Semicera's 6 Inch N-type SiC Wafer imayima patsogolo paukadaulo wa semiconductor. Chopangidwa kuti chizigwira bwino ntchito, chophatikizika ichi chimaposa mphamvu zamphamvu, zothamanga kwambiri, komanso zotentha kwambiri, zomwe ndizofunikira pazida zamakono zamakono.
Wafer wathu wa 6 Inchi N-mtundu wa SiC amakhala ndi ma electron apamwamba komanso osakanizidwa pang'ono, zomwe ndizofunikira kwambiri pazida zamagetsi monga MOSFETs, diode, ndi zigawo zina. Zinthuzi zimatsimikizira kutembenuka kwamphamvu kwamphamvu komanso kuchepetsa kutentha kwa kutentha, kupititsa patsogolo ntchito ndi moyo wamagetsi amagetsi.
Njira zowongolera bwino za Semicera zimatsimikizira kuti chowotcha chilichonse cha SiC chimakhala ndi kusalala bwino komanso zolakwika zochepa. Kusamalitsa mwatsatanetsatane kumeneku kumawonetsetsa kuti ma wafers athu amakwaniritsa zofunikira zamafakitale monga zamagalimoto, zamlengalenga, ndi matelefoni.
Kuphatikiza pamagetsi ake apamwamba kwambiri, chowotcha cha N-mtundu wa SiC chimapereka kukhazikika kwamafuta komanso kukana kutentha kwambiri, ndikupangitsa kuti ikhale yabwino kwa malo omwe zida wamba zimatha kulephera. Kuthekera kumeneku ndi kofunikira kwambiri pamapulogalamu okhudzana ndi ma frequency apamwamba komanso mphamvu zambiri.
Posankha Semicera's 6 Inch N-mtundu wa SiC Wafer, mukugulitsa chinthu chomwe chikuyimira mtsogolo mwaukadaulo wa semiconductor. Tadzipereka kupereka midadada yomangira zida zotsogola, kuwonetsetsa kuti ogwira nawo ntchito m'mafakitale osiyanasiyana ali ndi mwayi wopeza zida zabwino kwambiri zaukadaulo wawo.
| Zinthu | Kupanga | Kafukufuku | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Kulakwitsa koyang'ana pamwamba | <11-20>4±0.15° | ||
| Magetsi Parameters | |||
| Dopant | n-mtundu wa Nayitrogeni | ||
| Kukaniza | 0.015-0.025ohm · masentimita | ||
| Mechanical Parameters | |||
| Diameter | 150.0 ± 0.2mm | ||
| Makulidwe | 350±25 μm | ||
| Choyambira chapansi pamayendedwe | [1-100] ± 5° | ||
| Kutalika kosalala koyambirira | 47.5 ± 1.5mm | ||
| Sekondale flat | Palibe | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kugwada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Front(Si-face) roughness(AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Kapangidwe | |||
| Kuchuluka kwa Micropipe | <1 pa/cm2 | <10 pa/cm2 | <15 pa/cm2 |
| Zitsulo zonyansa | ≤5E10 maatomu/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 pa/cm2 | ≤1000 E/cm2 | NA |
| Front Quality | |||
| Patsogolo | Si | ||
| Kumaliza pamwamba | Si-nkhope CMP | ||
| Tinthu ting'onoting'ono | ≤60ea/wafer (kukula ≥0.3μm) | NA | |
| Zokanda | ≤5ea/mm. Kutalika kwake ≤Diameter | Kutalika kokwanira≤2 * Diameter | NA |
| Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa | Palibe | NA | |
| M'mphepete tchipisi / indents / fracture / hex mbale | Palibe | ||
| Magawo a polytype | Palibe | Malo owonjezera≤20% | Malo owonjezera ≤30% |
| Chizindikiro cha laser chakutsogolo | Palibe | ||
| Back Quality | |||
| Kumbuyo komaliza | C-nkhope CMP | ||
| Zokanda | ≤5ea/mm,Cumulative kutalika≤2*Diameter | NA | |
| Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents) | Palibe | ||
| Msana roughness | Ra≤0.2nm (5μm*5μm) | ||
| Chizindikiro cha laser kumbuyo | 1 mm (kuchokera m'mphepete) | ||
| M'mphepete | |||
| M'mphepete | Chamfer | ||
| Kupaka | |||
| Kupaka | Epi-okonzeka ndi zoyika vacuum Kupaka makaseti amitundu yambiri | ||
| *Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD. | |||
