofunikira.
Kusankha Semicera's 8 Inch N-type SiC Wafers kumatanthauza kuyika ndalama muzinthu zomwe zimaphatikiza sayansi yapamwamba kwambiri ndi uinjiniya wolondola. Semicera yadzipereka kupititsa patsogolo luso la matekinoloje a semiconductor, ndikupereka mayankho omwe amathandizira kudalirika komanso kudalirika kwa zida zanu zamagetsi.
Zinthu | Kupanga | Kafukufuku | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
Magetsi Parameters | |||
Dopant | n-mtundu wa Nayitrogeni | ||
Kukaniza | 0.015-0.025ohm · masentimita | ||
Mechanical Parameters | |||
Diameter | 150.0 ± 0.2mm | ||
Makulidwe | 350±25 μm | ||
Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
Sekondale flat | Palibe | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
Kapangidwe | |||
Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
Front Quality | |||
Patsogolo | Si | ||
Kumaliza pamwamba | Si-nkhope CMP | ||
Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
Chizindikiro cha laser chakutsogolo | Palibe | ||
Back Quality | |||
Kumbuyo komaliza | C-nkhope CMP | ||
Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
M'mphepete | |||
M'mphepete | Chamfer | ||
Kupaka | |||
Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. |