6 Inchi N-mtundu wa SiC Wafer

Kufotokozera Kwachidule:

Semicera's 6 Inch N-mtundu wa SiC Wafer imapereka matenthedwe apamwamba kwambiri komanso mphamvu yayikulu yamagetsi, ndikupangitsa kuti ikhale chisankho chapamwamba pamagetsi ndi zida za RF. Chophika ichi, chopangidwa kuti chikwaniritse zofuna zamakampani, chimapereka chitsanzo cha kudzipereka kwa Semicera pazabwino komanso luso lazopangapanga za semiconductor.


Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Semicera's 6 Inch N-type SiC Wafer imayima patsogolo paukadaulo wa semiconductor. Chopangidwa kuti chizigwira bwino ntchito, chophatikizika ichi chimaposa mphamvu zamphamvu, zothamanga kwambiri, komanso zotentha kwambiri, zomwe ndizofunikira pazida zamakono zamakono.

Wafer wathu wa 6 Inchi N-mtundu wa SiC amakhala ndi ma electron apamwamba komanso osakanizidwa pang'ono, zomwe ndizofunikira kwambiri pazida zamagetsi monga MOSFETs, diode, ndi zigawo zina. Zinthuzi zimatsimikizira kutembenuka kwamphamvu kwamphamvu komanso kuchepetsa kutentha kwa kutentha, kupititsa patsogolo ntchito ndi moyo wamagetsi amagetsi.

Njira zowongolera bwino za Semicera zimatsimikizira kuti chowotcha chilichonse cha SiC chimakhala ndi kusalala bwino komanso zolakwika zochepa. Kusamalitsa mwatsatanetsatane kumeneku kumawonetsetsa kuti ma wafers athu amakwaniritsa zofunikira zamafakitale monga zamagalimoto, zamlengalenga, ndi matelefoni.

Kuphatikiza pamagetsi ake apamwamba kwambiri, chowotcha cha N-mtundu wa SiC chimapereka kukhazikika kwamafuta komanso kukana kutentha kwambiri, ndikupangitsa kuti ikhale yabwino kwa malo omwe zida wamba zimatha kulephera. Kuthekera kumeneku ndi kofunikira makamaka pamapulogalamu okhudzana ndi ma frequency apamwamba komanso mphamvu zambiri.

Posankha Semicera's 6 Inch N-mtundu wa SiC Wafer, mukugulitsa chinthu chomwe chikuyimira mtsogolo mwaukadaulo wa semiconductor. Tadzipereka kupereka midadada yomangira zida zotsogola, kuwonetsetsa kuti ogwira nawo ntchito m'mafakitale osiyanasiyana ali ndi mwayi wopeza zida zabwino kwambiri zaukadaulo wawo.

Zinthu

Kupanga

Kafukufuku

Dummy

Crystal Parameters

Polytype

4H

Kulakwitsa koyang'ana pamwamba

<11-20>4±0.15°

Magetsi Parameters

Dopant

n-mtundu wa Nayitrogeni

Kukaniza

0.015-0.025ohm · masentimita

Mechanical Parameters

Diameter

150.0 ± 0.2mm

Makulidwe

350±25 μm

Choyambira chapansi pamayendedwe

[1-100] ± 5°

Kutalika kosalala koyambirira

47.5 ± 1.5mm

Sekondale flat

Palibe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kugwada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Kapangidwe

Kuchuluka kwa Micropipe

<1 pa/cm2

<10 pa/cm2

<15 pa/cm2

Zitsulo zonyansa

≤5E10 maatomu/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 pa/cm2

≤1000 ea/cm2

NA

Front Quality

Patsogolo

Si

Kumaliza pamwamba

Si-nkhope CMP

Tinthu ting'onoting'ono

≤60ea/wafer (kukula ≥0.3μm)

NA

Zikanda

≤5ea/mm. Kutalika kwake ≤Diameter

Kutalika kokwanira≤2 * Diameter

NA

Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa

Palibe

NA

M'mphepete tchipisi / indents / fracture / hex mbale

Palibe

Zigawo za polytype

Palibe

Malo owonjezera≤20%

Malo owonjezera ≤30%

Chizindikiro cha laser chakutsogolo

Palibe

Back Quality

Kumbuyo komaliza

C-nkhope CMP

Zikanda

≤5ea/mm,Cumulative kutalika≤2*Diameter

NA

Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents)

Palibe

Msana roughness

Ra≤0.2nm (5μm*5μm)

Chizindikiro cha laser kumbuyo

1 mm (kuchokera m'mphepete)

M'mphepete

M'mphepete

Chamfer

Kupaka

Kupaka

Epi-okonzeka ndi zoyika vacuum

Kupaka makaseti amitundu yambiri

*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD.

tech_1_2_size
Zophika za SiC

  • Zam'mbuyo:
  • Ena: