6 Inchi N-mtundu wa SiC Substrate

Kufotokozera Kwachidule:

Semicera imapereka mitundu yosiyanasiyana ya 4H-8H SiC wafers. Kwa zaka zambiri, takhala tikupanga ndi kugulitsa zinthu ku semiconductor ndi mafakitale a photovoltaic. Zogulitsa zathu zazikulu ndi: Silicon carbide etch plates, silicon carbide boat trailers, silicon carbide wafer boat (PV & Semiconductor), silicon carbide ng'anjo yamachubu, silicon carbide cantilever paddles, silicon carbide chucks, silicon carbide matabwa, komanso CVD SiC zokutira Zovala za TaC. Kuphimba misika yambiri yaku Europe ndi America. Tikuyembekezera kukhala bwenzi lanu kwa nthawi yayitali ku China.

 

Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

Silicon carbide (SiC) single crystal chuma ali ndi gulu lalikulu kusiyana m'lifupi (~ Si 3 nthawi), mkulu matenthedwe madutsidwe (~Si 3.3 nthawi kapena GaAs 10 nthawi), mkulu ma elekitironi machulukitsidwe mlingo kusamuka (~Si 2.5 nthawi), mkulu kuwonongeka magetsi munda (~ Si 10 nthawi kapena GaAs 5 nthawi) ndi zina zabwino kwambiri.

Zida za semiconductor za m'badwo wachitatu makamaka zikuphatikizapo SiC, GaN, diamondi, ndi zina zotero, chifukwa kusiyana kwake kwa gulu (Mwachitsanzo) ndi kwakukulu kuposa kapena kofanana ndi ma volts 2.3 amagetsi (eV), omwe amadziwikanso kuti zipangizo zamakono zopangira magetsi. Poyerekeza ndi zida za semiconductor za m'badwo wachitatu ndi wachiwiri, zida za semiconductor za m'badwo wachitatu zili ndi zabwino zaukadaulo wapamwamba wamatenthedwe, malo amagetsi osweka kwambiri, kuchuluka kwakusamuka kwa ma elekitironi apamwamba komanso mphamvu zomangirira, zomwe zimatha kukwaniritsa zofunikira zatsopano zamaukadaulo amakono amagetsi apamwamba. kutentha, mphamvu, kuthamanga, kuthamanga kwafupipafupi komanso kukana kwa radiation ndi zinthu zina zovuta. Ili ndi mwayi wofunikira wogwiritsa ntchito chitetezo cha dziko, ndege, ndege, kufufuza mafuta, kusungirako kuwala, ndi zina zotero, ndipo imatha kuchepetsa kutaya mphamvu ndi 50% m'mafakitale ambiri monga mauthenga a Broadband, mphamvu ya dzuwa, kupanga magalimoto, kuyatsa kwa semiconductor, ndi gridi yanzeru, ndipo kumatha kuchepetsa kuchuluka kwa zida ndi 75%, zomwe ndizofunikira kwambiri pakukula kwa sayansi ndiukadaulo wa anthu.

Mphamvu za Semicera zimatha kupereka makasitomala apamwamba kwambiri (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; Komanso, tikhoza kupereka makasitomala ndi homogeneous ndi heterogeneous pakachitsulo carbide epitaxial mapepala; Tikhozanso kusintha pepala la epitaxial malinga ndi zosowa zenizeni za makasitomala, ndipo palibe chiwerengero chochepa cha dongosolo.

Zinthu

Kupanga

Kafukufuku

Dummy

Crystal Parameters

Polytype

4H

Kulakwitsa koyang'ana pamwamba

<11-20>4±0.15°

Magetsi Parameters

Dopant

n-mtundu wa Nayitrogeni

Kukaniza

0.015-0.025ohm · masentimita

Mechanical Parameters

Diameter

150.0 ± 0.2mm

Makulidwe

350±25 μm

Choyambira chapansi pamayendedwe

[1-100] ± 5°

Kutalika kosalala koyambirira

47.5 ± 1.5mm

Sekondale flat

Palibe

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm(5mm*5mm)

≤5 μm(5mm*5mm)

≤10 μm(5mm*5mm)

Kugwada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Front(Si-face) roughness(AFM)

Ra≤0.2nm (5μm*5μm)

Kapangidwe

Kuchuluka kwa Micropipe

<1 pa/cm2

<10 pa/cm2

<15 pa/cm2

Zitsulo zonyansa

≤5E10 maatomu/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 pa/cm2

≤1000 E/cm2

NA

Front Quality

Patsogolo

Si

Kumaliza pamwamba

Si-nkhope CMP

Tinthu ting'onoting'ono

≤60ea/wafer (kukula ≥0.3μm)

NA

Zokanda

≤5ea/mm. Kutalika kwake ≤Diameter

Kutalika kokwanira≤2 * Diameter

NA

Peel/maenje/madontho/mikwingwirima/ ming'alu/kuipitsidwa

Palibe

NA

M'mphepete tchipisi / indents / fracture / hex mbale

Palibe

Magawo a polytype

Palibe

Malo owonjezera≤20%

Malo owonjezera ≤30%

Chizindikiro cha laser chakutsogolo

Palibe

Back Quality

Kumbuyo komaliza

C-nkhope CMP

Zokanda

≤5ea/mm,Cumulative kutalika≤2*Diameter

NA

Zowonongeka zam'mbuyo (zolowera m'mphepete / ma indents)

Palibe

Msana roughness

Ra≤0.2nm (5μm*5μm)

Chizindikiro cha laser kumbuyo

1 mm (kuchokera m'mphepete)

M'mphepete

M'mphepete

Chamfer

Kupaka

Kupaka

Epi-okonzeka ndi zoyika vacuum

Kupaka makaseti amitundu yambiri

*Zindikirani: "NA" zikutanthauza kuti palibe pempho Zinthu zomwe sizinatchulidwe zingatanthauze SEMI-STD.

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Zophika za SiC

Semicera Ntchito Semicera ntchito 2 Makina opangira zida CNN processing, kuyeretsa mankhwala, CVD zokutira Utumiki wathu


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