6 lnch n-mtundu wa sic gawo lapansi

Kufotokozera Kwachidule:

6-inchi n-mtundu wa SiC gawo lapansi ndi semiconductor zinthu zomwe zimadziwika ndi kugwiritsa ntchito 6-inch wafer size, zomwe zimawonjezera kuchuluka kwa zida zomwe zitha kupangidwa pa chowotcha chimodzi pamalo okulirapo, potero kuchepetsa mtengo wa chipangizocho. . Kupanga ndi kugwiritsa ntchito magawo a 6-inch n-type SiC adapindula ndi kupita patsogolo kwa matekinoloje monga njira ya kukula kwa RAF, yomwe imachepetsa kusuntha mwa kudula makhiristo pamodzi ndi dislocations ndi njira yofananira ndi makhiristo okulirakulira, potero kumapangitsa kuti gawo lapansi likhale labwino. Kugwiritsiridwa ntchito kwa gawo lapansili ndikofunikira kwambiri pakuwongolera kupanga bwino komanso kuchepetsa mtengo wa zida zamagetsi za SiC.

Titumizireni imelo

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Silicon carbide (SiC) single crystal chuma ali ndi gulu lalikulu kusiyana m'lifupi (~ Si 3 nthawi), mkulu matenthedwe madutsidwe (~Si 3.3 nthawi kapena GaAs 10 nthawi), mkulu ma elekitironi machulukitsidwe mlingo kusamuka (~Si 2.5 nthawi), mkulu kuwonongeka magetsi munda (~ Si 10 nthawi kapena GaAs 5 nthawi) ndi zina zabwino kwambiri.

Zida za semiconductor za m'badwo wachitatu makamaka zikuphatikizapo SiC, GaN, diamondi, ndi zina zotero, chifukwa kusiyana kwake kwa gulu (Mwachitsanzo) ndi kwakukulu kuposa kapena kofanana ndi ma volts 2.3 amagetsi (eV), omwe amadziwikanso kuti zipangizo zamakono zopangira magetsi. Poyerekeza ndi zida za semiconductor za m'badwo wachitatu ndi wachiwiri, zida za semiconductor za m'badwo wachitatu zili ndi zabwino zaukadaulo wapamwamba wamatenthedwe, malo amagetsi osweka kwambiri, kuchuluka kwakusamuka kwa ma elekitironi apamwamba komanso mphamvu zomangirira, zomwe zimatha kukwaniritsa zofunikira zatsopano zamaukadaulo amakono amagetsi apamwamba. kutentha, mphamvu, kuthamanga, kuthamanga kwafupipafupi ndi kukana kwa radiation ndi zinthu zina zovuta. Ili ndi mwayi wofunikira wogwiritsa ntchito chitetezo cha dziko, ndege, ndege, kufufuza mafuta, kusungirako kuwala, ndi zina zotero, ndipo imatha kuchepetsa kutaya mphamvu ndi 50% m'mafakitale ambiri monga mauthenga a Broadband, mphamvu ya dzuwa, kupanga magalimoto, kuyatsa kwa semiconductor, ndi gridi yanzeru, ndipo kumatha kuchepetsa kuchuluka kwa zida ndi 75%, zomwe ndizofunikira kwambiri pakukula kwa sayansi ndiukadaulo wa anthu.

Mphamvu za Semicera zimatha kupereka makasitomala apamwamba kwambiri (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; Komanso, tikhoza kupereka makasitomala ndi homogeneous ndi heterogeneous pakachitsulo carbide epitaxial mapepala; Tikhozanso kusintha pepala la epitaxial malinga ndi zosowa zenizeni za makasitomala, ndipo palibe chiwerengero chochepa cha dongosolo.

ZOYENERA KUKHALA ZOPHUNZITSA

Kukula	6-inchi
Diameter	150.0mm+0mm/-0.2mm
Kuzungulira Pamwamba	kutali: 4 ° kulowera <1120> ± 0.5 °
Utali Woyambira Wathyathyathya	47.5mm1.5 mm
Yoyambira Flat Orientation	<1120>±1.0°
Sekondale Flat	Palibe
Makulidwe	350.0um±25.0um
Polytype	4H
Mtundu wa Conductive	n-mtundu

ZINTHU ZOKHUDZA KHRISTU

6-inchi
Kanthu	Gawo la P-MOS	Gawo la P-SBD
Kukaniza	0.015Ω·cm-0.025Ω·cm
Polytype	Palibe chololedwa
Kuchulukana kwa Micropipe	≤0.2/cm2	≤0.5/cm2
EPD	≤4000/cm2	≤8000/cm2
TED	≤3000/cm2	≤6000/cm2
BPD	≤1000/cm2	≤2000/cm2
TSD	≤300/cm2	≤1000/cm2
SF (Yoyezedwa ndiUV-PL-355nm)	≤0.5% dera	≤1%.
Hex mbale ndi mkulu mwamphamvu kuwala	Palibe chololedwa
Visual CarbonInclusions ndi kuwala kwamphamvu kwambiri	Cumulativearea≤0.05%