Semicera's 6 Inch Semi-Insulating HPSI SiC Wafers adapangidwa kuti akwaniritse zofunikira zaukadaulo wamakono wa semiconductor. Ndi chiyero chapadera komanso kusasinthasintha, zowotcha izi zimakhala ngati maziko odalirika opangira zida zamagetsi zamagetsi zamagetsi.
Zophika za HPSI SiC izi zimadziwika chifukwa cha kutenthetsa kwawo komanso kutsekemera kwamagetsi, zomwe ndizofunikira kwambiri pakuwongolera magwiridwe antchito a zida zamagetsi ndi mabwalo othamanga kwambiri. Ma semi-insulating amathandizira kuchepetsa kusokonezeka kwamagetsi ndikukulitsa magwiridwe antchito a chipangizocho.
Kupanga kwapamwamba kwambiri kogwiritsidwa ntchito ndi Semicera kumatsimikizira kuti chowotcha chilichonse chimakhala ndi makulidwe a yunifolomu komanso zolakwika zochepa zapamtunda. Kulondola kumeneku ndikofunikira pamapulogalamu apamwamba monga zida zamawayilesi, ma inverters amagetsi, ndi makina a LED, pomwe magwiridwe antchito ndi kulimba ndizofunikira kwambiri.
Pogwiritsa ntchito njira zamakono zopangira, Semicera imapereka zophika zomwe sizimangokwaniritsa koma kupitirira miyezo yamakampani. Kukula kwa 6-inchi kumapereka kusinthasintha pakukulitsa kupanga, kuyang'anira kafukufuku ndi ntchito zamalonda mu gawo la semiconductor.
Kusankha Semicera's 6 Inch Semi-Insulating HPSI SiC Wafers kumatanthauza kuyika ndalama pa chinthu chomwe chimapereka magwiridwe antchito osasinthika. Zophika izi ndi gawo la kudzipereka kwa Semicera kupititsa patsogolo luso laukadaulo wa semiconductor kudzera muzinthu zatsopano komanso mwaluso mwaluso.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 ea/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zikanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Zigawo za polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zikanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
